基于GMR传感器的电涡流检测系统关键技术研究(实验室高阳华)

20092811(TransducerandMicrosystemTechnologies)GMR3,,,,,(,310027):(GMR),,:GMR,,:;;;:TM937:A:10009787(2009)11003103ResearchonkeytechnologyofeddycurrenttestingsystembasedonGMRtransducer3GAOYang2hua,ZHANGGuang2xin,HUANGPing2jie,HOUDi2bo,FANMeng2bao,ZHOUZe2kui(NationalKeyLaboratoryofIndustrialControlTechnology,DepartmentofControlScienceandEngineering,ZhejiangUniversity,Hangzhou310027,China)Abstract:AnewGMReddycurrentprobeanddetectionsystemaredesigned.Theframework,principleofthesystem,problemsthatshouldbepaidattentionduringthedesignandthekeytechniquesinthissystemareemphasized.Specimenaluminiumisusedinthedetectingexperimentverification.TheexperimentresultsshowthattheGMReddycurrentprobepossesseshighersensitivityanddeeperdefectdetectioncapabilitycomparedwiththeconventionalcoilprobeduringdeepdefectinspectionofthemulti2layeredconductivestructures.Keywords:multi2layeredconductivestructures;eddycurrentinspection;deepdefect;GMR0[14],,(,),,,,,,,,,,,GMR,,1GMR(giantmagneto2resistance,GMR)GMRGMR,GMR,,(DC)[5,6]GMR1GMR6,::200905023:(50505045);(200803350058)13281)GMR,GMR;2)GMR,;3)GMR,1GMRFig1EddycurrenttestsystemofGMR1.1GMR,,H0,2,,GMRH01,,H0,H0H1,H1,GMRH01,,GMRH11,GMRH=H01-H11GMR,,H,GMRGMR,,,,AD620,,,,,,2Fig2Schematicdiagramofmagneticfield1.21.2.1(di2rectdigitalsynthesis,DDS),AD9832,0.047Hz,0.089,GMR,500Hz,1kHz,14V1.2.2GMR[78],,,3r=0.23mm,4.5A,GMR(5mm4mm1.5mm),D110mm,D215mm,35mm,1mm,10003GMRFig3StructuraldiagramofGMRprobe,GMR,44GMRV2HFig4V2HcurvesofGMR2basedprobewithalnicoandwithoutalnico1.2.3GMR,AD620,,GMR,KD=100,2311,:GMR,fC=50Hz,,1.2.4DAQPad6015,200kHz,,,,,,2,500Hz1kHz,,,5(a),(b)15Fig5Schematicdiagramofspecimen1Tab1Parameterssheetofdefects(mm)(mm)(mm)(mm)1411.52.52622.04.0f=1kHz,1,GMR,6:U1=0.18V,GMRU2=0.35V,U2U12f=500Hz,2,7,,:,,GMR,3GMR,GMR:GMR61Fig6Testresultsofspecimen172Fig7Testresultsofspecimen22;,GMR,GMR,:[1]YosephBarCohen.EmergingNDTtechnologiesandchallengesatthebeginningofthethirdmillennium,Part1[J].MaterialsEvalu2ation,2000,37(1):17-30.[2]YosephBarCohen.EmergingNDTtechnologiesandchallengesatthebeginningofthethirdmillennium,Part2[J].MaterialsEvalu2ation,2000,37(2):141-149.(36)3328,Butterworthfs=10kHz,1kHz,44Fig4Characteristicofband2passfilter3,(),,,PSD,PSD,Xs,xx2mm,5Fig5Calibrationcurveofplanemeasurementprototype,52m2m,8m,,,62h,6m6Fig6Stabilitycurveofplanemeasurementprototype4,PSD,,::[1].[D].:,2002:3-5.[2],,.[J].,2005,41(5):23-25.[3],,.L2MPSD[J].,2006,33(12):21-22.[4].[D].:,2008:23-23.[5],,,.[J].,2006,36(4):261-264.:(1978-),,,,,(33)[3]SophianA,TianGY,TaylorD,etal.ElectromagneticandeddycurrentNDT:Areview[J].Insight,2001,43(5):302-306.[4],.[M].:,2002.[5],,,.GMR[J].,2008(5):51-54.[6].[D].:,2008:52-59.[7],,,.[J].,2008(6):1079-1083.[8],,,.[J].,1998(3):107-109.:(1983-),,,,63