半导体FAB洁净度与换气次数的关系

半导体FAB洁净度与换气次数的关系（经验值）FS209DCLASS换气次数（次/h）过滤器配置（FFU满布率）1420100％10360100％10020056％1,0003510％10,000257％100,000154％單位換算表風量Unit-AirVolume：eg.：1m^3/h＝16,67l/min1m^3/h＝0.016m^3/min1000l/h16,67l/min0,59SCFM35,34SCFH1022,5SCIM1m^3/min＝60m^3/h60000l/h1000l/min35,4SCFM2120SCFH61,3x10^3SCIM1l/h＝0,001m^3/h16x10(-^6)m^3/min0,0167l/min5,9x10(-^4)SCFM35,34x10(-^3)SCFH1,02SCIM1l/min＝0,06m^3/h0,001m^3/min60l/h0,0354SCFM2,12SCFH61,17SCIM1SCFM＝1,695m^3/h0,0282m^3/min1695l/h28,25l/min60SCFH1728SCIM1SCFH＝0,98x10(-^3)m^3/h16,3x10(-^6)m^3/min0,98l/h0,016l/min0,00058SCFM0,0347SCIM1SCIM＝0,0283m^3/h4,72x10(-^4)m^3/min28,30l/h0,472l/min0,0167SCFM28,8SCFH