半导体晶圆生产线调度的性能指标体系研究

:2005-09-06:(F0531020,60374005);(2002CB312202);:(1967-),,,,.E2mail:[e-mail],,,(,200092):,,.,,;.,,..:;;;:TP273:A:0253-374X(2007)04-537-06PerformanceEvaluationSystemforSchedulingSemiconductorWaferProductLineQIAOFei,XUXiaohong,FANGMing,WUQidi(SchoolofElectronicsandInformationEngineering,TongjiUniversity,Shanghai200092,China)Abstract:Aperformanceevaluationsystem,whichconsistsofshort-termperformanceindicesandlong-termperformanceindices,ispresentedforschedulingsemiconductorwaferproductionline.Theshort-termperformanceindicesaimtoevaluatethedailyproductionplans,andincludetwotypes,i.e.product-relatedperformancesindices(suchasWorkInProcess,movementandstep)andequipment-relatedperformancesindices(suchastherateofutilizeofequipment,load,queueandtherateofbot2tleneck).Thelong-termperformanceindiceshelptoanalyzethedailyorderreleaseplan,andarecom2posedofaveragecycletimeandproductiverate.APerformance-EvaluationSystemforschedulingsemiconductorwaferproductionlinewasthendesignedandimplementedtoguidetheactualproductioninsemiconductorwafershop.Thisdevelopedsub-systemhasbeenwellappliedinfactories.Keywords:semiconductorwaferproductionline;performanceindex;Ganttchart;bottleneckforecasting,.,.,,35420074()JOURNALOFTONGJIUNIVERSITY(NATURALSCIENCE)Vol.35No.4Apr.2007.,,[1],ParkE[2],[3].,,.,,,.,.1,1.,,,.,,;,.,,.,,.,,;..,,,,..,,.1Fig.1Performanceevaluationsystemforsemiconductorwaferproductline1.1,,.1.1.1(1)(workinprocess,WIP)(WIP).,,,,.,,.,,.,,.((1)).,((2)).Wi=nij=1Wi,j+Wi,wait(1)Wf=ni=1Wi+Wb(2):Wii;Wi,jij;nii;Wi,waiti;Wf;Wb.,,.,,;,,835()35.(2)(movement),.,.,.,:mo=ijijPij(3):mo;ij,ij:1,0;Pijij.,W,,,.,,.(3)(step),.,,vs=mo/Wf(4):vs;Wf.,,,.1.1.2(1)(utilization).Pu=mh=1ThTop100%(5):Pu;Thh;mm;Top..,,,,,[4].,.(2).,;,,,,.,,.:[4].(overallequipmentefficiency,OEE),,,,,.,,,.Ac[5]:Ac=(1-Dt-Pm-Eg-Md-Pc)1440:Dt;Pm;Eg;Md;Pc.min,;,;,.(3)..,;,.,.:.:Ac=Aqt-pro(6):Aq;t-pro.(4),,9354,:,.,()().,(),.,.:B(t)=1LAc0LAc(7):1t,0t..Pb=t10B(t)dt(t1-t0)100%(8):Pb1.Pb=1,;Pb1,.,(),.,(,),.1.2(1)(cycletime).,.,,.,.,[3].,.,.,.,:.,.,.,,.,,,(),...,,.(),;,.,...,,[3]..(2).:F=Tpropl=1Tl(9):F;Tpro;Tll;p.,F1.F,.,F.(3)(throughputrate)..:Pp=PoutTd(10):Pp;Pout;Td,d.,,,;,,,.,,.,,,.,,.[3].,Little=045()35,.,,[3].2.,,..,,,,..,.,,,,.2.2Fig.2Realizationofperformanceevaluationsystem2.12.1.1(1)W,,.,,W,,W.,,,.30min.12h3.,WW.(2),,,,.(3),(4).3WFig.3Wgraphinsomecertainprocessarea2.1.2(1),(5)mh=1ThTop.mh=1Th(),.,,.,,,.Top,,.,,,,.,,.,(5).(2),.,1454,:,.,,,,.,.(3),.,,,,,,,..(4),,,Dt=Eg=Md=Pc=0.,Ac=(1-Pm)1440,,B(Tl).,,(8):Pb=f-1v=0B(t0+vT)f(11):T;f.2.2(1).,,..(2).,.(3),(10)Pout,.3,,,.,..,,,,,.:;;,,,.:[1].[M].:,1998.LIPeigen.Modelingofmanufacturingsystemperformancetheoryandmethod[M].Wuhan:PublishingHouseofHuazhongUniversityofScienceandTechnology,1998.[2]ParkE,TilburyDM,KhargonekarPP.Modularlogiccontrollersformachinesystems:FormalrepredentationandperformanceanalysisusingPetrinets[J].IEEETransactiononRoboticsandAutomation,1999,15(6):1046.[3].[J].,2004,25(5):516.CAIZongyan.Performancemeasurementofreconfigurablemanu2facturingsystem[J].AcatAeronauticaetAstronauticaSinica,2004,25(5):516.[4],.[J].,2004,29(2):41.PANFeng,QIANShengsan.Methodsofoptimizationforthroughputandcycletimeinsemiconductorwaferfabrication[J].SemiconductorTechnology,2004,29(2):41.[5]ChangSH,HuangHW.Loadingallocationalgorithmwithma2chinecapabilityrestrictionsforwaferfabricationfactories[J].JournaloftheChineseInstituteofIndustrialEngineers,2001,18(4):82.(:)245()35