划片机的总体规划及Y、Z轴设计

划片机的总体规划及Y、Z轴设计摘要IC封装是半导体三大产业之一(器件设计、晶片制作和器件封装)。其后封装工序主要包括:划片、粘片、超声球焊、封装、检测、包装。划片机是IC后封装线上的第一道关键设备，其作用是把制作好的晶片切割成单元器件，为下一步单元晶片粘接做好准备。但由于与国外技术存在差距，目前我国高端划片机仍然依赖进口。为了促进IC封装设备的国产化，本设计对划片机进行了总体规划并且对关键零部件进行了详细设计在分析划片工艺要求的基础上，确定了划片机的主要功能，进而进行了划片机的各部分功能的原理方案设计。其次，提出了四种不同的结构方案，并详细对比了其优缺点，然后确定了结构方案设计，完成了划片机的总体规划。接下来，针对划片工艺要求，进行了各部分结构的初步设计，包括各轴的传动方案、支承方案以及相关的结构参数。然后，根据课题要求，对划片机的Y、Z轴进行了详细设计，通过计算，分别完成了Y、Z轴的丝杠螺母机构的选型、电机的选型、导轨的选型。最后，完成了划片机Y、Z轴的装配图。关键字：划片机；总体规划；结构设计；滚珠丝杠；步进电机；滚动直线导轨；AbstractICpackagingisoneofthesemiconductorindustry(devicedesign,waferfabrication,andpackaging).Subsequentlypackagingprocessesinclude:dicing,dieattach,ultrasonicballbonding,packaging,testingandpackaging.ScribingmachineisthekeyequipmentafterthefirstlineoftheICpackage,itsroleistomakeagoodwaferintosinglecomponents,readyforthenextunitwaferbonding.Butbecausethereisagapwithforeigntechnology,China'shigh-scribingmachineisstilldependentonimports.InordertopromotethelocalizationofICpackagingequipment,theoverallplanandkeycomponents＇detaildesignofadicingmachinearebeendoneinthisdesign.Onthebasisofanalyzingthedicingprocess,dicingmachinemainfunctionisbeendefined.Thenthedesignofprincipalprogram,ofeachpart'sfunction,isbeendone.Secondly,fourdifferentstructuralschemesareproposed,andadetailedcomparisonoftheiradvantagesanddisadvantagesisshowedinthearticle,andthenthestructureoftheprogramdesignisdetermine,amasterplandicingmachinecompleted.Next,forthedicingprocessrequirements,apreliminarydesignofeachpartofthestructureiscompleted,includingthedriveshaftoftheprogram,supportprogramsandrelatedstructuralparameters.Then,accordingtothetaskrequirements,Y,Zaxisdicingmachinearedesignedindetail.Bycalculating,theY,theselectionofscrewnutbody,theselectionofthemotor,andrailareCompleted.Finally,theassemblydrawingofZ-axisY-axisarecompleted.Keywords:Scribingmachine;overallplanning;structuraldesign;ballscrews;steppermotor;rollinglinearguide目录1绪论...........................................................................................................................................41.1引言...............................................................................................................................41.2划片机的发展过程.......................................................................................................41.3划片机的国内外发展现状...........................................................................................51.4设计任务及要求...........................................................................................................62划片机的总体方案设计...........................................................................................................72.1划片机的技术要求.......................................................................................................72.2划片机的原理方案设计...............................................................................................82.2.1划片机砂轮驱动系统的原理方案设计...........................................................82.2.2划片机X、Y、Z轴的原理方案设计.............................................................82.2.3划片机θ轴的原理方案设计...........................................................................82.2.4划片机晶片固定方案设计...............................................................................92.2.5划片机晶片定位方案设计...............................................................................92.2.6划片机的控制方案...........................................................................................92.2.7划片机的冷却、保护方案设计.......................................................................92.3划片机的结构方案设计...............................................................................................93划片机结构参数的初步设计.................................................................................................113.1划片机主轴的参数的初步设计.................................................................................113.2划片机晶片定位机构参数的初步设计.....................................................................123.3划片机晶片固定系统参数的初步设计.....................................................................123.4划片机X轴的初步设计............................................................................................123.5划片机Y轴的初步设计............................................................................................143.6划片机Z轴的初步设计............................................................................................143.7划片机θ轴的初步设计.............................................................................................144划片机轴Z和Y轴的详细设计...........................................................................................154.1划片机Z轴的详细设计............................................................................................154.1.1Z轴滚珠丝杠的设计.......................................................错误!未定义书签。4.1.2Z轴电机的选型...............................................................错误!未定义书签。4.1.3Z轴导轨的选型...............................................................错误!未定义书签。4.2划片机Y轴的详细设计..............................................................错误!未定义书签。4.2.1Y轴滚珠丝杠的设计..................