高纯电子化学品技术研发现状及必须解决的基本问题

200910Oct.2009365YunnanChemicalTechnologyVol.36,No.5,(,650228):2009207229:2009209201:(19652),,,,:,,,,,:;;:TQ126.3+5:A:1004-275X(2009)0520027205(IC),,,,30mm30mm,,IC,,IC,1,(SemiconductororEquipmentandMaterialsInternation,SEMI)SEMI,4431,23[1],,,,,,,,,(),11,,,1J.T.BakerULSIF1g/mL,ICL5g/mL;KMnO45g/mL,1g/LTable1ComparisonofthequalitiesofthehighpureelectronicgradeacidsinaUSAenterpriseULTRYTEFinyte21SEMIC3620301/Grade3ULTRYTEFinyte21/%95.596.569.070.085.087.035.037.048.849.2Cl50801005002000SO4100100500200500PO4100200400NO31005001000Al0.11300.11Sb0.117000.11As0.1--400.11Ba0.11100.11Bi11B1401Cd0.11400.11Ca0.111000.11Cr0.12400.11Co0.11200.11Cu0.11200.11Ga0.110.11Au1401Fe0.121000.11Pb0.11200.1Li0.11100.11Mg0.11200.11Mn0.11100.11Ni0.11450.11K0.111000.11Na0.111500.11Ag0.110.11Sr0.11100.11Sn0.110.11Ti0.11101Zn0.11500.110.5m/(/mL)5020505050:IC0.18m,110g/L,0.2m5/mLIBM0.13m0.1m,0.1g/L,IC0.20.6m,50500g/L82200952E.MerckMerck-Kanto(36.4%);Ashlan(25.7%),Arch(9.5%),AllinckradtBaker(4.4%);Wako(10.1%),Sumitomo(7.1%),,,DONGWOOFINCHEMDONGJINSEMICHEMSAMYOUNGFINCHEM90%[2],,IC,AsFeCaK40g/L100g/L100g/L100g/L,2g/L39g/L5g/L23g/L,,7,200525kt/a,2001200517.5kt,MOS(1g/mL)(20kt/a)(3kt/a),8630.09m0.2mSEMI12,,,,(,),,NECNEC()Merck,,3,,,,,,,,,,,,,,,,,IC3.1,,,3.510412.5104/L,(ISO9)3.5104/L,,,,,,9220095:,(),,1999ISO1464421,ISO1ISO9GB5007322001ISO3.2,,,18.2Mcm1997GB/T11446.121997,,(2)2g/LTable2Theinspectionresultofsomemetalionsinlaboratorywater(18.2M.cm)3Na50475870.013.60.16Mg106101300.0040.070.02Al200.30.030.040.03K37782640.40.60.5Ca275504250.10.50.3Cr/0.20.030.030.03Mn/0.90.020.030.03Fe6820.070.070.07Ni60.20.30.3Cu120.060.050.05Zn60.20.30.3As0.10.050.10.2Cd0.10.0020.0030.002Ba0.70.0030.001Au0.40.10.10.1Pb0.30.0010.0010.002:3,,,CaMgKNa,,,,,,3.3:;,,(),,CaMgFeZnCrNi,,,(HDPE)(PTFE)(PVDF)(Teflon)PFA,,,,3.4,,,(ICP-MS)(AA),,,,,,0320095(),,,,,,,,,,,,1g/L50g/L,,4,,,2006,,(1020t)(328t)(106t)(85t)(12t),,,9803100/t,3800/t,545/t,2006800t,2000/t,52000/tP(3),,,3Table3Pricecomparisonofphosphoricacidsofdifferentqualities85%/(/t)3800480080001600030000P/(/t)1414.171786.3229765954.3811164.47,45,200517.5kt,2kt,14.5kt,5kt(=+-),80%,2001200590%201018.4kt,,,,,5,,,22,:[1].[M].:,2001.[2].[J].,2002,(5):629.MustBeSolvedBasicProblemsinResearchofSuperpureElectronicChemicalsZHAOHai2yan,LIDe2gao(TheChemicalResearchInstituteofYunnanProvince,Kunming,650228,China)Abstract:Thequalitystandardrequestforsuperpureelectronicchemicalsisveryhigh.Theperformancetechnologywascontrolledbythedevelopedcountries,soalmostallofthesuperpureelectronicchemicalsusedindomesticfactoriesareimported.Thereforewemustdevelopourtechnology.Duringthisresearch,somebasicproblemssuchasunsufficientfinan2cialsupportandlowprecisionexperimentstudywithlowprecisionanalysisequipmentsmustbesolved.Keywords:superpureelectronicchemicals;electronicgradephosphoricacid;metalion1320095: