高精度激光干涉测量中环境误差因素的综合补偿

第26卷第4期光电工程Vol.26,　No.4　1999年8月Opto-ElectronicEngineeringAugust,1999:1003-510X(1999)04-0028-06李东光,张国雄,曲　军(,300072):分析了高精度激光干涉测量中环境误差因素对测量的影响;针对不同情况,提出了两种对空气折射率进行实时误差补偿的方法。:激光干涉测量,空气折射率,误差补偿。:O436.1　　　:AComprehensiveCompensationfortheEnvironmentalErrorFactorinHigh-AccuracyLaserInterferometryLIDong-guang,ZHANGGuo-xiong,QUJun(StateKeyLaboratoryofPrecisionMeasuringTechnologyandInstruments,TianjinUniversity,Tianjin300072,China)Abstract:Theeffectoftheenvironmentalerrorfactorontheaccuracyofhigh-accu-racylaserinterferometryisanalyzedinthepaper.Inviewofthedifferentcases,tworeal-timecompensationmethodsfortheerrorofairrefractiveindexareproposed.Keywords:Laserinterferometry,Airrefractiveindex,Errorcompensation.CLCnumber:O436.1,,,,:1998-06-04;:1998-10-26:(59605018):(1965-),(),,,,11(a);1(b)X-Y,,,,,图1(a)　线位移测量干涉仪的普通结构Fig.1(a)　Constitutionofthecommonlineardisplacementmeasuringinterferometer图1(b)　广泛用于坐标测量机线位移测量的平面镜反射干涉仪,分辨力为1(a)的两倍Fig.1(b)　Flatmirrorreflectioninterferometerisextensivelyappliedtolineardisplacementmeasurementofcoordinatemeasuringinstrument.ItsresolutionistwiceofFig.1(a)OPLOPL=BAn(x,y,z)dS(1),Facc,OPL=Facc(v/2),,,,,0.01,3Pa,1%10-8,,,,10-7,11.1,2,,,dF,,dFnang,291999年8月　　:图2　零点的漂移Fig.2　Wanderingofzeropoint(v/2)dF=Lg[(ng-ng0)+(ng-1)dT]+La(na-na0)(2)LgLaFcor=Facc-dF(3)L=Fcor-v/2na(4)图3　光学元件的光路Fig.3　LightpathofopticalelementsLg,3(a),/4,35mm,/43mm,Lg82mm3(b),Lg,,,Lg图4　直接法空气折射率测量Fig.4　Measurementofairrefractiveindexwithadirectmethod1.2(4),L=Fcor-v/2na,na,,,(1)na,4,,F,n=1+F/2L(5)510-8,,,,(2)CO2,EdlenEdlen1966,,10-8Edlen,CO2CO2355ppm,2ppm30第26卷第4期22.1图5　零点误差的消除Fig.5　Eliminatingoferroratzeropoint(2),,Lg,1(a),LgLa,1(a),,,5L0=L1+L2,d,La,,Lg,2.2,L=Fcorv/2na,na,,2.2.1　双干涉自补偿系统(方案一)图6　双干涉自补偿光路Fig.6　Selfcompensationlightpathwithdouble-interference(300mm),,,,6M1,M2,M3,M1M3,M2M3,B1(F1),B2(F2)d,,M2M1M2,F20na0Lmax=v/2F20(6)na0,,,,B1,B2F1,F2(n0-na0)Lmax=v/2F2(7)naL=v/2F1(8)L=v/2F1/[(F2/F20+1)na0](9)(9)na0,nana,na,,,,na0,311999年8月　　:,M2,,F20(na0-1)Lmax=v/2F20(10)(6)na0=F20/(F20-F20)(11),,Edlenna02.2.2　多点检测线性拟合补偿系统(方案二)(300mm),,,(1)L0na(l)dl=v/2F(12)ki=1naili=v2F(13)ki=1li=LLK,li,(13)L(1/k)ki=1nai=v2F(14)na(1)nai,,Edlen,,naTpHnai=1.00027123-[929(t-20)-2.68(p-101325)+0.42(h-1333.22)]10-9(15)na,,7图7　多点检测拟合补偿系统Fig.7　Multi-pointfittingcompensatingsystemSiSiTi,PiHi(,),,LS1,S2,S3,,Edlenna1,na2,na3,na32第26卷第4期(1)na(1)=na1a(1)+na2b(1)+na3c(1)(16)a(1),b(1),c(1),(12)(14),3,,,,()7,,,,1,1Table1ComparisonofthemeasuredvaluesobtainedbeforeandaftercompensationTimeUncompensateddisplayvalueCompensateddisplayvalue700007300.060.028000.090.018300.120.029000.140.02:[1]　NormanBorroff.RecentAdvancesinDisplacementMeasuringInterferometry.Meas.Sci.Tech,1993,4:907-926[2]　BirchKP.DownsMJ.TheResultsofaComparasionbetweenCalculatedandMeasuredValuesoftheRefractiveIndexofAir.J.Phys.E.Sci.Instrum,1988,21:694-695[3]　TylerW.High-AccuracyDisplacementInterferometryinAir.AppliedOptics,1985,24(6):15[4]　曲军.激光干涉位移测量系统环境误差补偿的研究.天津大学硕士论文,1997331999年8月　　: