借助ANSYS优化设计声学换能器(2008版)

2004ANSYS1ANSYSANSYSANSYS20086ANSYS11.1ANSYS11.2ANSYS1ANSYS32.132.2ANSYS42.3ANSYS52.4ANSYS7ANSYS113.1113.2123.2.1123.2.2133.3163.3.1163.3.2163.417184.1184.2204.336455.1455.2515.3565.3.1565.3.25863-1-ANSYSANSYSMultiphysicsANSYSMultiphysics(MEMS)ANSYSANSYSANSYS-2-ANSYSANSYS6.x8.xANSYSMultiphysics22XANSYS22XSOLID226FSICMS“ElementShapeControl”“HexDominant”“Sweep”“Sweep”“”ANSYSANSYSANSYSANSYS/HELP-3-ANSYS(2.1)δLdttt120∫=L()()LTUWUWMMEE=−−+−(2.2)(2.3)TcSeEDeSEEs=−=+⎧⎨⎪⎩⎪εTUWUWufVFMMEEϕqσTuudVUTSdVWfudVFudSUEDdVWqdVdSTVMTVMTVTETVEV=⋅==+==+⎧⎨⎪⎪⎪⎪⎪⎪⎩⎪⎪⎪⎪⎪⎪∫∫∫∫∫∫∫∫∫∫∫∫∫∫∫∫∫∫∫121212ρϕϕσΣΣ(2.4)[]{}[]{}{}{}{}{}MuKuVPFPuCVQT+=++=⎧⎨⎪⎩⎪0(2.5)[[]M]K{}P{}F-4-{VQC}u0(2.5)ANSYSANSYS[]}[]{}[]{}{{}MuCuKuF++(2.6)=[M][]C[]K[]M[]C[{]K}F{}(2.6){}FFt=(){}{FFeejjt=⋅0δω}[][][](){}{}−++=ωωδ20MjCKuFej(2.7){}{}F=0[]{}[]{}[]{}{}MuCuKu++=0(2.8)-5-{}{}FF≡0{}∂∂Ft⎧⎨⎩⎫⎬⎭=0{}{}uu==0[]{}{}KuF=0(2.9)(2.6)[]M[[{{ANSYSANSYS]C]K}u}F{}u[][][][]{}{}[][][][]{}{}[][][][]{}{}{}{}MMMuPCCuPKKKuPFsfsfsfsfsfs00000⎡⎣⎢⎢⎤⎦⎥⎥⎧⎨⎩⎪⎫⎬⎭⎪+⎡⎣⎢⎢⎤⎦⎥⎥⎧⎨⎩⎪⎫⎬⎭⎪+⎡⎣⎢⎢⎤⎦⎥⎥⎧⎨⎩⎫⎬⎭=⎧⎨⎩⎫⎬⎭(2.10){}u{}P[][sfKfs]Mfs[][][][]{}{}[][][][]{}{}[][][][]{}{}{}{}MuVCuVKKKKuVFQzzTd000000⎡⎣⎢⎤⎦⎥⎧⎨⎪⎩⎪⎫⎬⎪⎭⎪+⎡⎣⎢⎤⎦⎥⎧⎨⎪⎩⎪⎫⎬⎪⎭⎪+⎡⎣⎢⎢⎤⎦⎥⎥⎧⎨⎩⎫⎬⎭=⎧⎨⎩⎫⎬⎭(2.11){}u{}V[[[]0]]KzKd2.1ANSYS1-6-ANSYS“”2.1ANSYS2ANSYS-7-]34ANSYSANSYSANSYSANSYSANSYSANSYSTerfenol-DANSYSANSYSANSYS[M[]C[]K{}u{}F-8-ANSYS(2.12)TcSeEDeSEEs=−=+⎧⎨⎪⎩⎪εcEeεs(2.12)ST(2.13)TcSBSHs=−=+⎧⎨⎪⎩⎪ββµcHHβσβµσ=⋅sµs(2.12)(2.13)(2.14)BDHE⇔⇔⎧⎨⎩(2.15)cceHEss⇔⇔⇔⎧⎨⎪⎩⎪βµε(2.11)[][][][]{}{}[][][][]{}{}[][][][]{}{}{}{}MuACuAKKKKuAFmmT000000⎡⎣⎢⎤⎦⎥⎧⎨⎪⎩⎪⎫⎬⎪⎭⎪+⎡⎣⎢⎤⎦⎥⎧⎨⎪⎩⎪⎫⎬⎪⎭⎪+⎡⎣⎢⎢⎤⎦⎥⎥⎧⎨⎩⎫⎬⎭=⎧⎨⎩⎫⎬⎭µφ(2.16)[]K[]Kµ-9-]][µsKd[Kmβ[]Kz[]Km(2.16){}A{}φ{}A{}φ(2.11)VExx=⋅∫dlKK12(2.17)x2x1(2.16)AHdxx=⋅∫lKK12(2.18)A2.2KKHdlnI⋅=∫(2.19)nIKKKKKKKKHdlHdlHdlHdlxxxxxxxx⋅+⋅+⋅⋅∫∫∫∫23344112(2.20)AHdlnIxx=⋅=∫KK12(2.21)Ax1x2(2.11)QDd=⋅∫KKσΣ(2.22)Σ(2.16)φ=⋅∫σKKBdΣ(2.23)(2.23)ΣI2.3n-10-Unt∂φ∂=(2.24)0ntZZI∂φ∂=+(2.25)Z0X4X1X2X3H2.2AHHUnt∂φ∂=IZ02.3(UI)-11-ANSYSANSYSANSYSANSYS1.2.3.4.5.6.ANSYS-12-ANSYS3.2.1ANSYSpreprocessorPREP71.create3.12.ANSYSOperateMove/modifyCopyReflectCheckgeometricmodelDelete-13-UpdategeometricmodelKeypointsLineLinesStraightlineInactivecoordinateOverlaidonareaTangenttolineTangentto2linesNormaltolineNormalto2linesAtangletolineAngleto2linesArcsThrough3keypointsByendkeypoints&radiusBycenter&radiusFullcircleSplinesSplinethroughlocationsSplinethroughkeypointsSegmentedsplineLinefilletAreasArbitraryThroughkeypointsOverlaidonareaBylineByskinningByoffsetRectangleBy2cornersBycenter&cornerBydimensionsCircleSolidcircleAnnulusPartialannulusByendpointsBydimensionsPolygonTriangleSquarePentagonHexagonSeptagonOctagonAreafilletVolumeArbitraryThroughkeypointsByareaBlockBy2corners&ZBycentercorner&ZBydimensionsCylinderSolidcylinderHollowcylinderPartialcylinderByendpoints&ZBydimensionsPrismTriangularSquarePentagonalHexagonalSeptagonalOctagonalSphereSolidsphereHollowsphereByendpointsBydimensionsConeBypickingBydimensionsTorus3.13.2.2ANSYS1.1(E)(σ)EXEYEZ[C][S]PZT-4-14-×3.1*3.2*r11370ehdg(1983p147)ρ7500kg/m3[]11121321222331323310266445500013.97.787.430007.7813.97.430007.437.4311.510/000003.06000002.56000002.56CCCCCCCCCCNmCCC⎡⎤⎡⎤⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥==⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦[C]2ANSYSPZT-4(1983p145)129222207308.84106.4510/ssrCmεεε−−==××=×3129111107308.84106.4510/ssrCmεεε−−==××=×129333306358.84105.6110/ssrCmεεε−−==××=×0~14ehdgANSYSeeij6×3eijANSYSedPZT-4(1983p145)eij-15-5.215.10012.712.7eeeee5.2e−⎡⎤[]3131331515⎡⎤⎢⎥⎢⎥−⎢⎥⎢⎥⎢⎥⎢⎥==⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦N/V•m3.35eability6ANSYSANSYSMagneticcoerciveforceMagneticrelativepermB-H2.3.planeshelllinkbeampipefliud129fliud130-16-3.3.13.3.2CLEARREMESH-17-ANSYSFLIUD129FLIUpost1popost1ReadResultsost26FSIANSYSANSYSANSYSD130MU=1ANSYSANSYSst26p-18-s=+⎨⎩⎪ε4.1[C]=[CE]E[]=[]12111313133310266444400013.97.787.430007.7813.97.430007.437.4311.510/000003.06000002.56000002.56CCCCCCCNmCCC⎤⎡⎤⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥==×⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦4.2900110337306.457306.4510/6355.61rrrCmεεεεεεε−⎤⎡⎤⎡⎤⎢⎥⎢⎥⎢⎥====×⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦⎣⎦4.34.4313315155.25.215.112.712.7eeeee−⎤⎡⎤⎢⎥⎢⎥−⎢⎥⎢⎥⎢⎥⎢⎥==⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦N/V•m4.5ANSYS[S][d]PZT-4ANSYSeTcSeEE=−⎧⎪DeSEPZT3zxoyC11=C22C21=C12C13=C23=C31=C32C44=C55PZT-4(1983p145147):z111213CCC⎡[]11rε⎡[][]1208.8410/Cmε−=×31e⎡[]zz-19-13331312131110244446600013.97.437.780007.4311.57.430007.787.4313.910/000002.56000002.56000003.06CCCCCCCNmCCC⎤⎡⎤⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥==×⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦4.6900330117306.456355.6110/7306.45rrrCmεεεεεεε−⎤⎡⎤⎡⎤⎢⎥⎢⎥⎢⎥====×⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦⎣⎦4.7333115155.215.15.212.712.7eeeee−⎤⎡⎤⎢⎥⎢⎥⎢⎥⎢⎥−⎢⎥⎢⎥==⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦N/V•m4.8x13111213121110244664400011.57.437.430007.4313.97.780007.437.7813.910/000002.56000003.06000002.56CCCCCCCNmCCC⎤⎡⎤⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥==×⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦4.9900110116355.617306.4510/7306.45rrrCmεεεεεεε−⎤⎡⎤⎡⎤⎢⎥⎢⎥⎢⎥====×⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦⎣⎦4.103131151515.15.25.212.712.7eeeee⎡⎤⎢⎥⎢⎥−⎢⎥⎢⎥⎢⎥−⎢⎥==⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎢⎥⎣⎦⎣⎦N/V•m4.11ANSYSANSYSy111312CCC⎡[]11rε⎡[][]31e⎡[]331313CCC⎡[]33rε⎡[][]33e⎡⎤[]-20-14.14.1PZT-445III1-21-2y4210.5mfLfHRR22LLHHcRnnfDDfRcλππλ≥=≥=4.12DnnnANSYSFLIUD129(2-DInfiniteFLIUD130(3-DInfiniteAcousticElement)35AcousticElement)4.2