金属掺杂类金刚石膜的研究进展

Ｎａｎｏｓｃｉｅｎｃｅ＆NanotｅｃｈｎｏｌｏｇｙＮｏ．6December２００856２００8122008-09-211211111.4300752.230031Diamond-likeCarbonDLC。DLC。DLC、。DLC。ResearchProgressofMetalDopedDiamond-likeCarbonFilmsGUOYan-long1，SUNYou-wen2，WANGShu-yun1，WANGXiao-bing1，CHENGYong1，LUChang-yong1(1.Opto-ElectronicsFacilityofWuhanOrdnanceNon-CommissionedOfficersAcademy,Wuhan430075，China)(2.AnhuiInstituteofOpticsandFineMechanics,Hefei230031,China)Abstract:ComparedtopureDiamond-likeCarbon(DLC)films,metaldopedDLCfilmshavebetterperformanceandalotofmerits.Forexample,metaldopedDLCfilmshavelowinnerstress,goodadhesionandfinewearresistance.MetaldopedDLCFilmsisdevelopingfromsingleelementdopingtomultipleelementdopingandfromuniformdopingtogradeddoping.ThedevelopmentofmetaldopedDLCFilmsissummarizedandanalyzed,anditswideapplicationprospectisrevealed.Keywords:metaldopeddiamond-likecaronfilmsprotectivefilmsO484.1A1812-1918200806-0013-051sp3sp3sp3sp2sp1[1]。sp370％TetrahedralAmorphousCarbonta-C。、、、、、、、。DLC1。DLC、、DLC1356２００812Ｖｏｌ．5Ｎｏ．6December２００8、。2。DLC1μm。DLC“”sp3DLC。3。DLCDLCsp3DLCsp3。DLC500℃DLC250℃。DLCDLCSi、TiW。RickyKYFuDLC[2]DLCDLC。DLC、、、、DLC。DLC。。。DLC。DLC、CrTi。IV、V、VITi、W、Mo、Ta、Nb//。[3]、、1μm。DLCDLC。、、DLC。DLCDLC。22080DLC-Ti、CrW。KirstenI.Schitfmann[4]10~30%DLC。12。TakanoriTakenoCVDCo、MoWDLC[5]W。Mo、Nb、Pt、Au、Ag、Ni、TaCu[2]。、、DLC[6]4%7%。DLCDLC。60GPa35Gpa、50Gpa、40GPa。NarayanDLC、、、[7]。。Nanomaterial&Application14Ｎａｎｏｓｃｉｅｎｃｅ＆NanotｅｃｈｎｏｌｏｇｙＮｏ．6December２００856２００81211Ti-TiC-DLCDLC。DLC。2.1[8]DLC。。6.3%6.3%。A.A.Voevodin[9]DLC。1DLC、。1。Ti-TiC-DLC-3×[Ti-DLC]Ti-TiC-DLC-Ti-DLC-Ti-DLC-Ti-DLC。4DLC300nmDLC100nmTi。Ti-TiC-DLC-20×[Ti-DLC]2060nmDLC10nmTi。Ti-TiC-DLC1。1TiDLC。1Ti-TiC-DLC50NDLC5Ti-TiC-DLC-3×[Ti-DLC]60NTi-TiC-DLC-20×[Ti-DLC]70NDLC31.4GPaDLCTi-TiC-DLC105Ti-TiC-DLC-20×[Ti-DLC]1060.1。。2.2BabaK[10]Ar/C2H2W。WC1-xW20%10nmW。W/μmDLC/μm/GPa/N/NDLCTi-TiC-DLCTi-TiC-DLC-3×[Ti-DLC]Ti-TiC-DLC-20×[Ti-DLC]0.512.71.90.50.51.21.26570252010101530105060701556２００812Ｖｏｌ．5Ｎｏ．6December２００8W0.5%0.09。[11]DLCDLC。DLC、DLCWC。DLCDLC。2.3DLC[12]CCrM2DLC0.2μmCr、1μmCxCry1μmDLC。32～46GPa。DLCDLCDLC16NCrDLC60NCrDLCCrCxCryDLC65NCxCryDLC。DLC。2.418%DLC[13]18.6GPa。0.05~0.101.1×105。2.5DLCDLCDLC。F.R.Marciano[14]DLCDLC。S.C.H.KwokDLC[15]。HeonWoongChoiReinholdH.Dauskardt[16]0.1%~9.7%DLC。3、、、、、、、。、。。[1],,.[J].,2008,45(3):3237.[2],,.-[J].,2007,24(2):159~165.[3],.-[J].,2008,37(2):456~460.[4]KirstenI.Schitfmann,MatthiasFrydaandGiintherGoerigk.StudyofmetalcontaininghydrogenatedcarbonfilmsbySTM/AFMandSAXS[J].MikrochimicaActa,1997,125:107~113.[5]TakanoriTakeno,YuhtaroHoshi,HiroyukiMikietal.Activationenergyinmetal-containingDLCfilmswithvariousmetalsofvariousconcentrations[J].Diamond&RelatedMaterials.2008,17:1669~1673.[6],J.Sankar,J.Naraya.[J].,2000,21(2):57~62.[7]NarayanRogerJager.Laserprocessingofdiamond-likecarbon-metalcomppositesv[J].AppliedSurfaceScience,2005,245:420.[8],,.Nanomaterial&Application6516Ｎａｎｏｓｃｉｅｎｃｅ＆NanotｅｃｈｎｏｌｏｇｙＮｏ．6December２００856２００812[J].,2008,24(1):27~31.[9]A.A.Voevodin,M.S.Donley,J.S.Zabinski.Pulsedlaserdepositionofdiamond-likecarbonwearprotectivecoatings:areview[J].SurfaceandCoatingsTechnology,1997,92:42~49.[10]BabaK,HatadaR,TanakaY.Preparationandpropert-iesofW-containingdiamond-likecarbonfilmsbymagnetronplasmasourceionimplantation[J].Surface&CoatingsTechnology,2007,19-20(201):8362~8365.[11],,.[C].,2006:840~844.[12],,.[J].,2006,27(2):27~30.[13],,.[J].,2008,28(2):118~122.[14]F.R.Marciano,L.F.Bonetti,R.S.Pessoaetal..TheimprovementofDLCfilmlifetimeusingsilvernanoparticlesforuseonspacedevices[J].Diamond&RelatedMaterials.2008,17:1674~1679.[15]S.C.H.Kwok,W.Zhang,G.J.Wanetal..Hemoco-mpatibilityandanti-bacterialpropertiesofsilverdopeddiamond-likecarbonpreparedbypulsedfilteredcathodicvacuumarcdeposition[J].Diamond&RelatedMaterials.2007,16:1353~1360.[16]HeonWoongChoi,ReinholdH.Dauskardt,Seung-CheolLeeetal..CharacteristicofsilverdopedDLCfilmsonsurfacepropertiesandproteinadsorption[J].Diamond&RelatedMaterials,2008,17:252~257.1982-。buildingblocksandpolymertemplates[J].ScriptaMaterialia,2003,49:735.[36]EidenS,MaretG.Preparationandcharacterizationofhollowspheresofrutile[J].ColloidandInterfaceScience,2002,250:281.[37]SchachtS,HuoQ,MartinIG,etal.Oil-waterinterfacetemplatingofmesoporousmacroscalestructres[J].Science,1996,273(5276):768.[38]SilvanoD,KrolSA,DiasproA,etal.Confocallasersca-nningmicroscopytostudyformationandpropertiesofpolyelectrolytenanocapsulesderivedfromCdCO3templates[J].MicroscopyResTech,2002,59:536.[39][M].2008.111.[40]ValtchevV,MintovaS.Layer-by-layerpreparationofzeolitecoatingsofnanosizedcrystals.MicropMesop[J].MesopMater,2001,43:41.[41]./[J].20071910:1488.[42].AL2O3[J].2005253:37.[43].[J].2006341:55.[44].TiO2[J].2005241:42.[45]WangWZVargheseOKPauloseMetal.,Astudyonthegrowthandstructureoftitaniananotubes[J].MicroporousMesoporousMater2004192:417.[46].TiO2[J].2006137:6.[47]VioletSamuel,P.Muthukumar,S.P.Gaikwad,S.R.DhageandV.Ravi.SynthesisofmesoporousrutileTiO2[J].MaterialsLetters,2004,5820:2514.[48].TiO2[J].2007273:204.[49]SaadounLAyllonbJA,Jimenez-BecerrilJ,etal.Synthesisandphotocatalyticactivityofmesoporousanatasepreparedf