等离子清洗技术

,,(UNDPODS,030024):,,,,,,:/;;:TM505:A:1000-6133(2001)04-0031-04:2001-10-201,,,,,:,(),,,CFC,,,,(ODS,,),,,,,,260,,,,1,:a.;13Vol.21No.4ElectromechanicalComponents©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.b.;c.;d.;e.1,,,,,(Ar2N2H2O2),,,(Ar2N2);(O2H2),:,,CF4O2,CF4:H2+e3H23+eH2+hv+e2H+eH2+eH2+2eH+H++2e:O22OH2OOH+HCH4CH3+HR1R2R1+R2,,(:),,SiAu,Ar,Au,,,,,,:,,Ar,N:-OH-OOH,:R+OROR+O2ROO,23200112©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,,,,:()()11,,,,3,/:,PCBMCMS(),3.1,,,,,:(RIE),(downstream),(directionplasma),,,,15nm,,,,60120min,,3.25001000COBS()(DCA),33Vol.21No.4ElectromechanicalComponents©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,,ICCOBS:(Diebonding)(Cure)(Plasmacleaning)(Wirebond)3.3BGABGA,,,BGA,,3.4,,,,,3.5,,,3.6,(photoresist),,;(),100nm/min,10min3.7,,,,:,,3.8,O24,,,,:Ar,,,,,,,,,43200112©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.