设备部周报

EEWeeklyReport-W1724(06/11~06/17)PreparedbyEEJun.16th.20172NSPProprietaryOctober4,2019W1724Fab8EEWeeklyReportHighlight/lowlightNAWeeklyDepartmentKPIsummaryandreviewY1-EIS98.68%（Target99.1%），DIFF漏晶点位异常导致漏晶，DIFF当站Impact0.05%，ISO影响0.09%，CVD影响0.05%，PRT影响0.02%，DIFF漏晶TotalImpact约0.21%本周重工较多，wafer厚度为160-170（正常200），各站点均影响，HoldWafer重工Impact约0.16%Projectstatusupdate60%设备拆装机进度——ISO03&DIFF11PE验机进行中60%设备验收状况：Total24item,完成15项:63%，进行中4项，待送件5项ISO03验机状况：端午节后复机，目前待换酸后PE对其测试CVD设备附属设备——清洗机&烤箱装机进度：5/25吊装定位完成，厂务预计6/18送电设备异常处理SOP,新人训练资料,编排整理及列表，持续进行，网印所属设备完成55%，蚀刻完成100%，沉积完成100%教育训练实施状况——针对设备发生的重大异常，会将异常报告在部门内倡导，并让同仁签名确认并放在现场供同仁随时参考学习。另外收集2/3厂历年工安事故，各组平行展开预防对策。MFGCostanalysis修缮维护费本周总费用37,306RMB（领用石墨舟1套，18,991RMB，厂务空调箱改造13,000RMB），0.31C/W，OnTarget人力状况目前EE总人力20人（本周離職1位资深工程師）PlantodoEEAR处理进度BackupMaterialFAC2鍾鎔華4NSPProprietaryFebruary14,201299.0498.8098.9699.1999.1199.1499.1798.8299.0298.4798.7098.6898.6898.6698.3298.7398.8998.9695.0096.0097.0098.0099.000.0000.1000.2000.3000.4000.500Y1StageBKRENA0.11DIFF0.03ISO0.11CVD0.23PRT0.13FS0.13FVI(FS)0.15EIS99.10INSP0.01StageTgtW1714W1715W1716W1717W1718W1719W1720W1721W1722W1723W17246/116/126/136/146/156/16INSP0.010.0120.0040.0080.0030.0040.0040.0060.0040.0080.0100.0080.0050.0170.0070.0070.0120.004RENA0.110.0050.0030.0020.0020.0040.0060.0030.0000.0180.0200.0060.0480.0180.0440.0010.0100.014DIFF0.030.0320.0540.0440.0550.0300.0430.0710.2010.1340.1970.1730.2140.1780.2400.1910.1180.107ISO0.110.1480.2070.1690.1370.1410.1220.1490.2710.1120.4060.2720.3660.2540.4280.2060.2070.188CVD0.230.2510.3510.2980.1960.1860.1550.1620.1900.2780.2880.2770.2460.3600.3150.3520.2230.202PRT0.130.4060.2260.1830.1480.1910.1920.1530.2100.2200.1900.2400.2740.2050.2210.2270.2530.274FS0.130.2510.1650.1580.1180.1580.1570.1330.1360.1510.2930.1740.1360.1420.2670.1500.1770.162FVI(FS)0.150.2410.1330.1250.1390.1820.1760.1480.1370.0890.1380.1320.1420.1330.1570.1190.1160.127EIS99.1099.0498.8098.9699.1999.1199.1499.1798.8299.0298.4798.7098.6898.6898.6698.3298.7398.8998.96W1724Y1状况EIS98.68%，较上周98.47%↑0.23%，6/16已经改善至98.96%DIFF0.181%，DIFF03/08上下料点位优化，截至6/15，当站BK改善明显（当站漏晶Impact约0.05%）ISO0.277%，DIFF来料漏晶改善，整体BK改善，较上周Improve0.129%（前站点漏晶Impact约0.09%）受重工Wafer影响（厚度160-170，正常200），Impact约0.16%（DIFF-0.04%，ISO-0.04%，CVD-0.04%，PRT-0.04%）5NSPProprietaryNov23,2012DIFF11&ISO03PE验机进行中60%-EE裝機&PE驗機計畫全時表6NSPProprietaryOctober4,2019Fab8LitchiP2验收進度FAB8LitchiP2验收进度Total24item,完成15项:63%，进行中4项，待送件5项：捷得宝*2——ISO03&DIFF11PE验机进行中宇锋*1——AOC设备验收事宜目前和厂商协调中（设备需要厂商再维修，和厂商协调中）捷佳伟创*1，羅伯特科*1——SC-CVD设备OpenIssue待厂商处理，厂商预计6/23入厂确认Vendor天馬台達宇鋒捷得寶歐普泰昆山亚亚上海源拓捷佳伟创羅伯特科豪恩特施密德翔飞科技盛瑞特TotalRate(%)Q'ty211911111311124100%完成20041110031111563%進行中0103000000000417%待送件0012000110000521%Fab8LitchiP2待验收项目进度如上绿色Remark为验收进行中，共计4项ISO03&DIFF11PE验机进行中AOC设备验收事宜目前和厂商协调中（设备需要厂商再维修，和厂商协调中）SC-CVD设备OpenIssue待厂商处理，厂商预计6/23入厂确认8NSPPropertyISO031-5道EL驗證报告5/25Description：5/25转速1.8Experiment：Action：進一步投料觀察，持續解決滾輪刮傷問題組別蝕刻值測試數量EL不良數量EL比例效率10.1820042%18.50持續解決滾輪刮傷問題9NSPProprietaryOctober4,2019Description:清洗机和烤箱装机Time:6/2Action:.机台拆箱吊装完成5/25机台定位完成NextAction:预计6/18送电EE:沉积组清洗机和烤箱装机报告清洗机烤箱吊装清洗机烤箱定位完成清洗机和烤箱装机Schedule项目5/255/265/275/285/295/305/316/16/26/36/46/56/66/76/86/96/106/116/126/136/146/156/166/176/186/196/206/216/226/23拆箱吊装设备定位二次配会勘二次配实施线路连接上电测试清洗烘烤石墨舟PE试做10NSPProprietaryOctober4,2019异常处理SOP清单及进度网印所属设备共计31项，目前完成17项，完成度55%蚀刻所属设备共计9项，目前完成9项，完成度100%沉积所属设备共计22项，完成100%11NSPProprietaryOctober4,2019异常处理SOPEE部门教育训练记录针对设备发生的重大异常，会将异常报告在部门能宣导，并让同仁签名确认并放在现场供同仁随时参考学习设备异常处理训练序号站别异常处理SOP训练时间1ISOISO01保养时手臂碰酸事故报告3月17日2CVD真空系统异常处理流程SOP3月21日3ISOISO011-5下料机第二道EL皮带印排除报告3月27日4ITXITX02QDR水槽溢流改善进度报告3月31日5ISOISO01下料吸嘴印改善报告4月7日6CVDJR机台ks2000软件安装SOP4月11日7PRT印刷偏移处理SOP4月14日8ISO车间烟雾报警说明4月18日EE部门安全问题宣导签到表針對FAB2/3設備發生的安全問題，在部門早會宣導，並進行平行展開，使同仁得到警示，並按照相關的SOP進行安全防護。14NSPProprietaryOctober4,2019Description:捷佳伟创设备装机Date:W1718Action:4-25组织员工参加SCCVD和罗伯特科插片机操作4-28组织员工参加SCCVD和罗伯特科插片机操作培训文件《插片机机器人操作规程》《石墨舟上下料常见故障、保养及操作注意事项》4-25做9舟片子测试，机台无异常4-26做3舟片子测试，机台无异常沉积组SC-CVD教育训练状况EERMcost趨勢圖修繕維護費本周總費用37,306RMB，0.31C/W，Ontarget。設備修繕維護費目標2017/7(四條線14MW)降至0.40Cent/W，預計Cost-down貢獻0.08Cent/W降本原則以維修優先(價格為新品50%)，不能修轉以非原廠供應料(cost-down30%)，持續進行。Weekly2014Jan~Jun2015Jan~Jun2016Jan~Jun2017Jan~MayJan-17Feb-17Mar-17Apr-17May-17W1714W1715W1716W1717W1718W1719W1720W1721W1722W1723W1724Target(RMB)10,700,5826,646,6113,345,0821,251,011255,783520,022138,362196,382140,46239,39445,45943,54467,98543,71916,36738,16342,2132,61736,09637,306Actual(RMB)12,148,9576,390,1233,114,9701,251,011255,783520,022138,362196,382140,46239,39445,45943,54467,98543,71916,36738,16342,2132,61736,09637,306Output(MW)7.1856.0014.2801.0002.0461.0481.1681.0831.5980.2001.1301.4001.6001.5401.5001.6701.6800.4101.8401.780ActualCost(cent/Wp)0.510.510.512.8313.170.490.461.110.322.790.590.450.590.410.160.330.370.030.300.31CostTarget(cent/Wp)0.450.560.602.286.833.010.840.700.590.670.670.770.680.640.620.550.552.380.590.59AverageMRMB(Actual)2.021.070.520.21内部控制0.450.450.450.450.450.450.450.450.450.400.407.196.004.281.002.051.051.171.081.600.201.131.40