二氧化锡薄膜气敏传感器对常见室内污染气体的电阻

MechanismofResistance2TemperatureCharacteristicsofaSnO2Thin2FilmGasSensorinHazardousIndoorGasesSUNLan2xia,JIZhen2guo,DUJuan,ZHOUQiang,CHENChen,ZHAOLi2na(Statekeylaboratoryforsiliconmaterials,ZhejiangUniversity,Hangzhou310027,China)Abstract:SnO2thin2filmgas2sensorwasfabricatedbysol2geldip2coatingprocessusingSnCl22H2Oasstartingma2terials.Temperaturedependencecharacterristicsoftheresistancewasinvestigatedinfourhazardousindoorgases(formaldehyde,benzene,dimethylbenzene,methylbenzene).Itwasfoundthatresistance2temperaturecharacteristicsweredifferentfordifferentgases.MolecularorbitalcalculationresultsbasedonMOPACindicatethatresistance2tem2peraturecharacteristicsofSnO2thin2filmarerelatedtothemolecularorbitallevels.Thereforemeasurementofresis2tance2temperaturecurvescouldenhancetheselectivityoftheSnO2thin2filmgassensors.Keywords:tindioxide;gassensor;sol2geldipcoating;vacuum2,,,,,(,310027):(SnCl22H2O),2,22,,22:;;2;2:O472;O659136;TN304101:A:1004-1699(2005)01-0047-03,,[13]GB/T218882322002,(GB25032522001),,,,[47],,[812],:2004207225:(863No.2003AA-3-A19/1);(No.03103).:(1979-),,,[e-mail];(1961-),,,,[e-mail].181Vol.18No.120053CHINESEJOURNALOFSENSORSANDACTUATORSMar.2005,SnO2N,,SnO2,2,2,2,12[13]SnCl212H2O,,602h,12d,,,,1,8mm,75m8018030min,55002h,1,2,,,,PID,()A/D0.1Pa,,10Pa,,,,,,2SnO221)23322,,50mL/s,2,,,,,,2,,:-14.1-17.5-22.6-24.8k/,,(),,(),,842005,(),,,(n),,,,,,,,,,-2),WinMOPAC210445(LUMO)(HOMO),LUMOHOMO,LUMO5LUMOHOMOHOMO,LUMO,,5,,3-,-,-,,-,:[1]DirksenJA,DuvalK,RingTA.NiOthin2filmformalde2hydegassensor[J].SensorsandActuators,2001,80:106.[2]TakashiO,AyakoS,TakeshiO,etal.Characteristicsofpottedplantsforremovingoffensiveodors[J].SensorsandActuators,2003,89:131-136.[3]SzczurekA,SzecowkaPM,LicznerskiBW.Applicationofsensorarrayandneuralnetworksforquantificationoforganicsolventvapoursinair[J].Sensorsandactuators,1999,58(1-3):427-432.[4]AlexanderPW,DiBenedettoLT,TelisDimitrakopoulosDB,etal.Field2portableflow2injectionanalysersformonitor2ingofairandwaterpollution[J].Talanta,1996,43:915-925.[5]HeuleM,GaucklerLJ.Miniaturisedarraysoftinoxidegassensorsonsinglemicrohotplatesubstratesfabricatedbymi2cromoldingincapillaries[J].Sensorsandactuators,2003,93(1-3):100-106.[6]WangYD,MaCL,WuXH,etal.Electricalandgas-sensingpropertiesofmesostructuredtinoxide2basedH2sen2sor[J].Sensorsandactuators,2002,85(3):270-276.[7]AbbasMN,Moustafa,GA,GopelW.Multicomponentanalysisofsomeenvironmentallyimportantgasesusingsemi2conductortinoxidesensors[J].AnalyticaChimicaActa,2001,431(2):181-194.(52)941,:-a2x1+a3x0(i=1,2,29),a0,a1,a2,a322a0a1a2a3a0a1a2a310.00000-0.00321.4378160.0000-0.00020.02094.878020.00000.0001-0.00221.4093170.0000-0.00010.01805.071330.00000.00020.00111.4018180.0000-0.00010.01595.240240.00000.00030.00631.4377190.0000-0.00010.01405.38955-0.00000.00040.01341.533720-0.0000-0.00010.01255.52126-0.00000.00040.02211.7113210.0000-0.00010.01105.63887-0.00000.00040.02991.972022-0.0000-0.00010.00965.74108-0.00000.00020.03532.300623-0.0000-0.00010.00835.83059-0.00000.00000.03732.666924-0.0000-0.00010.00665.9055100.0000-0.00000.03683.038425-0.0000-0.00040.00175.951511-0.0000-0.00000.03613.402926-0.0000-0.0007-0.00965.917612-0.0000-0.00010.03463.7583270.0000-0.0010-0.02695.739013-0.0000-0.00020.03164.0899280.0000-0.0007-0.04405.3801140.0000-0.00020.02814.3888290.0000-0.0005-0.05624.874815-0.0000-0.00020.02444.65091(a),;1(b),(-012%,+013%),10-3(a)(b)13Matlab615,,-,SnO2-,,10-3,-012%+013%:[1],,.[M].:,2002.[2],,.[J].,2002,4:293-298.[3],.[J].,2003,22(1):38-41.[4],.Matlab611[M].:,2002.33333333333333333333333333333333333333333(49)[8],,PCVDSnO2NOx[J].,1992,12(3):46-49.[9]NamSC,PaikCH,ChoWI,etal.Electrochemicalcharacterizationofvarioustin-basedoxidesasnegativeelectrodesforrechargeablelithiumbatteries[J].JournalofPowerSources,1999,84:24-31.[10]ChandraBoseA,KalpanaD,ThangaduraiP,etal.Synthe2sisandcharacterizationofnanocrystallineSnO2andfabrica2tionoflithiumcellusingnano2SnO2[J].JournalofPowerSources,2002,107:138-141.[11]HuangJL,YauBS,ChenCY,etal.Theelectromagneticshieldingeffectivenessofindiumtinoxidefilms[J].Ceram2icsInternationl,2001,27:363-365.[12]TakashiO,YoshinobuM,HarukikoK.Identificationforgaseousindoorair2pollutantsusingNDV[J].Sensorsandactuators,1996,(35-36):308-311.[13]JiZG,HeZJ,SongYL,etal.Fabricationandcharacter2izationofindiumdopedp2typeSnO2thinfilm[J].JournalofCrystalGrowth,2003,259:282-285.252005