电子信息制造业“十二五”发展规划子规划2：电子专用设备仪器“十二五

子规划2：电子专用设备仪器“十二五”规划I目录前言···············································································1一、“十一五”产业发展回顾···············································1（一）产业规模持续稳定增长·························································1（二）重点产业领域取得较大成绩···················································2（三）电子仪器产业结构调整初见成效·············································3（四）产业自主创新能力不断提升···················································3（五）产业链整合进程日益加速······················································4（六）产业扶持政策逐步完善·························································4二、“十二五”面临的形势··················································5（一）产业发展形势分析·······························································5（二）技术发展趋势分析·······························································6（三）面临的环境条件··································································7三、发展思路和发展目标·····················································7（一）发展思路···········································································7（二）发展目标···········································································81、经济指标···········································································82、创新指标···········································································8四、主要任务和发展重点·····················································9（一）主要任务···········································································91、围绕战略性新兴产业，提升配套能力······································92、加强基础能力建设，提升产业整体水平···································93、以重大专项实施为契机，加强产业互动···································9（二）发展重点··········································································101、集成电路生产设备·····························································102、太阳能电池生产设备··························································113、新型元器件生产设备··························································12II4、通信与网络测试仪器··························································145、半导体和集成电路测试仪器·················································146、数字电视测试仪器·····························································15五、政策措施··································································15（一）加强战略引导，完善产业政策···············································15（二）加大投入力度，支持自主创新···············································15（三）提升产品可靠性，加强服务能力建设······································16（四）引导专项成果辐射，推动技术应用扩展···································16（五）重视人才战略，集聚高端人才···············································161前言电子专用设备产业是重大装备制造业的重要分支，是知识、技术、资本高度密集型产业，处于电子信息产业链最高端，其基础性强、关联度高、技术难度大、进入门槛高，决定着一个国家或地区电子信息产品制造业的整体水平，也是电子信息产业综合实力的重要标志。电子仪器产业是电子信息产业重要的基础性产业，具有高投入、多品种、小批量、更新换代快的特点，在国民经济总产值中的占比不高，但对经济发展的“杠杆”和“倍增”作用却十分巨大。为推动电子专用设备仪器产业持续发展，缩小与国际同类产品的差距，根据《工业转型升级“十二五”规划》、《信息产业“十二五”发展规划》和《电子信息制造业“十二五”发展规划》，制定本规划。本规划涉及电子专用设备和电子仪器两大行业，是“十二五”期间我国电子专用设备仪器产业发展的指导性文件和加强行业管理、组织实施重大工程的依据。一、“十一五”产业发展回顾（一）产业规模持续稳定增长我国电子专用设备仪器产业在“十一五”期间保持了较高的增速，虽然期间受全球金融危机影响，2008年下半年至2009年上半年呈现出下滑态势，但在国内多项政策激励下，2随着世界经济逐步回暖，电子专用设备仪器业企稳回升，实现了生产、销售和经济效益总体平稳增长的态势。据统计，“十一五”期间我国电子专用设备销售收入年均增长率为20%，从2005年的783亿元增长到超过1987亿元，电子专用设备工业协会统计的行业骨干企业年均增长率为25%，从52.7亿元增长到160.6亿元。统计数据表明，“十一五”期间我国电子仪器规模以上企业年均增长19％，到“十一五”末实现销售收入940亿元。五年间，电子专用设备仪器产品中太阳能光伏设备以及元器件参数测量仪器、超低频测量仪器等保持了较大幅度的增长。（二）重点产业领域取得较大成绩“十一五”期间，国家科技重大专项围绕光刻机、刻蚀机、65纳米制造工艺、先进封装设备等重点任务，集中资源重点投入，取得很大进展。北方微电子及上海中微公司2种12英寸65纳米刻蚀机产品样机已进入大生产线进行考核验证；上海微电子公司封装光刻机已进入长电科技考核测试；七星华创12英寸氧化炉已进入大线测试；中科信12英寸离子注入机已完成3台样机组装，正在进行测试。多种12英寸关键设备陆续进入大生产线考核验证，标志着我国集成电路设备产业已初步形成产业化发展态势。“十一五”期间新兴产业的发展，为电子专用设备产业带来了良好的发展契机。尤其是我国晶硅太阳能电池设备年3均增长率达到58%，基本具备了从晶体硅到太阳能电池片的成套生产线设备供应能力，为我国光伏产业的发展提供了有力保障。晶硅太阳能设备爆发式增长，为电子专用设备产业实现“十一五”规划目标提供了有力支撑。（三）电子仪器产业结构调整初见成效电子仪器产业根据市场应用需求的变化，不断调整结构，产品种类日益丰富。针对多功能、多参数的复合测试需求，测试设备从单台仪器向大型测试系统形式迈进；电子测量仪器向模块化和合成仪器方向发展；野外工程应用需求不断促进测试仪器向便携式和手持式升级；新型的实时频谱分析仪开始推向市场；3G、数字电视等民用领域专业测试仪器新品不断涌现。（四）产业自主创新能力不断提升“十一五”以来，电子专用设备仪器行业内主要企业通过引进国内外的高科技人才，加强与高校、科研单位的合作，在关键设备和开发中规避已有的国外专利，开发出一批技术含量高、性能稳定、具有自主知识产权的产品，初步建立起了以企业为主体的技术创新体系。在国家“863”计划、国家科技重大专项的支持下，一批具有自主知识产权的集成电路设备进入了大生产线。我国的无铅焊接设备达到了国际先进水平，成为我国表面贴装设备市场中最具竞争力的产品。电子仪器行业的本土企业逐步4进入自主研发阶段，初步掌握核心和高端仪器技术，能够为国家重大工程提供大部分配套电子仪器。在部分特种电子仪器产品方面打破了国外禁运和技术封锁，为重点装备的技术保障和研制建设提供了有力支撑。（五）产业链整合进程日益加速在国家科技重大专项引导下，以龙头企业为核心的产业链整合进程持续加速。北方微电子、上海中微、七星华创等整机企业与北京科仪、沈阳科仪、沈阳新松等零部件企业围绕刻蚀机、注入机、氧化炉等高端芯片制造装备与关键部件进行联合攻关；江苏长电、南通富士通等国内封装龙头企业联合26家企业开展成套封装设备与配套材料的系统应用工程。按照上下游配套的“项目群”方式，系统部署实施重大专项，有力促进集成电路产业链的建立、产业规模的增长和综合配套能力的形成。（六）产业扶持政策逐步完善《国务院关于加快振兴装备制造业的若干意见》将集成电路关键设备、新型平板显示器件生产设备、电子元器件生产设备、无铅工艺的整机装联设备列入了国家重大技术装备中，加大政策支持和引导力度，鼓励本土重大技术装备订购和使用，为产业发展创造了有利的市场环境。“极大规模集成电路制造装备及成套工艺”国家科技重大专项的实施，有力带动了我国电子专用设备仪器技术提升。5“十一五”期间我国电子专用设备仪器行业取得较大成绩，但仍存在突出问题：产业规模偏小，本土企业实力不强；自主创新能力有待提高，高端设备开发相对落后；部分产品性价比虽高，但可靠性较差，市场占有率低；设备开发与产品制造工艺脱离，影响了技术成果产业化的进程；高水平、复合型人才缺乏。二、“十二五”面临的形势“十二五”期间，随着政策环境的不断完善、战略性新兴产业的快速发展，国际国内市场迅速增长、新兴增长点不断涌现、应用领域进一步拓宽，为我国电子专用设备仪器产业发展提供了广阔的空间和坚实的政策支持。但全球经济形势存在不确定性、国产设备仪器的推广应用难度加大，也使产业发展面临较大挑战。（一）产业发展形势分析2010年全球半导体制造设备销售总额达到395.4亿美元，恢复到历史最高水平。各个地区的设备支出都呈现了两位数甚至三位数百分比的增长，增长最快的是中国大陆和韩国。2010年中国内地半导体设备市场为22.4亿美元，预计2011年为26.4亿美元。按此增长率推算，到2015年，我国半导体设备市场规模将达到300亿元人民币。2010年，全球光伏生产设备销售额比上年增长40%，达到