飞速发展的精密测量技术

(1919573,,,,,1973,1940,,31.5;195,,0.2;1960,,0.1;1969,,0.01,l,0.1.01;0.0011.,(1):¹,;º,,;»,198733(19)731L,B,B;M,M,,AA,,,,,AA,,AA,,,,,1(2)(),,,(3),,(90220),,,,,,,,{,(4),7419873,z,,,,,(),,,,,.”(d).(l,)”()2(a)();(b)(c);(d)()14]21054332o2345,,,()2,,,3,:¹,,i,º,UPU,,=UP/U,,4,,(19)),0.0522.,,,4pR:¹,,15ºNC,,,,5»HWMerglor,,15,,,,,3,,,,,,,,,,,3050%2.8,4.:;;;;,,,,7619873,MaxiCheokCNC(),,,,,SmaDEACNC,10,,Diffraoto,101,2.573,,2000(:),,,5eimitn,,1.,1990,,:;;;;();,,,,2.,,,,,,,,,,,,(19)77,,,,,:1.,;,2.,,,,,,,,3.,,,,,,,,,,,451:,,1984:,,1982.11[3:,,1981.9[4:,!;,1984.5,,1986l[6803:,1952.77:8198738:,,1981.2:,,1986.91635482,,1986111,,1982.612:,,1982.6TheAeeurateMeasuringTeeliniqueinFastProgressBaiChunmuAbstractTobeadaPtedfortherequirementofsPeedyProgressinmo-dernProduetion,thereeeentyears,theinvestigationofmeasurixzgteehniqueshasbcendevelopedrapidli,:alltheeountriesoftheworld.Thispapergivesan;ntroduetiontothehistoryandpresentstateoftheaeeuratemeasuringteehniques.Theauthorlaysstressonexpoundingtheapplieationoflasersensordi-9itdisplayteehniquemieroproeessorete.intheaeeurateeasu-ringteehnique,andlooksfo:wardtothefutureoftheaeeuratemeasuringteehnque.