APTECH选型表

ValveandRegulatorRecommendationsforSourceGasCabinetsandGasDistributionPRESSUREREGULATORANDVALVESELECTIONGUIDETechnicalBulletin#208CScope:ThisdocumentisareferenceguidetohelpcustomersdetermineanappropriateAPTechvalveandregulatortobeusedinprocessgassystems.Forinformationandspecificationsrelatedtothespecificmodel,pleaserefertothecatalogdatasheet.687TechnologyWay.Napa,CA94558.[phone].Fax[phone]’sgeneralrecommendationsarebasedupontypicalapplicationsandconditions.Theproperregulatorselectioncanbesignificantlyaffectedbyparameterssuchassystemdesign,flowduration,frequencyofuse,ambientconditionsandoutletpressure.Pleaseconsultthefactoryoryourlocalrepresentativeforaspecificrecommendationbeyondthescopeofthisdocumentorifanydoubtexists.Itisimportanttounderstandthatonemayfollowthisguide’srecommendation,yethaveafailureduetoaparameterspecifictothegivenapplication,asnoted.Restated,onemayachievehigherorlowerflowcapaci-tiesthanstipulatedinthisguideduetotheparametersandconditionsofaspecificapplicationandsystemdesign.Sourcevalvesarethoseontheupstreamsideofthepressureregulatorinthesourcegascabinetorbulkdeliverysystem.Distributionvalvesarethoseonthedownstreamsideofthepressureregulatorinthesourcegascabinetorbulkdeliverysystemandusedanywheredownstreamofthesourceregulator(s)atpointofuse(POU)invalvemanifoldboxes(VMBs)andprocesstools.Sourceregulatorsarethoseusedinthesourcegascabinetorbulkdeliverysystem.Distributionregulatorsarethoseusedatpointofuse(POU)invalvemanifoldboxes(VMBs)andprocesstools.Recommen-dationsarebasedontypicalusageinsemiconductorfacilities.Operatingpracticesataspecificfacilitymayrequireadifferentcomponentselection.Itisassumedthatnon-liquefiedinertgascylindersareswitchedovertoanewcylinderwhenthepressuredropsto250psig.Therefore,maximumrecommendedflowratesforsourceregulatorsandsourcevalvesassume250psiginletpressureforthesegases.Itisassumedthatnon-liquefiedhazardousgascylindersareswitchedovertoanewcylinderwhenthepressurereaches150psig.Therefore,maximumrecommendedflowratesforsourceregulatorsassume150psiginletpressureforthesegases.Itisassumedthatthecylinderpressureforliquefiedgassystemsismaintainedatorabovethevaporpressureat60ºF.Itisassumedthatcylindersareswitchedoverbeforetheliquidisallvaporizedintogas.Therefore,maximumrecommendedflowratesforsourceregulatorsarebasedon60ºFvaporpressureattheregulatorinletforthesegases.Absoluteorverylowpositivepressuredeliverybearclosescrutiny.TheAP1402TAdeliversbothsub-atmosphericandpositivepressureequallywell,whereastheAP1101isstrictlyintendedforsub-atmosphericpressuredelivery.Iflowflowandverylowpositivepressuredeliveryisdesired,theAP1001shouldbeselectedinsteadoftheAP1101.ThealternativeistoselecttheAP1402TSAwhichprovidesmoreflowcapacityandtheabilitytodeliversub-atmosphericandpositivepressure.TheSHPoptionisforcertainpointofuseapplicationsinlieuoftheSHoption.TheSHPdesignationprovidesHastelloyC-22internalscomprisedofthepoppetanddiaphragm,whereastheSHoptionincludesthenozzle.SHPisacosteffectivesolutionforpointofuseapplications.Ifasourceregulatorislistedasagiven“model&asecondmodel”,itmeanstwostageregulationisrequired.Thetworegulatorsareinserieswiththefirstonelistedasthefirststage.Valverecommendationsarebasedontypicalcylinderpressuresanddeliverylinepressures.Pressuredropacrossvalvesatlowpressuresmaybeexcessiveandrequireadifferentvalveselection.Valverecommendationsarefortheprocesslineisolation.PurgeandventvalvesarenotaddressedinthisdocumentbutgenerallyanAP3000,AP3625,orAP3550valvewillprovidesufficientflowcapability.Thevalveseriesrecommendedwerepurposelylimitedforthesakeofbrevity.Themodelnumberindicatesthebasicsizeandrating.Forexample,manualvalvesarenotedasAP3625butanAP3600orAP3650wouldalsobeappropriateandequivalentselections.Vespel®seatsarerecommendedforallregulatorsfornitrousoxideandforsourceregulatorsforcarbondioxidewitheithercontinuousflowdemandorflowratesinexcessof100slpm.Heatingmayberequiredinthesourcemanifoldforsomegasesevenwhennotstatedduetodurationofflow,ambientconditions,etc.Whenheatingisrecommended,otheroptionsthancontactelectricalheatingmaybepossiblesuchasmultiplecylindersorheatexchangers.Ingeneral,thegasshouldbeheatedupstreamofthepressureregulator.PleaserefertoProductNote407.Distributionlinepressureisassumedtobe60psigminimumortypicalsourcepressurewhicheverisless.Iftheactuallinepressureishigher,thenhigherflowratesthanlistedinthisguidelinecanbeobtained.Converselyiftheactuallinepressureislower,thenitmaynotbepossibletoachievethemaximumflowratestatedwithareasonablepressuredropacrossthevalveorregulator.CAUTION:Productselectionisthesoleresponsibilityoftheuser,regardlessofanyrecommendationsorsuggestionsmadebythefactory.Theusershallmakeselectionsbasedupontheirownanalysisandtestingwithregardtofunction,materialcompatibilityandproductratings.Properinstallation,operationandmaintenancearealsorequiredtoassuresafe,troublefreeperformance.Vespel®-DuPontGeneralNotesandDefinitionsGeneralNotesProcessGasAcetylene*(C2H2)AirAmmonia(NH3)Argon(Ar)Arsine(AsH3)ArsineMixtures(N