mems器件气密封装工艺规范(材料参数)

://)MEMSMEMSMEMSMEMSab://(15/85)CTEFeNiCo46CuAgAu2TOCANDIPbutterflytypeQFP114211MEMS2Al2O3AlNBeOAl2O3(92%)KovarCu-W(90%)Cukg/m3(g/cc)3600-3700(3.6-3.7)8400(8.4)1790-1850(1.79-1.85)4700(4.7)17000(17)8900(8.9)GPa55138E1=11.7E2=0.15.7255125MPa15762719.98270W/mK(20)1817.50.58-0.670.6180-200ppm/ºС6.8(25ºС-400ºС)5.3(40ºС-250ºС)a123a280(40ºС-250ºС)6.3-7.0(40ºС-250ºС)6.5(25ºС-500ºС)16(25ºС-500ºС)cm101449X10-65X101210116X10-62X16-6(1MHz)7.9-10.0NA5.011.5NANA(White)SAlN-17WhiteSAlN-14BBlackAl2O3BeOCuSiMoCuW10W/m·K20017014017251393151159180TCE(106/ºCRT-400ºС)4.56.77.617.04.25.16.5t(KJ/kg·K)0.670.800.960.380.750.250.16ResistancetothermalshockºС300g/cm33.263.62.99.02.310.217.0Hv12001900120080160300(GPa)0.30.30.21.1(GPa)2.320ºСGPa500ºС270260370330120170320330Ωm1011101210131.71082.31035.21085.31081MHz8.510GHz8.58.96.7(103)1MHz1.010GHz4.00.20.4MV/m151010(620ppm/)a12.5b5c1IC12.5MEMS5MEMS153253214564()100200105051053231183PbSn8020AuSn2802OSHASnPbab200cd63/37()PlasticRangeg/cm3ElectricalCond.%ofCuThemalcond.W/cm@85TCEin/in/@20PSI(shear)PSI118/11852In48Sn7.311.700.3420.017201630138/13858Bi42Sn8.564.50.1915.08000500143/14397In3Ag7.3823.000.7322.0800154/14980In15Pb5Ag57.8513.000.4328.025502150157/157100In7.3124.000.8629.0273890167/15470Sn18Pb12In137.7912.200.4524.053204190175/16570In30Pb108.198.800.3828.03450179/17962Sn36Pb2Ag8.4111.900.5027.070007540181/17360In40Pb88.527.000.2927.04150183/18363Sn37Pb8.4011.500.5025.075006200210/18450In50Pb268.866.000.2227.046702680221/22196.5Sn3.5Ag7.3616.000.3330.25620232/232100Sn7.2816.600.7324.01900260/24075Pb25Sn209.974.600.1826.054503520280/28080Au20Sn14.510.5716.04000040000356/35688Au12Ge14.670.4413.026625266251064/1064100Au19.3073.43.1814.018000-20000MEMS4)(a)40(b)CTECTE(c)CTECTE(d)(e)(f)785::SMTa,0.21:a0.4b2530cd,1201301501505060s(F/D),fZ2.44(F/D)2(PlasticFlow),,(PlasticDeformation),,2(MetalHORN)4537C300500AuAuAl25AuAlAuAl100150AuAuAl8V/NAuAuAl10AuAlAuAl4(+)3253.7nH-CO2+2253.7n://()ESD()()55MCMMEMS112(b)(c)562183PbSnSnPbInAgAuSnAuSn1/2,SnPb://://’’0.381mm.015’’(0.381mm)3.010’’(0.254mm).010’’(0.254mm)32.002’’(0.0508mm).001’’(0.0254mm).002’’(0.0508mm)32.002’’(0.0508mm)a.157’’4.0mmb2545.005’’0.127mm300.030’’0.762mm615100(0.381mm~2.54mm)100200(2.54~5.08mm)7(He)V0.441310.20215108V0.441310.20212107V0.420610.40411107260pisg23NID56712