SMT-02MaterialsCD

©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaSemiconductorManufacturingTechnologyMichaelQuirk&JulianSerda©October2001byPrenticeHallChapter2CharacteristicsofSemiconductorMaterials©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaObjectivesAfterstudyingthematerialinthischapter,youwillbeableto:1.Describetheatom,includingvalenceshell,bandtheoryandions.2.Interprettheperiodictablewithregardstomaingroupelementsandexplainhowionicandcovalentbondsareformed.3.Statethethreeclassesofmaterialsanddescribeeachonewithregardstocurrentflow.4.Explainresistivity,resistance,capacitanceanddiscusstheirimportancetowaferfabrication.5.Describepuresiliconandgivefourreasonswhyitisthemostcommonsemiconductormaterial.6.Explaindopingandhowthetrivalentandpentavalentdopantelementsmakesiliconausefulsemiconductormaterial.7.Explainp-type(acceptor)siliconandn-type(donor)silicon,howsiliconresistivitychangeswiththeadditionofadopant,andthePNjunction.8.Discussalternativesemiconductormaterials,withemphasisongalliumarsenide.©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaAtomicStructure•Matter•Element–Nucleus•Proton•Neutron–OrbitalShell•Electron•Molecule•Compound•Electrons–ElectronEnergy–ValenceShells–Energy-BandTheory–Ions©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaElementaryModeloftheCarbonAtomCarbonatom:Thenucleuscontainsanequalnumberofprotons(+)andneutrons(6each).Sixelectrons(-)orbitaroundthenucleus.ValenceelectronElectron(negativecharge)Neutron(neutralcharge)Atomicnumber(numberofprotons)Nucleus(centerofatom;containsprotonsandneutrons)OrbitalshellProton(positivecharge)Valenceshell(outershellofatom)C6++NN+NN++N+N------Figure2.1©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaElectronShellsinAtomsFigure2.2K=2L=8M=18N=32O=32P=10Q=2©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaElectronShellsforSodiumandChlorineAtoms-----------Na11SodiumatomChlorineatomCl17-----------------Figure2.3©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaEnergyBandGapsSemiconductorConductionBandValenceBandEnergyGapElectronEnergyConductionBandValenceBandInsulatorEnergyGapElectronEnergyConductionBandValenceBandOverlappingbands-littleenergyisneededforconductionConductorElectronEnergyFigure2.4©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaSodiumChloride+SodiumionA+ionisformedwhenanatomlosesanelectron.Na11-----------ChlorineionA-ionisformedwhenanatomgainsanelectron.Cl17------------------Figure2.5©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaThePeriodicTable•CharacteristicsofCommonlyUsedElements•IonicBonds•CovalentBonds©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaThePeriodicTableoftheElementsFigure2.6Rf104Ha105Sg106Uns107Uno108Une109IAIIAIIIBIVBVBVIBVIIBIBIIBIIIAIVAVAVIAVIIAVIIIAVIIIBHydrogenH11.008BerylliumBe49.012Na11Sodium22.989Li3Lithium6.9391224.312MgMagnesium19KPotassium39.102Ca2040.08CalciumSc21Scandium44.956Ti22Titanium47.90V23Vanadium50.942ManganeseMn2554.938Fe26Iron55.847Co27Cobalt58.933Ni28Nickel58.71Rh45Rhodium102.91Zn30Zinc65.37As33Arsenic74.922Se34Selenium78.96Br35Bromine79.909Kr36Krypton83.80Al13Aluminum26.981Si14Silicon28.086P15Phosphorus30.974S16Sulfur32.064Cl17Chlorine35.453Ar18Argon39.948B5Boron10.811C6Carbon12.011N7Nitrogen14.007O8Oxygen15.999F9Florine18.998Ne10Neon20.183He2Helium4.0026Rb37Rubidium85.47Sr38Strontium87.62Y39Yttrium88.905Zr40Zirconium91.22Nb41Niobium92.906Molybde-numMo4295.94Cr24Chromium51.996TechnitiumTc4399Ru44Ruthenium101.07Cd48Cadmium112.40Cu29Copper63.54PalladiumPd46106.4SilverAg47107.87Sm62Samarium150.35Ga31Gallium69.72In49Indium114.82Ge3272.59GermaniumSn50Tin118.69Sb51Antimony121.75Te52Tellurium127.60I53Iodine126.904Xe54Xenon131.30Cs55Cesium132.90Ba56Barium1137.34La57Lanthanum138.91Hf72Hafnium178.49Ta73Tantalum180.95W74Tungsten183.85Re75Rhenium186.2Os76Osmium190.2Ir77Iridium192.2Pt78Platinum195.09Au79Gold196.967Hg80Mercury200.59Tl81Thallium204.37Pb82Lead207.19Bi83Bismuth208.98Po84Polonium210At85Astatine210Rn86Radon222Uun110Fr87Francium223Ra88Radium226Ac89227ActiniumCe58Cerium140.12Pr59Praseodym-ium140.9160NdNeodym-ium144.24Pm61Prome-thium147EuropiumEu63151.96Gd64Gadolin-ium157.25Tb65Terbium158.92Dy66Dyspro-sium162.50Ho67Holmium164.93Er68Erbium167.26Tm69Thulium168.93Yb70Ytterbium173.0471LuLutetium174.97Th90Thorium232.04Pa91Procat-inium231U92Uranium238.03Np93Neptunium237Pu94Plutonium242AmericiumAm95243Cm96Curium247BerkeliumBk97247Cf98Califor-nium249Es99Einstein-ium254Fm100Fermium253Md101Mendelev-ium256102NoNobelium253Lr103Lawren-cium257TransitionMetalsNonmetalsMetalloids(semimetals)LanthanidesActinides©2001byPrenticeHallSemiconductorManufacturingTechnologybyMichaelQuirkandJulianSerdaElementBoxofthePeriodicTableC612.011152.035703470s.†0.77Carbonatomicweightelectronegativitysymbolacid-basepr