用于油库安全监测的气体传感器研究与设计3

196200612CHINESEJOURNALOFSENSORSANDACTUATORSVol.19No.6Dec.2006InvestigationandDesignoftheGasSensorApplyingtoOil2Storeroom3CHENGDong2sheng3,YUANYu2jie,SUNYi2cai,PANGuo2feng(HebeiUniversityofTechnology,MicroelectronicsInstituteTianjin300130,China)Abstract:Investigntinganddesigningakindofgassensorapplyingtooil2storeroom.ThesensorelementistheZnOthinfilmdopedAl,preparedbythesputteringdepositionmethodwithDCmagnetrononaluminatubeassubstrate.Thethinfilmhaswonderfulsensitivityandshortresponse(recover)timetothegasolenevapor.Whentheconcentrationofthegasismuchhigh(1%),thechangeofoutputsignalsisalsomuchbiggerthanothergaselements.ThisgassensoradoptedthechipMAX2197whichcancollectanalogsignalsfrommanysensorelementsandtransformthemintodigitalsignalsin12bitprecision.ThesensorcantransmitandreceivethedatabywirelessusingtheF05C,J04Emodules.ConnectingtheLCDmoduleACM12864,thesensorsystemmakesthedisplayclearandeasy.Keywords:ZnOthinfilm;high2precisionA/Dconversion;wirelessdatatransfers;LCDEEACC:7230L33,,,(,300130):2005211219::(19792),,,,[e-mail].:AlZnO().(1%),.MAX197,12A/D,F05CJ04E.ACM12864,.:ZnO;A/D;;:TP21212:A:100421699(2006)0622509205,,.,.C4-C12,1.3%6.0%(V/V),,[1].,ZnOSnO2(PtAu),2(FIGAROTGS813).AlZnO,(),,,.ZnO,,,,.ZnO,,.AlZnO,,,,.,ADC12bitMAX197,.,,,..,,.1ZnO.JCK500E.:310-3Pa,0.3Pa,1.6Pa.99.99%Zn.99.99%Al,AlZn,1%.7cm.390V,0.13A,30min.[2,3].,.500,,3h,,7h,.1HW230(2).:90#,50010-6,23,1.285.S=Rs/Rgas,Rs,Rgas.2,,.:S=10.17,7s,4s,.HW230FIGAROTGS813250010-6()3.3,,,,:0.15%,TGS813,0.15%,TGS813,TGS813,0.8%,TGS813,,,.1.3%,1.3%,,..Vout.4:Vh,,.Vc,Rs,R,,R=Rs.,Vh=6.5V,Vc=5V,Rs615V(285)7.5k.Vout2155V..Vout=VcRR+Rgas,Rgas,S=RsRgas,,Rs=R,S=VoutVc-Vout,Vout,Vc,S.,015220064S,.Vc,VoutRs/Rgas,,Vout.,,,,Vout.Vout,,A/D.A/D.ADC.ADCn,2n.3,,1.15%1.2%,S0.46.S=VoutVc-Vout,Vout1.6mV.,Vout,Vout1.6mV.10bitADC,2.5V/210,2.44mV,.12bitADC,2.5/212=0.61mV,.1,ADC.12bitADC,1.4%,1.3%,,ADC.12bitADC.1ADCADC/bit/V/%()42.5/240.0562.5/260.182.5/280.25102.5/2100.7122.5/2121.42211,A/D,.,,,Vout.,,A/D,,,.,,,.5.,.,,(300m),,.5212A/DA/D,.ADCMAX197.ADCMAXIM12bitA/D,+5V,.8.,:10V,5V,+10V0V,+5V0V,,.8,A/D,11526,:.5MHz,6s,100kb/s.MAX197STBYPD,,,,.AT89C52P0.0-P0.7MAX2197D0-D7,MAX197,P2.7,P1.1/,INT0MAX197/INT,.60.1F,[5].6AT89C52MAX2197213,F05CJ04E.,,,.J04E,315M,F05C,.,.J04EPT2262/2272PT2272.PT2272A0A7,,.PT2272,,D0D3,.PT226212bit,8bit,4bit.,12bit,0,1,,0,1.6561;D0D3,0,1;OSC1,OSC2,;TE,,,,DOUT,84,A0.PT2272PT2262,A0A7PT2262;DIN,VT,.PT22624,PT2272,,VT,D0D3[6,7].78214ACM12864,(HD61203),(HD61202)12864.,84(1616).,+5V,-10V,LCD.88CPU.9:ACM12864HD61203HD61202.,./CSA/CSBHD61202CS1,21522006.E,R/W,;R/W,E,()[8].9ACM128647(R/W,D/I).7/.,,,,,.32:%000.050.050.10.110.20.220.40.440.60.660.80.891.21.331.41.591.51.8000.010.020.040.060.090.130.190.32:,,0.1%,0.01%.,,1.2%,0.13%.,,.1.5%,0.3%AlZnO:,.,(0.3%).1.3%,,.()(5s),,,(20s),,.200m,.500,,.,,,,,,.:[1],.[J].,2005(1):44246.[2]YongkiMin,HarryL.GasResponseofReactivelySputteredZnOFilmsonSi2BasedMicro2Array[J].SensorsandActuatorsB,2003,93:4352441.[3]BhoolokaRaoB.ZincOxideCeramicSemi2ConductorGasSen2sorforEthanolVapour[J].MaterialsChemistryandPhysics,2000,64:62265.[4]MezzanotteM,PalombariR.InfluenceofSomeDonor2Accep2torCouplesonSurfaceConductivityofAluminumDopedZincOxide[J]1SensorsandActuatorsB,2005,107:4332437.[5],.12bA/DMAX197[J].,2004,(19):76277.[6],.MCS251/96[M].,19901[7],.F05A[J].,1999.101[8],,.HD61202[J]..2004,(2):1382142.31526,: