高端制造装备关键技术的科学问题

杨叔子,等高端制造装备关键技术的科学问题MachineBuildingAutomation,Feb2011,40(1):1-5:(1933),,,,,:,;(1963),,,,,:;(1954),,,,,:,,(,430074):,,,:;;;;:TH-9:A:1671-5276(2011)01-0001-05ScientificProblemsOriginatedfromKeyTechniquesofAdvancedManufacturingEquipmentsYANGShu-z,iDIANGHan,LIBin(StateKeyLabofDigitalManufacturingEquipmentandTechnology,HuazhongUniversityofScienceandTechnology,Wuhan430074,China)Abstract:Inthispaper,thenationalrequirementsanddevelopmentopportunitiesoftheadvancedmanufacturingequipmentsarefirstanalyzed.ThemajorresearchanddevelopmentworksinadvancedNC(NumericalControl)machinetoolsandvery-large-scaleinte-gratedcircuitequipmentsarethendiscussed.Basedonthesummarizationsofthecurrentstatesanddevelopmenttrendsofthesetwotypesofmanufacturingequipments,fourscientificproblemsoriginatedfromthekeytechniquesarepresented.Theycoverhighperformancemotioncontro,lhigh-speedandhigh-precisiondriving,interactionmechanismbetweenmanufacturingprocessandma-chinetoo,landenvironmentcontrolforhigh-precisionmanufacture.Keywords:advancedmanufacturingequipmen;tadvancedNCmachinetoo;lvery-large-scaleintegratedcircuitequipmen;tdeve-lopmenttrend;scientificproblem1国家需求与发展机遇,,30%,,,,,,,,202016,,[1]201067,201098,,,,,[2],,,,,,[3],[4],1,,40m12m3m,,1杨叔子,等高端制造装备关键技术的科学问题http:ZZHD.chinajourna.lnet.cnE-mai:[e-mail]机械制造与自动化16,1,[5],,,,,,,[6]90,;65;45;(CMP),2研究现状与发展趋势2.1高档数控机床,,,,,,90%,,,,2010,WFL,225m,1m,0.01m,3LawrenceLivermore3LawrenceLivermore[7]a):,FANUC[8](4),SIEMENS840DNURBS[9](RTCP),,[10]4FANUC,2009,DMGWFLMikronMazak,,2杨叔子,等高端制造装备关键技术的科学问题MachineBuildingAutomation,Feb2011,40(1):1-5,,,,Heidenhain2009(5),,Mazak,,5Heidenhainb):,,,,,,,,,(CIRP)2008~2010,,6,,,c)6[11],(DDR)(DDL),,,,,,2010,THK9g,720m/min,,Mikron(7)MazakDMG7Mikron2.2极大规模集成电路制造装备:(CMP),,883杨叔子,等高端制造装备关键技术的科学问题http:ZZHD.chinajourna.lnet.cnE-mai:[e-mail]机械制造与自动化,,6,,,15,2g,4m/s645nm4.5nm,(MA)2.5nm,(MSD)5nm,,12~15g,20~25Hz,1~5m:a),,,,,,,[12]:1),;2),kHz,,:1),100m,;2),,100Hz;3)(1kV),,,,,,,2090,,,ICb),,,9,;,(),:1),,8kHz,DSPFPGA2),,3),,FIR,(ILC),,,,9c)(MIT),(SBIL)[13],8496nm,3116nm,45%,CVD,PVD,300mm510-9(1torr=13332Pa),1065nm45nm,32nm,(1104杨叔子,等高端制造装备关键技术的科学问题MachineBuildingAutomation,Feb2011,40(1):1-510-10),,,,,(2201),(35~60)%RH,(22001),(0001),(05~4)Hz;30dBofacousticisolation,,,3关键技术科学问题a):,/:(),:;;b),,,(),c),,,,:d),,10,;;4结语,,,,:[1].(20062020)[R].2006.[2].[R].2010.[3],[R].,2010.[4].(20112020)[R].:,2010.[5].[R].2009.[6].[R].2006.[7]USLawrenceLivermoreNationalLaboratory,[8]FANUCSeries30i/31i/32,iALNanoCNCforHigh-Speed,High-Accuracymachining,2009.[9]SINUMERIK840D/840Di/810DDescriptionoffunctionsspecialfunctions(FB3),2008.[10].[R].2009.[11]BrecherC.,EsserM.,WittS.,Interactionofmanufacturingprocessandmachinetoo,lCIRPAnnals-ManufacturingTechno-logy,2009,58(2):588-607.[12].[M].:,2009.[13]Chen,C.G.,Konkola,P.T.,Heilmann,R.K.,Joo,C.,Schattenburg,M.L.Nanometer-accurategratingfabricationwithscanningbeaminterferencelithography,ProceedingsofSPIE-TheInternationalSocietyforOpticalEngineering,4936,pp.126-134,2002.:201012135