ST-MEMS原理介绍

STConfidentialMEMESRoadshowJan,2013VincentXUMEMSandSensorProductMarketingManagerSTConfidential2STConfidentialSources:IHSiSuppliJanuary2012,YoleDevelopment3STConsumerMarketOutlook3•ST#1inMEMSMotionSensorsforconsumerelectronicsandmobilehandsetmarket•ST#1inAccelerometers,MarketShare~50%20062011•ST#1inGyroscope•MarketShare~60%(inonlytwoyears)60%$650MGyroscopeMarketShareST’sMEMSrevenue$30MSTConfidentialSTMEMSManufacturingInfrastructure44Sensors(8”MEMSdedicatedline)ASICFront-endAssembly&TestingCalamba(Philippines)Agrate(Italy)Catania(Italy)Kirkop(Malta)Rousset(France)Crolles(France)Global&OutstandingManufacturingCapabilityManufacturingcapacity4Mpcs/dayAgrateCataniaSTConfidentialMotionSensorsManufacturingFlow5ExpertManufacturingSTmanagesthewholesupplychainwithdualinternalsourcesforFront-EndandBack-EndDiffusion,EWSAssembly,FinalTestingCustomerBack-endFront-EndSTConfidentialLSM9Dxx(A+M+G)•12bitA•12bitM•16bitGLIS3DE(A)•8bitADC•FIFO•2uALSM6DS0(A+G)•12bitA•16bitGST3*3mmP2PPackageBenefit6LIS3DH(A)•12bitADC•FIFO•2uALSM303D(A+M)•16bitA•12bitM•110uALPS331AP(P)•16bitP•0.2mbarSTConfidentialNewComingEnvironmentSensor7MicrophoneLPS331APPressureHT221HumidityCO,CH4,GasAirQualityMedicalSTConfidentialTheMEMSWavemovesforwardtomulti-axissmart‘BRAIN(MCU)’A+GA+G+MA+G+M+Brain(MCU)STConfidentialLIS3DH:Ultra-Low-PowerandHighPerformanceAccelerometerHistoryGoodQualityandPerformance
Muchbetterqualityrecordcomparedtocompetitor
GoodlocaltechnicalteamsupportLowerOffset
Factoryoffsetcalibration
StrongdesignreviewandanalysisBestDelivery12bitDevice
New1.5Billioninvestmentinfactory
Shipped3Mpcs/dayMEMS
Quickerdeliverythanthecompetitor
WidelyusedandacceptedinMarketStrongDistiSupportandSADA
StronglocalDistiservice
SADAprogramtoensuretheseamlessbusinesssupport100XLowerPower100XLowerPower100XLowerPower100XLowerPowerSTConfidentialLIS3SDH:AccelerometerwithStatusMachineSTConfidentialBenchmarkofSmartElectronicsPedometerSolution11STConfidentialNew3-axisdigitalAccelerometer12AllAccelerometerSupportClickandDoubleClickSTConfidentialInnovationinGyroscope……13STConfidentialTheMostAdvancedMEMSGyroscope14DrivemodeFCoriolis=-2mΩzΛvxyzvΩzFCoriolisSINGLEDRIVINGMASSYawmodePitchmodeRollmodeSTConfidentialNewDigitalGyroscope15STConfidentialAwaveofnewproductsmovesforwardFirstDual-CoreGyroscopeforOISandUISTConfidentialL3G4IS:Dual-Core3xDigitalGyroscope172.5xnoisereduction10Xnoisereduction10XspeedincreaseNOOISYESOISSTConfidentialFirstOISmobilephone18Othertestvideo.:HighPerformancestandaloneMagnetometerMainFeatures•3-axismagneticsensor•Userselectablefull-scale4,8,10Gauss•ProgrammableODRfrom0.625Hzto80Hz•UltralowcurrentConsumption:•300μA(@ODR=20Hz)inhigh-resolutionmode•75μA(@ODR=20Hz)inlow-powermode•I²C/SPIinterfaces•Package:LGA-12,2x2x1mm³•PowerSupplyrange:1.9Vto3.6V20AdvancedFeatures•Internalregistersformagneticoffsetcompensation•SelfTestfunctionality•AdvancedpowermanagementfunctionalityESQ4’12STConfidentialiNEMO™Modules:TowardtheSmartSensorsSTConfidentialiNEMO™withEmbeddedBrain223-AxisDigitalGyroscope6-AxisGeomagneticModuleINEMO-M1System-on-Board9-DoFplus32-BitMCU13x13mminaBoardiNEMO®System-in-Package9-DoFplus32-BitMCUfewmm2inaPackage32-bitMicrocontroller3-AxisAccelerometer3-AxisGyroscope32-bitMicrocontrollerModuleSiP3-AxisMagnetometerSTConfidential6-AxisE-Compass23STConfidentialLSM303DE-CompassALookFromTheInsideSTConfidentialLSM303D(A+M)Pin2pinwithLIS3DH/LIS3DE(A)LIS3DH(3*3)referenceschematicLSM303D(3*3)referenceschematicSTConfidentialMainFeatures:3-axisaccelerometer:from2gto16gdynamicallyselectablefull-scale3-axismagneticsensor:from2Gato12Gadynamicallyselectablefull-scale16bitdataoutputforbothaccelerometerandmagnetometerEmbeddedtemperaturesensor(12bitoutput)EmbeddedadvancedfeaturesI²C/SPIinterfacesPackage:LGA-16,3x3x1mm³PowerSupplyrange:2.16Vto3.6VE-CompassModuleSTConfidentialiNEMOInertialModulesportfolio4x5x13x5.5x1LSM330DPackageSizeLSM330DLC6-axisSTConfidentialLSM330DLC(A+G)willbein4*5mm•InertialModule3A+3G,LSM330DLC•MPQ3,for2012,samplesnow.28STConfidential6AxisonGalaxyNote10.129STConfidentialAlookinsidetotheiNEMO..startingfrom6-axis(3A+3G)EmbeddedCapacitorLIS3DHL3GD20LGA3x5.5x1.0~20%pkgshrinkLSM330DLCLSM330DSTConfidentialiNemo(InertialModules)31STConfidentialLSM330:ALooktotheInsideSTConfidentialHighPerformanceAccelerometerandGyroscopeonthesamechip33STConfidentialLSM9DS0:9-axis:3xaccel+3xgyro+3xmagnetometer!ES:OctMP:Q1’13…shrinkingthesizeto4x4withoutcompromisingtheperformances4mm4mmSTConfidentialSmartSensors35STConfidentialLIS331EBSmartsensorpacksmotionsensingandintelligenceinto9mm3MainFeatures•3-axisXL:±2/±4/±8/±16gfull-scale•16bitdataoutput•ARMCortex-M0core–72MIPS@80Mhz•64KBFlashMemoryand128KBRAMmemory•I2C/SPI:masterandslaveinterfaces•ProgrammableGPIOsAdvancedFeatures•Programmableinterruptgenerators•EmbeddedSelf-Testfunctionality•EmbeddedFIFOand•AdvancedpowermanagementfunctionalityKeyParametersAccelerometer&uCinasinglepackage:3x3x1mmSTConfidentialLIS331EB