解析SEM-EDS分析原理及应用

2012No.5-66-ShortComment&IntroductionAnalysisthetheoryandapplicationofSEMandEDSanalyticalmethodZHAIQing-xiaHUANGHai-jiaoLIUDongLIUKe-ganAbstractThispapersimplyintroducedtheuseofSEMandEDSanalyticalmethodsduringthemanufacturingprocess,throughtheintroductionoftheoryandusingexamples.KeywordsSEM;EDS;PCBManufacturingProcess;AnalysisprinciplePCBPCBPCBSEM&EDSX-1958SEMEDSSEM&EDSPCBSEM&EDSSEM&EDS10~1µmµmµmX-X-SelectionRulell111sKL3KInspection&Test-67-ShortComment&Intr2012No.5Kα1X-2KLX-2Kα1Kα2X-SiegbahnKα1Kα2X-Kα1.2KαX-X-X-EDSX-X-X-X-EDSEnergyDispersiveX-raySpectroscopyX-WDSWavelengthDispersiveX-raySpectroscopyEDS1X-Si(Li)-3.8evEX-NE/3.8-X-2X-X-EhγhγX-γ3X-ScanningElectronMicroscopeSEMInspection&Test2012No.5-68-ShortComment&IntrACSEM&EDSX-X-SEM&EDSPCBHASLCAFPCB/PCBSEM&EDSPCBSEM10.83μm0.54μmInspection&Test-69-ShortComment&Intr2012No.5PSEM3P10.04%9%~11%4SEMPCB5SigmaPK45.040.865410.040.1717.46NiK454.350.974389.960.1782.54100.00+671.510keVSEM&EDSSEM&EDSPCBInspection&Test2012No.5-70-ShortComment&IntrSEM&EDSSEM&EDSSEM&EDSSEM&EDSPCBX-SEM&EDSPCB.CAF[J].,2009,S1..PBGA[J].2010,8..[M].:..[N].,2007,20(2):81-84,92..(SEM-EDS)[J].,2009,3.[1][2][3][4][5]PCIInspection&Test123454615789101112PCI