MEMS传感器现状及应用

MicronanoelectronicTechnologyVol.48No.8August2011MEMS传感器现状及应用王淑华(中国电子科技集团公司第十三研究所,石家庄050051):MEMS传感器种类繁多,发展迅猛,应用广泛首先,简单介绍了MEMS传感器的分类和典型应用其次,对MEMS压力传感器加速度计和陀螺仪三种最典型的MEMS传感器进行了详细阐述,包括类别技术现状和性能指标最新研究进展产品,及应用情况介绍MEMS压力传感器时,给出了国内外采用新型材料制作用于极端环境下压力传感器的研究情况最后,从新材料加工和组装技术方面对MEMS传感器的发展趋势进行了展望:微电子机械系统(MEMS);传感器;加速度计;陀螺仪;压力传感器:TH703:A:1671-4776(2011)08-0516-07CurrentStatusandApplicationsofMEMSSensorsWangShuhua(The13thResearchInstitute,CETC,Shijiazhuang050051,China)Abstract:MEMSsensorsfeaturegreatvarieties,rapiddevelopmentandwideapplications.Firstly,thecategoriesandtypicalapplicationsofMEMSsensorsareintroducedbriefly.ThenthreetypicalMEMSsensors,ie.thepressuresensor,accelerometerandgyroscopeareillustratedindetail,includingthesubdivision,currenttechnicalcapabilityandperformanceindex,latestresearchprogress,productsandtheirapplications.Besidesthat,theresearchstatusoftheMEMSpressuresensorusingnewmaterialsfortheextremeenvironmentathomeandabroadispresented.Finally,developmenttrendsofMEMSsensorsarepredictedintermsofnewmaterials,processingandassemblingtechnology.Keywords:microelectromechanicalsystem(MEMS);sensor;accelerometer;gyroscope;pressuresensorDOI:10.3969/j.issn.1671-4776.2011.08.008EEACC:25750引言MEMS,MEMS1962,MEMS,MEMSMEMS,MEMS,MEMS,,MEMS:2011-04-06Email:[e-mail]5162011年8月微纳电子技术第48卷第8期,MEMS,,MEMS,MEMS,MEMS1MEMS传感器分类及典型应用MEMS,,[1]pH1MEMSMEMSMEMSMEMSMEMS()MEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMSMEMEMEMSMEMSMEMSMEMSpHMEMSMEMSMEMSMEMSMEMSMEMS1MEMSFig1ClassificationofMEMSsensors517王淑华:MEMS传感器现状及应用MicronanoelectronicTechnologyVol.48No.8August2011MEMS,,;,;,;,MEMS,,MEMS,,MEMS11MEMSTable1TypicalapplicationsofMEMSsensorsMEMS(IMU)(ABS)(IMU)MEMSMEMS,,2MEMS压力传感器MEMS2060MEMS,,MEMS;,E,,,,201012,MEMSMEMSLPS001WPLPS001WP,,3104~11105Pa,65Pa[2]20093,MEMST5000/ABS1200E,17mm17mm09mm,[3],;,;,pn,120,;600,,,SiCSOIKulite6HSiC,600,5V[4]BESOIXTEH-10LAC-190(M)518王淑华:MEMS传感器现状及应用2011年8月微纳电子技术第48卷第8期,-55~482[5]MRWerner[6],300YHezarjaribi[7]2009SiCMEMS,150~360m,05~6m,005~10MPaSiC,MEMSOpsens2009MEMSOPPM25,025mm,,[8]MEMS,MEMSMEMSMEMS,,MEMS3MEMS加速度计MEMS,MEMS[9]MEMS,MEMS2[10]2Table2Characteristicscomparisonofcapacitive,pieroelectricandpieroresistiveaccelerometers,,2009,RAmarasinghe[11]MEMS/NEMS,nSOI,EB,DRIE480Hz!20g,x,yz0416,04120482mV/V/g,,2010,KistlerNorthAmericaMEMS8315AMEMS8315A2D04000mV/g,-55~125,6~50V,,[12]MEMSMEMS,,,519王淑华:MEMS传感器现状及应用MicronanoelectronicTechnologyVol.48No.8August2011,,,Draper,,20kHz,100Hz/g,310-6,5g,Q1105[13]MEMS,2009ADXL346,17~275V,100Hz140A,10Hz30A,02A[14]RAmarasinghe[11]MEMS/NEMS,700m700m550m,MEMS,ThinkpadMEMSiPhoneMEMS,,MEMSABS,ADIADX105ADXL50MMAS40GMEMS,MEMS4MEMS陀螺仪MEMS,MEMS,MEMS(AHRS),MEMS,3[9]3Table3Performancerequirementsofgyroscopesfordifferentapplications/(∀#s-1)50~1000500400/(∀#h1/2)0.50.5~0.050.001/(∀#h-1)10~10000.1~100.01/%0.1~10.01~0.10.001/Hz70100100/(g#ms-1)10001000~100001000MEMS,();;MEMSADADXRS,ADXRS,,,[15]AD2010ADXRS,ADXRS652!250∀/s,7mV/(∀)/s,001~2500Hz,!250∀/s,2000g,[16]ADXRS450iMEMS∃R[17]ADXRS453iMEMS∃RAD,6mA,,ADXRS450003∀/s/g,0003∀/s/g2ADXRS453MEMS,001∀/s/g520王淑华:MEMS传感器现状及应用2011年8月微纳电子技术第48卷第8期,!300∀/s[18],,ZYGuo[19]2009(TFG),TFG,178mV/(∀)/s,06%,005∀/s(1),IMU,MEMS,2010SensonorTechnologiesASMEMSSTIM202,05∀/h,!400∀/s,02∀/s/h1/2,!1%STIM202,FOG[20]SiliconSensing201011PinPoint∃R,6mm5mm12mm,008g[21]MEMSMMES,SOIMEMS,MEMSMEMSMEMSMEMSMEMS,MEMS,MEMS,/,MEMS,GPS,,GPS5结语21,,MEMS,,MEMS,MEMS,SiCSOIMEMS,,MEMSMEMS,,MEMS,MEMSMEMS,,CMOSMEMS(SoC),,,MEMS,,,MEMS,MEMS,,521王淑华:MEMS传感器现状及应用MicronanoelectronicTechnologyVol.48No.8August2011:[1][M].:,1995.[2]EDNChina.LPS001WP:MEMS[EB/OL].(2010-12-02)[2011-03-22].[3]YoleDevelopmentSA.MEMStechnology:world'ssmallestbarometricpressuresensor[J].Micronews,2009,78:1.[4]NEDAA,OKOJIERS,KURTZAD,etal.6HSiCpressuresensoroperationat600∀C[C]//ProceedingsofHighTemperatureElectronicsConference.Albuquerque,NM,USA,1998:257-260.[5],,.MEMS[J].,2009,11:4-6.[6]WERNERMR,FAHRNERWR.Reviewonmaterials,microsensors,systems,anddevicesforhightemperatureandharshenvironmentapplications[J].IEEETransactiononelectronics,2001,48(2):249-257.[7]HEZARJARIBIY,HAMIDONMN,SIDEKRM,etal.Analyticalandsimulationevaluationfordiaphragm%sdeflectionanditsapplicationstotouchmodememscapacitivepressuresensors[J].JournalofBaaicandAppliedSciences,2009,3(4):4281-4292.[8]YoleDeveloppmentSA.Opsenslaunchesnewminiaturepressuresensorforlifesciencesandmedicaldevices[J].Micronews,2009,78:19.[9].[M].:,2009.[10][EB/OL].(2011-03-12)[2011-03-20].[11]AMARASINGHER,DAODV,DAUVT,etal.Ultraminiaturenovalthreeaxismicroaccelerometer[C]//ProceedingsofIEEESensorsConference.Christchurch,NewZealand,2009:1305-1308.[12]YoleDevelopmentSA.KistlerNorthAmericaintroduceshighsensitivity,singleaxisKBeam∃RMEMScapacitiveaccelerometer[J].Micronews,2010,103:10.[13].[EB/OL].(2010-08-22)[2011-3-20].[14]AnologDevices.ADXL346:3Axis,!2g/!4g/!8g/!16