Basic_Sentaurus_Training

©2014Synopsys,Inc.Allrightsreserved.1TCADSentaurusBasicTraining©2014Synopsys,Inc.Allrightsreserved.2TCAD•TechnologyComputerAidedDesign–semiconductorfabricationprocesses–semiconductordevicecharacteristics•TCADontechnologydevelopment–Explorenewdevicestructures&guideprocessselection–Designsmarterexperimentsinmoduledevelopment–Optimizeprocesswindowinprocessintegration•TCADonmanufacturing–Correlateprocessparametersanddeviceperformancethroughprocesscompactmodels(PCM)–UsePCMtoimproveprocesscapabilityindex&processcontrol©2014Synopsys,Inc.Allrightsreserved.3TCADApplications•CMOS–deepsubmicrontransistors,atomisticmodeling,statisticalmodeling,reliability•Memory–flash,DRAM,PRAM•Opto–imagesensors,solarcells,photo-detectors•RF–high-speeddevices,compoundsemiconductors•Power–discretedevices,powerICs,siliconandwide-bandgap,ESD©2014Synopsys,Inc.Allrightsreserved.4TCADTools–SentaurusFamily•SentaurusWorkbench•SentaurusProcess•SentaurusStructureEditor•SentaurusDevice•SentaurusVisual•SentaurusTopography•SentaurusInterconnect•Raphael•SentaurusPCMStudio•SentaurusMeshTools•Inspect•SentaurusDataExplorer•SentaurusDeviceElectromagneticWaveSolverBasicTraining•SentaurusTopography•SentaurusInterconnect•Raphael•SentaurusPCMStudio•SentaurusMeshTools•Inspect•SentaurusDataExplorer•SentaurusDeviceElectromagneticWaveSolver©2014Synopsys,Inc.Allrightsreserved.5TCADSimulationTCADEnvironment/OperationSentaurusWorkbench(SWB)SentaurusVisual(SV)InspectStructureGenerationSentaurusProcess(SP)SentaurusStructureEditor(SDEorSSE)DeviceSimulation–SentaurusDevice(SD)OpticalSimulationElectricalSimulationMixedModeSimulation©2014Synopsys,Inc.Allrightsreserved.6TCADSimulation–EnvironmentSetup•SentaurusWorkbench–Projecteditor•SentaurusVisual–1D/2D/3Dviewer•Inspect–1D&xyplot•Cshellsetting:setenvSTROOTpathtoTCADinstallationfoldersetenvSTHOME$STROOTsetenvSTDB$HOME/stdbsetenvLM_LICENSE_FILEport@iporhostnamesetpath=($STROOT/bin$path)•Installationfiles–Acommonfile–Aplatformfile–Anexamplefile©2014Synopsys,Inc.Allrightsreserved.7TCADSimulation–StructureGeneration•SentaurusProcess–Oxidation–Implantation–Annealing–Deposition–Etching•SentaurusStructureEditor–BoundaryCreation–ContactDefinition–DopingDefinition•MeshGenerationforDeviceSimulation–PNjunction–Channel/criticalregion–Highfield/highcurrentregions©2014Synopsys,Inc.Allrightsreserved.8TCADSimulation–DeviceSimulation•OpticalSimulation–Opticalbeamabsorption–Raytracingmethod–Transfermatrixmethod–Beampropagationmethod–Loadingexternalprofiles•ElectricalSimulation–Drift-Diffusiontransport–Thermodynamictransport–Hydrodynamictransport–Carrierquantizationwithdensitygradientmodel–MonteCarloTransport•MixedModeSimulation–mixed-modesimulationsonsmallcircuitsinwhichmultiplecircuitelements,includingphysicaldevices,compactmodeldevices,andlumpedelements.©2014Synopsys,Inc.Allrightsreserved.9OutlineSentaurusWorkbenchSentaurusProcessSentaurusStructureEditorSentaurusDeviceSentaurusVisualSolvNetIntroduction©2014Synopsys,Inc.Allrightsreserved.10OutlineSentaurusWorkbenchSentaurusProcessSentaurusStructureEditorSentaurusDeviceSentaurusVisualSolvNetIntroduction©2014Synopsys,Inc.Allrightsreserved.11SentaurusWorkbenchProjectEditorProjectBrowserProject(Horizontal/Vertical)FlowMenu/ToolbarNodestatusbar©2014Synopsys,Inc.Allrightsreserved.12SWB–ProjectBrowserWorkingfolder($STDB)-Read-Edit-RunExamplelibrary($STROOT/…)-Read-Edit-RunUserattachroot(backupfolder,…)-Read-Edit-RunProjecticon:Foldericon:©2014Synopsys,Inc.Allrightsreserved.13SWB–ProjectDefinition•Afolderwith“.project”•BlankprojectCreation:–Createanewfolder–Add“.project”•Projectshowninprojectbrowser:©2014Synopsys,Inc.Allrightsreserved.14SWB–ProjectFlowHorizontalflowVerticalflowToolFlowParameterBarExperimentsSimulationNodesColor:NodestatusValue:nodenumber,parametervalue,runtime,…ParameterdefinitionandextractionColor:None©2014Synopsys,Inc.Allrightsreserved.15SentaurusWorkbenchICWBEVPlusSProcessStructureEditorSDeviceSNMeshSVisual(1D,2D,3D)Inspect(1D,XYplot)(Alayouteditingandviewingtool,whichpartnerswithSentaurusTCADtotranslatelayoutinformationtoSProcessandStructureEditor)©2014Synopsys,Inc.Allrightsreserved.16SWB–RightClick:ProjectBrowser•OnFolder•OnProject©2014Synopsys,Inc.Allrightsreserved.17•OnToolFlowSprocessSDESdeviceSVInspect•OnParameterBarParameteroperationParametervaluesoperationSWB–RightClick:ProjectFlow©2014Synopsys,Inc.Allrightsreserved.18•OnExperiments•OnSimulationNodesSWB–RightClick:ProjectFlow©2014Synopsys,Inc.Allrightsreserved.19OnlineManualsandTrainingMaterial©2014Synopsys,Inc.Allrightsreserved.20SWBBasicOperation•Create/Saveproject•Addtools/parameters/values•Copy/Rename/Deleteproject•Export(gzp)/Import(gzp)project•Edit/Cleanup/Run/Abortproject•Lock/Unlockproject•Attachroot/Detachroot•ViewOutputResults©2014Synopsys,Inc.Allrightsreserved.21CreateNewProject“Project”“New”“NewProject”(Ctrl+N)©2014Synopsys,Inc.Allrightsreserved.22SaveProject“Project”“SaveAs”“Project…”chooseprojectfolderenterprojectname“OK”Defaultlocation$STDB/tmpDirectory:$STDBProject:$STDB/myproject©2014