台积电气体供应系统

GNGNSpecialtyGasSystemIntroductionSpecialtyGasSystemIntroduction‰‰SystemIntroductionSystemIntroduction‰‰PipingDesignConceptPipingDesignConcept‰‰SpecialtyGasClassification(MSDS)SpecialtyGasClassification(MSDS)‰‰GasCabinetGasCabinet‰‰BSGS(BulkSpecialtyGasSystem)BSGS(BulkSpecialtyGasSystem)‰‰ScrubberScrubber‰‰VMB/VMPVMB/VMP‰‰ComponentComponent‰‰SpecialtyGasSpecialtyGas‰‰HighPurityGasSystemHighPurityGasSystemSystemIntroductionSystemIntroductionGNGN¾¾量立不例離,,,,...¾¾流流GasCabinetVMB/PGasBoxScrubberGMS-,.-GMSGC,VMB/PToolGasBox異漏,理.-Scrubber理,更.ChuckByersGNGNSystemIntroductionSystemIntroduction¾¾類類::(inertgas)CF4,C2F6,SF6,N2O,C4F8,Ne/Kr,He/O20.5%,CHF3(toxic)/(corrosive):NF3,CL2,WF6,HBR,BCL3,SIH2CL2()Ne/Kr/F2(flammable):SIH4,CH2F2,CO,CH4/AR,CH3FChuckByersGNGNSystemIntroductionSystemIntroduction¾¾力類力類::):-BCL3,CLF3,WF6,,10psig,若易度不冷,塞,SUB-FAB冷.(heater)冷(chiller),,度,冷,更,度,若度,.):-ChuckByersSystemIntroductionSystemIntroductionGNGN¾¾)列:--連---),理,不暴露---VMB-/-SystemIntroductionSystemIntroductionGNGN¾¾HighPressureGasDeliverConfigurationHighPressureGasDeliverConfigurationTool(Fab3F)VMB/P(Fab2F)Cabinet(HPM)Cabinet(HPM)VMB/P(Fab2F)Tool(Fab3F)SystemIntroductionSystemIntroductionGNGN¾¾LowPressureGasDeliverConfigurationLowPressureGasDeliverConfigurationTool(Fab3F)VMB(Fab2F)Cabinet(Fab2F)Tool(Fab3F)Cabinet(Fab2F)VMB(Fab2F)PutBCl3,WF6,andC5F8intoCleanSub-FabChuckByers,,.)(inertgas),.).)類,量,流,,兩,,20feet)VMBVCR,VMB,,.),,,,更,)COSUS,不金,CO金PipingDesignConceptPipingDesignConceptGNGN¾¾度度)粒(ParticleFree))漏(ExternalLeakFree))留(DeadSpaceFree))(OutGasFree))(EffectiveAreaMinimum))良(ImprovementofCorrosionResistance))理(CatalyticBehaviorFree))(ErrorOperationFree))料理-CDA/ICASS304APseamless-GN2SS316LBA-PN2,PO2,PAr,PHe,PH2SS316LEPAP:AcidPolishBA:BrightAnnealTreatment理.EP:Electro-Polish¾¾度度PipingDesignConceptPipingDesignConceptGNGNGNGNPipingDesignConceptPipingDesignConcept¾¾度度量度,粒,)度:裡,粒)度:滑,料,粒量):):,):,CO力,GNGNPipingDesignConceptPipingDesignConcept¾¾度度,度):8kg/cm2力,24,降1%.)漏:漏漏率9*10-9mbar*l/sec,,,漏率不.)(moisture)量(O2):10ppb)粒(particle):10,30,粒1EA/[e-mail]yGasMSDSGNGN類狀度量度ppmNF3G---129.0--,CO210.0Cl2G/L綠淚---35.0--,CO2-HBrG刺---67.0---3.0SiF4G---90.2---3.0F2/Kr/NeG刺---188.0---1.0F2/Ar/NeG刺---188.0---1.0C5F8L刺--27.0--,CO22.0BCl3G--12.5---3.0NOG12.574.2-152.0--152.0,CO225.0WF6G/L刺--17.1---5mg/M3BoilingPointFlushPointCombustionTemp.GasTypeAppearanceOdor(LEL)%(UEL)%StateProtectionforBreath料-量度(TWA):8,40,不度.SpecialtyGasApplicationSpecialtyGasApplicationGNGN類GasType易CVDPVDDIFFIMPETCHPHOTONF3vvvCl2vvHBrvvvSiF4vvvF2/Kr/NevvF2/Ar/NevvC5F8vvBCl3vvvNOvvvv-NF3Thin-FilmIn-siutecleangas.-Cl2,HBr,BCl3,C5F8.-F2/Kr/NeF2/Ar/NeLaser.-NODiffusionGateOX.ChuckByersGasCabinetGasCabinetGNGN類(inertgasroom),/(toxic/corrosivegasroom),(flammablegasroom)理¾¾理理),,不),realtime狀.)purge,processgas,N2,¾¾--¾¾,,,processflow,standby,processflow力量切standby,不,(purge).ChuckByersGasCabinetGasCabinetGNGN¾¾JIS(JapaneseIndustrySystem),CGA(CompressGasAssociation),DISS(DiameterIndexSafetySystem).類不,更,.¾¾)度-ALARM1:TLV-TWA,-ALARM:2*TLV-TWA(TLV-TWA:8,40,不度))理,:-:利,.,度(CM4)-:利離離,流度(Riken:CO,O2,andH2etc)ChuckByersGasCabinetGasCabinetGNGN¾¾):,漏度)(UVIR):,立shutdown,)(sprinkler):度68ºC,)流量(excessflowswitch):裂,量,流量,shutdown)(heatsensor):度120ºC,shutdown.)(Self-closingdoor):,,漏.)stainlesssteel,兩.)CLF3不,CLF3烈.CylinderChangeProcedureCylinderChangeProcedureGNGN¾Cylindershutoff¾Processgasremoval¾Cylindershutofftest¾Pre-purge60~90cycle¾Cylinderchange60~90cycle¾Autoleaktest¾Manualleaktest¾Post-purge¾PressureAdjust¾ServicereadyGasCabinetPIDDrawingGasCabinetPIDDrawing--(1)(1)ADADGases:Inertgas/C4F8,CHF3,Ne,etc.GasCabinetPIDDrawingGasCabinetPIDDrawing--(2)(2)ADADGases:Lowpressuregas(Corrosive/Flammable)/WF6,C5F8,BCL3,C4F6GasCabinetPIDDrawingGasCabinetPIDDrawing--(3)(3)ADADGases:Highpressuregas(Corrosive)/F2/Kr/Ne,F2/Ar/NeGasCabinetPIDDrawingGasCabinetPIDDrawing--(4)(4)ADADGases:Highpressuregas(Toxic/Flammable)/NF3,SiH4,NO,CO,etc.GasCabinetPIDDrawingGasCabinetPIDDrawing--(5)(5)ADADGases:Corrosivegas/Cl2,HBr,SiF4,etc.GasCabinetSafetyDesignFunctionGasCabinetSafetyDesignFunctionADAD¾Leakdetectionprovided¾AutomaticvalveforGCshutdown¾LowZ-Purgegasalarm¾UVIRshutdowninterlock¾RemoteshutdownforEMO¾Emergencystopbutton¾Enclosurebox¾BarrierWall¾EFSshutdowninterlock¾SprinklerprotectionChuckByers¾¾車車ERCV(EmergencyResponseContainmentVessel)ERCV(EmergencyResponseContainmentVessel)ERCVERCVGNGN)漏,SIH4,PH3漏N2車裡來,若SIH4量,,,降,,)NO,CLF3,WF6,F2,N2O,NF3車(NiF),車理類露,若WF6漏車立,烈)車量(80psi),車.ERCV-ADAD¾AmmoniaNH3¾ArgonAr¾ArsineAsH3¾BoronTrifluorideBF3¾BoronTrichlorideBCL3¾Carbontetrafluoride(Freon14)¾ChlorineCL2¾DiborineB2H6¾DichlorosilaneSiH2CL2¾HeliumHe¾HydrogenBromideHBr¾NitrogenN2¾NitrogenTrifluorideNF3¾PhoosphinePH3¾SilaneSiH4¾SulfureHexafluorideSF6¾Tetraethylorthosilicate(TEOS)¾TungestenHeexafluorideWF6¾HydrognH2ERCV-ADAD¾不,F2,O2,NO,N2O¾不(SiH4漏)¾不,不¾¾不金¾不,¾度:-30度55度¾B2H6,PH3,SiH4漏率5cc/min不¾ERCV¾不¾ERCV不¾不ERCV,¾ERCV不連BulkSpecialtyGasSystem(BSGS)BulkSpecialtyGasSystem(BSGS)GNGNYCylinderYCylinderDischarge&PurgePanelVMPProcessTool