罗门哈斯光阻Shipley-1818-photoresist

Page1of8Revisiondate04/02/20041.PRODUCTANDCOMPANYIDENTIFICATIONMICROPOSIT™S1818™PositivePhotoresistRevisiondate:04/02/2004SupplierRohmandHaasElectronicMaterialsLLC455ForestStreetMarlborough,MA01752UnitedStatesofAmericaFornon-emergencyinformationcontact:508-481-7950EmergencytelephonenumberChemtrec800-424-9300RohmandHaasEmergency215-592-30002.COMPOSITION/INFORMATIONONINGREDIENTSComponentCAS-No.ConcentrationElectronicgradepropyleneglycolmonomethyletheracetate108-65-665.0-95.0%Mixedcresolnovolakresin30.0%Cresol1319-77-30.9%DiazoPhotoactiveCompound1.0-10.0%FluoroaliphaticPolymerEsters11114-17-31.0%3.HAZARDSIDENTIFICATIONEmergencyOverviewAppearanceFormliquidColourRedAmberOdourester-likeHazardSummaryCAUTION!Combustibleliquidandvapor.Causesirritationtoeyes,nose,andrespiratorytract.Prolonged,repeatedcontact,inhalation,ingestion,orabsorptionthroughtheskin,maycausetoxiceffectstointernalorgansystems(liver,kidney,centralnervoussystem).PotentialHealthEffectsMaterialSafetyDataSheetMICROPOSIT(TM)S1818(TM)PositivePhotoresistPage2of8Revisiondate04/02/2004PrimaryRoutesofEntry:Inhalation,ingestion,eyeandskincontact,absorption.Eyes:Maycausepain,transientirritationandsuperficialcornealeffects.Skin:Materialmaycauseirritation.Prolongedorrepeatedexposuremayhavethefollowingeffects:drowsinessdefattinganddryingoftheskinwhichcanleadtoirritationanddermatitiscentralnervoussystemdepressionkidneydamageliverdamageIngestion:Swallowingmayhavethefollowingeffects:irritationofmouth,throatanddigestivetractheadachenauseavomitingRepeateddosesmayhavethefollowingeffects:centralnervoussystemdepressionliverdamagekidneydamageInhalation:Inhalationmayhavethefollowingeffects:irritationofnose,throatandrespiratorytractHigherconcentrationsmayhavethefollowingeffects:systemiceffectssimilartothoseresultingfromingestionTargetOrgans:EyeRespiratorySystemnervoussystemLiverKidneySkinCarcinogenicityNotconsideredcarcinogenicbyNTP,IARC,andOSHA4.FIRSTAIDMEASURESInhalation:Removefromexposure.Ifthereisdifficultyinbreathing,giveoxygen.Seekmedicalattentionifsymptomspersist.Skincontact:Washskinwithwater.Continuewashingforatleast15minutes.Obtainmedicalattentionifblisteringoccursorrednesspersists.Eyecontact:Immediatelyflushtheeyewithplentyofwaterforatleast15minutes,holdingtheeyeopen.Obtainmedicalattentionifsorenessorrednesspersists.Ingestion:Washoutmouthwithwater.Havevictimdrink1-3glassesofwatertodilutestomachcontents.Inducevomitingifpersonisconscious.ImmediatemedicalattentionisrequiredNeveradministeranythingbymouthifavictimislosingconciousness,isunconciousorisconvulsing.NotestophysicianMICROPOSIT(TM)S1818(TM)PositivePhotoresistPage3of8Revisiondate04/02/2004Treatsymptomatically.5.FIRE-FIGHTINGMEASURESFlashpoint40-46°C(104-115°F)Suitableextinguishingmedia:Usewaterspray,foam,drychemicalorcarbondioxide.Keepcontainersandsurroundingscoolwithwaterspray.Specifichazardsduringfirefighting:Thisproductmaygiverisetohazardousvaporsinafire.Vaporscantravelaconsiderabledistancetoasourceofignitionandresultinflashback.Specialprotectiveequipmentforfire-fighters:Wearfullprotectiveclothingandself-containedbreathingapparatus.Furtherinformation:Pressuremaybuildupinclosedcontainerswithpossibleliberationofcombustiblevapors.6.ACCIDENTALRELEASEMEASURESPersonalprecautionsWearsuitableprotectiveclothing.Wearrespiratoryprotection.Eliminateallignitionsources.EnvironmentalprecautionsPreventthematerialfromenteringdrainsorwatercourses.Donotdischargedirectlytoawatersource.AdviseAuthoritiesifspillagehasenteredwatercourseorsewerorhascontaminatedsoilorvegetation.MethodsforcleaningupContainspillsimmediatelywithinertmaterials(e.g.,sand,earth).Transferintosuitablecontainersforrecoveryordisposal.Finallyflushareawithplentyofwater.7.HANDLINGANDSTORAGEHandlingUselocalexhaustventilation.Avoidcontactwitheyes,skinandclothing.Keepcontainertightlyclosed.Furtherinformationonstorageconditions:Proprietaryphotoresistfilmcontainsapproximately2-4%of2,3,4-trihydroxybenzophenone(THBP),whichmaysublimeduringsoft-bakeorhard-bakeprocessing.THBPhaslowacutetoxicity(LD505g/kg).Contactwitheyes,skinormucousmembranescauseirritation.TopreventaccumulationofTHBPonequipmentsurfacesandventilationducts,preventativemaintenanceprogramincludingregularcleaningshouldbeimplemented.Wipesurfacesusinganappropriatecleaningsolventwhenpossible.Provideadequategeneralorlocalexhaustventilationduringthecleaningprocess.Insituationswherethisisnotpossibleorwheresolventordustconcentrationsbecomeexcessive,useanairpurifyingrespiratorwithanorganicvapor/toxicparticulatecartridge.WhencleaningresidualTHBP,wearprotectiveglovesandadequateprotectiveclothingtopreventskincontact.Practicegoodpersonalhygienetopreventaccidentalexposure.Cleanallprotectiveclothingandequipmentthoroughlyaftereachuse.MICROPOSIT(TM)S1818(TM)PositivePhotoresistPage4of8Revisiondate04/02/2004StorageStorageconditions:Storeinoriginalcontainer.Keepawayfromheatandsourcesofignition.Storageareashouldbe:cooldrywellventilatedoutofdirectsunlight8.EXPOSURECONTROLS/PERSONALPROTECTIONExposurelimit(s)Exposurelimitsarel