ITO薄膜的光学性能研究

20035(62)27ITO123(1.,5106402.,5106403.510640)ITOSn3ITOw(Sn)10ITO10ITOITO500ITOITOTG156A1007-9289(2003)05-0027-03OpticalPropertiesofITOFilmsWANGMin1MENGJi-long2CHENMing-guang3(1.DepartmentofMechantronicEngineering,GuangdongPolytechnicNormalUniversity,Guangzhou510640;2.CollegeofMechanicalEngineering,SouthChinaUniversityofTechnology,Guangzhou510640;3.DepartmentofAppliedPhysics,SouthChinaUniversityofTechnology,Guangzhou510640,China)Abstract:ThepreparationofITOfilmsbysol-gelmethodandtheinfluenceofSndiffusion,heat-treatmenttemperatureandtimeonthetransmittanceofITOfilmswerestudied.ExperimentalresultsshowedthatthetransmittanceofITOfilmsdecreasedslowlywhenSndiffusionwaslessthan10%butitdecreasedsharplywhenSndiffusionwasbeyond10%withtheincreaseofheat-treatmenttime,thetransmittanceofITOfilmsdecreasedlinearlywiththeincreaseofheat-treatmenttemperature,thetransmittanceofITOfilmsincreasedsignificantlywiththetemperatureupto500andthendecreased.Keywords:ITOfilms;sol-gelmethod;opticalproperties;transmittance0TCO[1]TCOSnO2In2O3ZnO3SnIn2O3(ITO)TCO(MOCVD)(solgel)(PLD)(SP)[2~6]2003-06-252003-07-08(1978-)()ITOITOSn3ITO11.175mm25mm1mm1.2InSnCl4·5H2OInInCl3InCl3ABBC0.5hInInSnCl4·5H2O0.5hInSn45minITO1.3ITOITO0.2cm/s15015min,ITO1.4ITOITOITOITOITOITO100ITOGSE6328Å22.1SnITO1w(Sn)5%8%10%11%12%40020minITOw(Sn)ITO10%80%10%ITO10%ITO400760nmITOITO[7]10%ITO80%ITOw(Sn)10%2.2ITOITOw(Sn)5%10%35040045050055020min2ITO2ITO500w(Sn)10%ITO50088%500ITO550ITO85%450550ITO5%ITO50050084%45028ITO20035(62)29ITO210%ITO42050055080%ITO170/[8]ITO100500/ITO4204502.3ITO3w(Sn)10%55020min25min30min35min40min45min50minITOITO26minITO80%ITO26minITO500/ITOITO25min3w(Sn)10%ITO10%ITO50010%ITO50088%ITOITOw(Sn)10%4204502025min82%85%170/ITO:[1].[J]..2003(2)5-7.[2],,.SnO2Sb[J]..2002(6)599-602.[3],,.MOCVD[J]..2001,(6)119-124.[4]YasutakaTakahashi,ShinyaOkadaetal.Dip-coatingofITOfilms[J].JournalofNon-crystallineSolids.1997,218:129-134.(32)32-HV-120-715HV631HV695HV667HV-2.2[6][7]3(1)(2)781011:[1].[Z].1998.[2]ZhangBao-hong,ZhangZhi-min.Studyonsynchronizenhubplasticforming[J].ActaMetallurgicaSinica200013(2):446-450.[3]ZhangZhi-min,ZhangBao-hong.Investigationofplasticformingprocessforspurgear[C].The6thICTPConference1999.9.[4].[M].1997.12.[5].[M].1995.8:199-200.[6].[M].1996.2.[7].-[Z].1997.030051Tel:[phone](0351)[e-mail]¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤¤(29)[5]AkioSuzuki,TatsuhikoMatsushita,etal.Highlyconductingtransparentindiumtinoxidefilmspreparedbypulsedlaserdeposition[J].Thinsolidfilms.2002,411:23-27.[6]RamakrishnaReddyKT,etal.HighlyorientedandconductingZnO:Galayersgrownbychemicalspraypyrolysis[J].SurfaceandCoatingsTechnology,2002,3:110-113.[7],,,.[J]..2001,3:19-20.[8].In2O3:SnITO[D]..2003.51064133602Tel:[phone](020)38825719E-mail:[e-mail]