SEREN-RF-Training-Raymond-2010

SERENIPSRFTrainingKAITEK-Raymond2YourHighQualityServiceWorkshopAgendaSERENIPS簡介電漿應用RF基本常識射頻系統配置RX01系列RF電源操作AT系列匹配器操作3YourHighQualityServiceWorkshopSERENIPS簡介4YourHighQualityServiceWorkshopAnalyticalInstrumentsCustomersThermoElectron,UK(VGElemental)ThermoElectron,Germany(FinniganMatt).VarianOSI,AustraliaJobinYvonHoriba,FranceNUInstruments,UKGBScience,AustraliaSpectro,GermanySerenIndustrialPowerSystems,Inc.5YourHighQualityServiceWorkshopOEMCustomersAppliedMaterials-PhotomaskAPTC,Veeco,Unaxis,Alcatel,Leybold,STS,AGS,AMS,JusungEng.Ltd,Hynix,Samsung,KurtLesker,Dentonvacuum,AJAInternational,USGuns,AngstromEng.,MeiVac,Anatech,Axic,AshlandChemical,BauschLomb,EMS,Seagate,Headway.SerenIndustrialPowerSystems,Inc.6YourHighQualityServiceWorkshopSerenIndustrialPowerSystems,Inc.SeeLiteratureforspecificmodels.1000/2000/3000Watts,InternalDCSwitchingSupply,180-264VAC100,300&600watts90–140VACor190–250VACMicroprocessorControlled2000–3000Watts,WaterCooled100/300/600/1000Watts,½Rack,AircoolL-01Series100-460kHz300–3000WattsSeeLiteratureforspecificmodels.“I”SeriesgeneratorsincorporateinternalDCSwitchingSupply,180-264VACOperationAnalogControlled,1600Watts@[e-mail]27.12-40.68MHz1600–2000WattsSeeLiteratureforspecificmodels.1000-5000Watts,InternalDCSwitchingSupply,180-264VAC100,300&600watts90–140VACor190–250VACMicroprocessorControlled,SolidState2000–5,000Watts,WaterCooled100/300/600/1000/1200Watts,½Rack,AircoolR-01Series1.7–40.68MHz100-5000WattsRFModuleSize:3.5”H10”W10”LExternalDCSwitchingSupply180-264VACOperationFixedandVariablefrequency27.12&40.68MHzAirorWatercooledavailableCustomRFModules1250–2500WattsProductOverview/RFGenerators7YourHighQualityServiceWorkshopR&L(01)SeriesGeneratorsSurfaceMountTechnology.Class“AB”Amplifierdesign.ReducedWeightw/InternalDCSwitcher,100–10KWPowerAccuracyandStabilityEnhancements.Aircooled@100-1000WProgrammableHighSpeedPulsing.1/2Rack100–1200WattsDualPowerRangew/highresolution.SerenIndustrialPowerSystems,Inc.8YourHighQualityServiceWorkshop“AT”SeriesTunersCompactSizeHighVoltage/CurrentLCComponentsHighVoltageMYCALEXinsulatorsutilizedPresetsforPlasmaIgnitionFourLineVacuumFlorescentDisplayDisplayGeneratorForward&ReflectedPowerSerenIndustrialPowerSystems,Inc.9YourHighQualityServiceWorkshopR&LSeries,RFGenerators:R&LSeries,RFGenerators:MeetsFCCrequirementsforISMEquipment.MeetsFCCrequirementsforISMEquipment.CEMark:EMCTestingperEN6100CEMark:EMCTestingperEN6100--66--33Dependentuponproducttype,SubDependentuponproducttype,Sub--SettestingtoEN6100SettestingtoEN6100--66--3is3istypically:typically:RadiatedEmissions(EN55011),ESD(6100RadiatedEmissions(EN55011),ESD(6100--44--2),RadiatedImmunity(610002),RadiatedImmunity(61000--44--3),3),Electricalfasttransients(EFT)onI/OElectricalfasttransients(EFT)onI/O’’s(EN6100s(EN6100--44--4),Surge(610004),Surge(61000--44--5)5)ConductedImmunity(6100ConductedImmunity(6100--44--6),MagneticField(610006),MagneticField(61000--44--8)8)SafetytestingperEN61010SafetytestingperEN61010SemiSemi––S2(MostModels)S2(MostModels)ATSeries,AutomaticMatchingNetworks:ATSeries,AutomaticMatchingNetworks:MCMC--2Controller:2Controller:CEMark,EMCandSafetyCEMark,EMCandSafetyMatchNetwork:MatchNetwork:CEMark,SafetyCEMark,Safety––EN60905EN60905CertificationsSerenIndustrialPowerSystems,Inc.10YourHighQualityServiceWorkshop電漿應用11YourHighQualityServiceWorkshop低溫電漿表面處理技術低溫電漿表面處理技術低溫電漿表面處理技術低溫電漿表面處理技術電漿系統操作壓力氣體種類氣體流量操作能量激發源頻率反應室形狀氣體系統控制系統基材系統低溫電漿表面處理技術低溫電漿表面處理技術低溫電漿表面處理技術低溫電漿表面處理技術表面清潔表面改質電漿蝕刻表面活化表面接枝電漿沈積電漿聚合Plasmasurfacetreatment應用介紹12YourHighQualityServiceWorkshopParallel-PlatePlasmaSystem13YourHighQualityServiceWorkshopParallel-PlatePlasmaSystem常用PE-CVD設計14YourHighQualityServiceWorkshopRIEwithTCPProcessPlasmaPlasmaexcitationsupplyIonextractionsupplyLowpowerdrawsreactivegasionstosubstratesHighpowerproducesdenseplasmaCEXline15YourHighQualityServiceWorkshopRF基本常識16YourHighQualityServiceWorkshopDCvs.ACRLVSSISVSISRLACConstantDCleveltime•Maintainssamepolarity•Averagevoltage≠0•Currentflowonlyinonedirection•V=I∙R•P=V∙I•Polaritychanges•VandIvarywithtime•Currentflowsinbothdirections•V(t)=I(t)∙Z•P(t)=V(t)∙I(t)•PRMS=VRMS∙IRMS•VRMS=Vp/√2(forsinewave)DC+0_currentvoltage17YourHighQualityServiceWorkshopWhatisRF?ACfrequenciesabove20kHz(audio)ACfrequenciesbelow300MHz(microwave)FCCRFfrequencyrangesLowfrequency:30kHz-300kHzMediumfrequency:300kHz-3MHzHighfrequency:3MHz-30MHzVeryhighfrequency:30MHz-300MHzManypeoplecall13.56MHz“RF”18YourHighQualityServiceWorkshopFrequencyclassifications30K300K3M30M300MHz25K100K1M2M4M13.562760M162MLFMFHFVHFFCCfrequencyclassificationLFMFHFRFVHFNote:MostRFpowersuppliesoperateat13.56MHzwhichisoneofthereservedbytheFCCforIndustrial,ScientificandMedical(ISM)use.OtherISMfrequenciesare27.12MHz,40.68MHz...and2.45GHz.19YourHighQualityServiceWorkshopRFPowerDefinitionPac=V×I×cosφφ=phaseshiftbetweenVandIForwardpower(PF)=powerfromacgeneratorReflectedpower(PR)=powerreturnedtogeneratorLoadpower(PL)=powerconsumedbyload(PF-PR)20YourHighQualityServiceWorkshopRFPowerToquantifyRFpower,weu