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®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow超纯水制造技术简介DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow内容I.一般纯水、超纯水流程介绍II.IONEXCHANGE(离子交换)III.REVERSEOSMOSIS(反渗透膜)IV.超纯水系统案例介绍DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDowI.纯水/超纯水流程离子交换系统、RO及EDI之设计电子业超纯水系统DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow離子交換系統陽塔陽塔陰塔陰塔混床混床脫氣塔脫氣塔DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDowRO膜+混床混床RO膜混床混床DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow二級反滲透二級反滲透二級反滲透二級反滲透DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDowEDI/CDIEDI/CDIRO膜RO膜+EDI(EDI(或或CDI)CDI)DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow純水流程特色比較RO+EDIRO+RORO+MBPretreatmentsoftenersoftenerorantiscalentsoftenerorantiscalentProductwater(megaohm-cm)151-215MicrobialqualitygoodgoodmediumProductionWaterconsumptionContinuous20%-25%Continuous25%-30%Discountinuous21%-26%ChemicalsNaClNaClorantiscalentNaOHNaClorantiscalentNaOH/HClEnergy(kWh/m3)Relativespacerequirement~2verylow~3low~1.7highTypicaloperatingcost(CHF/M3)~4.8~5.3~6.0Relativeinvestmentcosts1.00.90.9-1.5DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDowEDI/混床進水水質成份低濃度中等濃度高濃度Sodium(ppm)1.205.279.25Bicarbonate(ppm)2.683.153.78Chloride(ppm)0.286.3211.9Carbondioxide(ppm)0.91.01.2SiO2(ppm)0.500.500.50TDS(ppm)4.1614.7424.9**pH6.7,進水來自RO*摘自ChrisEdmondsandEliSalem,ULTRPUREWATER,page.47,November1998DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDowEDI/混床設置與操作成本比較設備設置成本,US$(1000)Flow(gpm)HighTDSMediumTDSLowTDSEDIMBEDIMBEDIMB50601526015260151200150216150216150216600385397385354385352每年系統操作成本,US$(1000)Flow(gpm)HighTDSMediumTDSLowTDSEDIMBEDIMBEDIMB5030.873.828.760.227.649.620083.6120.975.694.271.172.6600177.8240.2153.5176.7140.3126.2*摘自ChrisEdmondsandEliSalem,ULTRPUREWATER,page.47,November1998DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow全世界與美國之純水市場(MM,US$)USA19982001ROSystems$52.9$74.7IXsystems$15.0$23.4ROmembrane$30.4$38.5IXresins$16.6$17.9WORLD19982001ROSystems$178.2$246.4IXsystems$88.9$103.7ROmembrane$97.1$131.7IXresins$51.7$59.338.3%16.6%41.2%56%35.6%14.7%7.8%26.6%Source:Mcllvaine,R.,TheMcllvaineCo.,NorthBrook,III.,personalcommunication(September1999)DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow•TFTLCD•ICDOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDowUPWUPW系统特点系统特点超纯水系统超纯水系统高纯水系统高纯水系统水质要求水质要求应用行业应用行业系统复杂程度系统复杂程度最高较高电子行业锅炉系统最复杂较复杂系统容量系统容量中大DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow超纯水系统水质标准二超纯水系统水质标准二参数参数EE--11级标准级标准EE--1.11.1级标准级标准EE--1.21.2级标准级标准电阻率电阻率,25C18.218.218.2TOCTOC,ppb521DODO,ppb111颗粒物颗粒物(个/升)0.05-0.15005001000.1-0.2300300500.2-0.35050500.3-0.52020100.5441溶解硅溶解硅,ppt100010050注:该表为ASTMASTM超纯水的水质要求。DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow超纯水系统水质标准二超纯水系统水质标准二((续续))参数参数EE--11级标准级标准EE--1.11.1级标准级标准EE--1.21.2级标准级标准离子和金属离子和金属,pptNH4+10010050Cl-1005020F-1005030NO3-1005020SO42-1005020Al3+50205B50205Ca2+50202Cr50202Cu2+50202Fe50202Mg2+50202Na+50205K+50205Zn2+50202注:该表为ASTMASTM超纯水的水质要求。DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow日本半导体制造厂超纯水水质标准IntegrationScaleItems256Kbit1Mbit4Mbit16Mbit64Mbit256MbitLinewidthµm0.80.50.350.25ResistivityM•cm17-1817.5-181818.118.218.20.1µm50-15010-2050.05µm1051Particle(number/ml)0.03µm105Bacterianum./l50-20010-501010.10.1TOCppb50-10030-5010210.5O2ppb50-10030-50501051SiO2ppb105110.50.1Metal,Ionppt-1000100-50010010-5051Y.Motomura,KuritaWaterIndustriesLtd.,MembraneJournal(Korea),6,No.3,141-156(1996)DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow高纯水系统水质标准高纯水系统水质标准指标指标精处理出水精处理出水二二级除盐水级除盐水一级除盐水一级除盐水硬度硬度~~00~~00~~00导电率导电率0.2us/cm0.2us/cm5us/cm0.2us/cm0.2us/cm5us/cm电阻率电阻率5M5M••cmcm5M5M••cmcm0.2M0.2M••cmcmSiO215ppb20ppb100ppbSiO215ppb20ppb100ppbNa5ppbNa5ppb----Fe8ppbFe8ppb----Cu3ppbCu3ppb----注:摘自国家标准«火力发电机组及蒸汽动力设备水汽质量标准»DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow超纯水系统中常采用的技术超纯水系统中常采用的技术预处理脱盐后处理原水原水回收系统POUPOU混凝、澄清、过滤、精滤活性炭吸附、杀菌、消毒膜滤、软化、脱气反渗透、离子交换、电渗析、EDI紫外线杀菌、臭氧杀菌、超滤、微滤初级脱盐初级脱盐初级精处理初级精处理末级精处理末级精处理DOWRESTRICTED-Forinternaluseonly®™TrademarkofTheDowChemicalCompany(“Dow”)oranaffiliatedcompanyofDow超纯水中的主要杂质超纯水中的主要杂质杂质种类典型值(µg/L)相对含量相对含量(%)颗粒细菌SiO2无机物TOC100个/100mL6个/100mL5ppb2ppb100ppb1.510-33.010-552100~0~04.84.81.81.893.493.4~0
本文标题:超纯水制造技术简介-外部发表版
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