Principles-of-Plasma-Discharges-and-Materials-Proc

PRINCIPLESOFPLASMADISCHARGESANDMATERIALSPROCESSINGPRINCIPLESOFPLASMADISCHARGESANDMATERIALSPROCESSINGSecondEditionMICHAELA.LIEBERMANALLANJ.LICHTENBERGAJOHNWILEY&SONS,INCPUBLICATIONCopyright#2005byJohnWiley&Sons,Inc.Allrightsreserved.PublishedbyJohnWiley&Sons,Inc.,Hoboken,NewJersey.PublishedsimultaneouslyinCanada.Nopartofthispublicationmaybereproduced,storedinaretrievalsystem,ortransmittedinanyformorbyanymeans,electronic,mechanical,photocopying,recording,scanning,orotherwise,exceptaspermittedunderSection107or108ofthe1976UnitedStatesCopyrightAct,withouteitherthepriorwrittenpermissionofthePublisher,orauthorizationthroughpaymentoftheappropriateper-copyfeetotheCopyrightClearanceCenter,Inc.,222RosewoodDrive,Danvers,MA01923,978-750-8400,fax[phone],oronthewebat(201)748-6011,fax[phone].LimitofLiability/DisclaimerofWarranty:Whilethepublisherandauthorhaveusedtheirbesteffortsinpreparingthisbook,theymakenorepresentationsorwarrantieswithrespecttotheaccuracyorcompletenessofthecontentsofthisbookandspecificallydisclaimanyimpliedwarrantiesofmerchantabilityorfitnessforaparticularpurpose.Nowarrantymaybecreatedorextendedbysalesrepresentativesorwrittensalesmaterials.Theadviceandstrategiescontainedhereinmaynotbesuitableforyoursituation.Youshouldconsultwithaprofessionalwhereappropriate.Neitherthepublishernorauthorshallbeliableforanylossofprofitoranyothercommercialdamages,includingbutnotlimitedtospecial,incidental,consequential,orotherdamages.ForgeneralinformationonoutotherproductsandservicespleasecontactoutCustomerCareDepartmentwithintheU.S.at877-762-2974,outsidetheU.S.at317-572-3993orfax317-572-4002.Wileyalsopublishesitsbooksinavarietyofelectronicformats.Somecontentthatappearsinprint,however,maynotbeavailableinelectronicformat.LibraryofCongressCataloging-in-PublicationDataisavailableISBN0-471-72001-1PrintedintheUnitedStatesofAmerica10987654321CONTENTSPREFACExviiPREFACETOTHEFIRSTEDITIONxxiSYMBOLSANDABBREVIATIONSxxvPHYSICALCONSTANTSANDCONVERSIONFACTORSxxxiiiPRACTICALFORMULAExxxv1INTRODUCTION11.1MaterialsProcessing/11.2PlasmasandSheaths/6Plasmas/6Sheaths/111.3Discharges/14RadioFrequencyDiodes/14High-DensitySources/181.4SymbolsandUnits/202BASICPLASMAEQUATIONSANDEQUILIBRIUM232.1Introduction/23v2.2FieldEquations,Current,andVoltage/24Maxwell’sEquations/242.3TheConservationEquations/28Boltzmann’sEquation/28MacroscopicQuantities/30ParticleConservation/30MomentumConservation/31EnergyConservation/34Summary/352.4EquilibriumProperties/35Boltzmann’sRelation/37DebyeLength/38Quasi-neutrality/40Problems/413ATOMICCOLLISIONS433.1BasicConcepts/43ElasticandInelasticCollisions/43CollisionParameters/44DifferentialScatteringCrossSection/463.2CollisionDynamics/49Center-of-MassCoordinates/49EnergyTransfer/52SmallAngleScattering/533.3ElasticScattering/55CoulombCollisions/55PolarizationScattering/583.4InelasticCollisions/63AtomicEnergyLevels/63ElectricDipoleRadiationandMetastableAtoms/67ElectronIonizationCrossSection/70ElectronExcitationCrossSection/72Ion–AtomChargeTransfer/73Ion–AtomIonization/783.5AveragingOverDistributionsandSurfaceEffects/78AveragingOveraMaxwellianDistribution/78EnergyLossperElectron–IonPairCreated/81SurfaceEffects/82Problems/83viCONTENTS4PLASMADYNAMICS874.1BasicMotions/87MotioninConstantFields/87E
BDrifts/90EnergyConservation/914.2NonmagnetizedPlasmaDynamics/93PlasmaOscillations/93DielectricConstantandConductivity/95OhmicHeating/97ElectromagneticWaves/99ElectrostaticWaves/1014.3GuidingCenterMotion/102ParallelForce/104AdiabaticConstancyoftheMagneticMoment/105DriftDuetoMotionAlongFieldLines(CurvatureDrift)/106DriftDuetoGyration(GradientDrift)/107PolarizationDrift/1084.4DynamicsofMagnetizedPlasmas/110DielectricTensor/110TheWaveDispersion/1124.5WavesinMagnetizedPlasmas/113PrincipalElectronWaves/115PrincipalWavesIncludingIonDynamics/118TheCMADiagram/1214.6WaveDiagnostics/123Interferometer/123CavityPerturbation/126WavePropagation/127Problems/1295DIFFUSIONANDTRANSPORT1335.1BasicRelations/133DiffusionandMobility/133FreeDiffusion/134AmbipolarDiffusion/1355.2DiffusionSolutions/136BoundaryConditions/136CONTENTSviiTime-DependentSolution/138Steady-StatePlane-ParallelSolutions/139Steady-StateCylindricalSolutions/1425.3Low-PressureSolutions/144VariableMobilityModel/144LangmuirSolution/146HeuristicSolutions/1475.4DiffusionAcrossaMagneticField/149AmbipolarDiffusion/1525.5MagneticMultipoleConfinement/155MagneticFields/155PlasmaConfinement/157LeakWidthw/159Problems/1606DIRECTCURRENT(DC)SHEATHS1656.1BasicConceptsandEquations/165TheCollisionlessSheath/1676.2TheBohmSheathCriterion/168PlasmaRequirements/169ThePresheath/170SheathPotentialataFloatingWall/172CollisionalSheaths/173SimulationResults/1746.3TheHigh-VoltageSheath/175MatrixSheath/175ChildLawSheath/1766.4GeneralizedCriteriaforSheathFormation/178ElectronegativeGases/179MultiplePositiveIonSpecies/1826.5High-VoltageCollisionalSheaths/1846.6ElectrostaticP