真空镀膜机的原理及维护郭凯敏

2007年12月第21卷第4期YINSHANACADEMICJOURNALDec.2007Vo1.21No.4(,014030):为了教师和学生们能够更加顺利地完成真空镀膜实验并且维护好实验设备,本文主要通过真空镀膜原理及构造的角度,论述了真空镀膜机的具体维护:真空度;镀膜:G42:A:1004-1869(2007)04-0044-031(1):,1:1;2;3;4;5;6;7;8;9;10:;;,2()2,,,,3(a~d)(1(b)A),,,1.3310-2PaA,,2X-2,450r/min,2L/s2:1;2;3:3;4;5;6;7;8;9;1044:2006-12-14:郭凯敏(1979-),男,内蒙古包头人,助教,研究方向:近代物理实验,,,,10-2Pa,3()4(),,,,,,,(),,,,,,,4:,,,,1~0.1Pa,6.6710-4Pa,,,:()(0.1Pa),;;,;,,,,;,,,;,(1~0.1Pa);(),,;,,,,,,,;,(),,,,;,,,();,,4()5,,,,5:1;2;3;4;5;6;745,,,(),,,,,,,()5,63;4,0.05mm(EUREKA,43%+57%)-(NICHROME,80%+20%),,,(),,,,R7,,:P1.3310-1Pa,:i+/ie=KPK,ie,P~i+6:7:1mV;2mA;3;A;4;5;6;B;7;8F;G,0.1Pa(0.1Pa),,,6.6710-4Pa,,,,,()[1],.[M].:.[2],.[M].:.[3],.[M]..PrincipleandMaintenanceofVacuumCoatingMachineGUOKai-min(DepartmentofPhysics,BaotouTeachersCollege;Baotou014030)Abstract:Thearticlediscussesthespecificmaintenanceofvacuumcoatingmachinefromtherespectsofitsstructureandprinciple,bywhichteachersandstudentscanmaintaintheequipmentnicelywhiletheyaredoingtheexperiment.Keywords:vacuumdegree;vacuumdeposition46