材料安全数据表(MSDS)

(MSDS)1SilaneSiH4MonosilaneSilicaneSiliconhydrideSilicontetrahydride(800)752-1597MSDS1200272:99%CAS:7803-62-53SCBA05323889090------MSDS1/5:2.12.34(CPR)100%:1515----5SCBA.SCBA()MSDS2/5MSDS3/560.14%10%7400C(PLUG)(CAP)212Nm3(B30)22(30RC)80(orifice)packedvalvepacklessdiaphragmorbellows-type()(CAP)(StrapWrench)(PLUG)-112238/:(TWA):5ppm(ACGIH)(STEL):10ppm(ACGIH)(Ceiling):--(BEIs):--(SCBA)(Goggles).1.2.3.4.932.12PH:---111.7(-169.0)-185.0(-301.0)%:1.4%(0.8%)---96%(98%)54(1300F)(=121)1.2:--0.084lb/ft3(1.342g/L)10MSDS4/5:400C119600ppm/4H()LD50--(silicicacid)--NPT,IARC,orOSHASubpartZ--12环响/环:(DOT49CFR)::ClassΙClass13:Scrubbing14DOT:Silane,Compressed:2.1:UNUN2203DOT运输标签::FlammablegasHAZARDCLASS:2.1:””MSDS5/5151.2.3.4.16NFPAHMIS214433:0:;1:;2:;3:;4:MSDS6/5