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序号工序处理液初始配液浓度温度设定值时间设定值1去损伤层NaOH7%60℃4min2温水隔离DI水/50℃3min3单晶制绒NaOH/IPA/添加剂1%/6%/0.4%80℃25min4QDRDI水/RT3min5纯水清洗DI水/RT3min6喷淋DI水/RT3min7HCL处理HCL10%RT7min8纯水清洗DI水/RT3min9HF处理HF10%RT7min10喷淋DI水/RT3min11漂洗DI水/RT3min12预脱水DI水/60℃5min13槽式烘干热空气/80℃7min制绒槽体配液及添加NaOH(L)异丙醇(L)添加剂(L)水(L)初始配液26.5//113.5自动添加(每200片)0.3///初始配液48.50.56127自动添加(每200片)0.150.50.03/酸洗槽体配液及添加HCL(L)HF(L)水(L)共计(L)初始配液/25.3114.7140自动添加(每200片)/0.5//初始配液33.5/106.5140自动添加(每200片)0.5///初始配液添加量及自动补液量去损伤层槽制绒槽氢氟酸槽盐酸槽浓度控制范围温度控制范围时间控制范围7±0.2%60±2℃4-5min/50±2℃3±1min±0.1%80±1℃25-30min/RT3±1min/RT3±1min/RT3±1min±0.5%RT7±1min/RT3±1min±0.5%RT7±1min/RT3±1min/RT3±1min/60±2℃5±1min/80±2℃7±1min共计(L)140/140.06/
本文标题:单晶制绒工艺
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