III俄歇电子能谱(AES)

III(AES)AES....................................................................................................3............................................................................................7..............................................................................................................11..............................................................................................................12..................................................................................................141.............................................................................................................142.............................................................................................................18(DepthProfile).................................................................21....................................................................................................................25(ElectronSpectroscopy)3-2(AES)3-3PierreAuger1922192330P.Auger—X——(Auger)AES1.(AugerEffect)2,3'LEKL1(EEKL−1)X(XPS)(AES),(ElectronSpectroscopy)3-4XW≠XW=X≠YC-K(Coster-Kronig)(pi)L1L2MW=X=YC-K(piqi)N5N6N6KLMKKLLKLMKMM…KLLKL1L1KL1L2KL1L3KL2L2KL2L3…KL-M-L-M-KLLL-S5jj69HHeWiXpYq(i,p,q):WiXpYq4f7/24f5/24d5/24d3/24p3/24p1/24s1/23d5/23d3/23p3/23p1/23s1/22p3/22p1/22s1/21s1/2KLMNLLMMMMNNNNNN111222333445567XEVYXW(AES)3-52.:EWXY=EW–EX–EY−ΦZWXYWXY():EZEZEZEZWXYWX()()()()=−−′YEZEZEZYYY()()()′+1∴′=++−EZEZEZEZYYYY()()[()()]β1:β0β1EZEZEZEZEZEZWXYWXYYY()()()()[()()]=−−−+−β1(1)WXYWYXEZEZWXYWYX()()=XYEZEZEZEZEZEZWYXWYXXX()()()()[()()]=−−−+−β1(2)(1)(2)β=β′=1EZEZEZEZEZEZEZWXYWYXWXXYY()()(){()()}{()()}==−++−++121211(3)()()()(){}()(){}EZEZEZEZEZEZWXYWXXYYS=−++−++−121211Φ(4)ΦSEFEF=0:()()()(){}()(){}EZEZEZEZEZEZWXYWXXYYSp=−++−++−121211Φ(5)EF=0YXWEFEWXY'EWXY'ΦΦssp(ElectronSpectroscopy)3-6(AES)3-7():(1);(2);(3)1.A+ep→A+*+2e−(—)()EpBornWWorthington-Tomlin:QabEUUeWWWWU=×⋅⋅+−−65110141652351421.(ln..)QfEEEWPWW∝2QW(cm2)EWW(eV)U=EP/EWaWbW:W=K:aW=0.35bW=2W=L:aW=0.25bW=8W=M:aW=0.25bW=18bWQWUEPEWU≈3-5QWEWEW10-310-4(ElectronSpectroscopy)3-82.:PxPaPx+Pa=1KE.H.S.Burhop:13−=++PPABZCZaanA.H.Wapstra:n=1/4A=-6.410-2B=3.4010-2C=-1.0310-6PaPxZZ19Pa90%Z=33PxPaZZ(K,L,M…)Z15KPx5%0KLLLMMMNNZ15Z=41LZKZ3(Li)13(Al)LZ11(Na)35(Br)MZ19(K)70(Yb)NZ39(Y)94(Pu)ZKLLLMMMNN……WXYXYXYW1KLLLMMMNNNOO00.20.40.60.81YieldperK-electronvacancy05101520253035Atomicnumber(Z)AugerelectronyieldX-Rayyield(AES)3-93.(attenuationlength)(escapedepth)()NdzdNdNNdzdNNdz=−1λ∴NNez=−0λλ30%3λ5%θ3λcosθλλcosθλ4.EP3-30keV10nmEWWrMrMItotal=I0+IM=I0(1+rM)EW(ElectronSpectroscopy)3-101+rM=1+2.8[1–0.9EW/EP]×η(Z)EWEPη(Z)=–0.025+0.16Z–0.00186Z2+8.3×10-7Z35.:cos(1)APiWWXYMIISecnQPrTRαλθ=⋅⋅⋅⋅⋅⋅+⋅⋅:IPαniQWWPWXYWXYλcosθrMTRR≤1(AES)3-11(1)(2)SiL2,3VV(3)XPS()AESAESAESXPSAESXPS(eV)LiKVV5240NaL23VV22,2719,23MgL23VV34,4532AlL23VV6855SiL23VV9278TiM23VV2840VM23VV2725CrM23VV3529,43MnM23VV4035,46FeM23VV4642,51(ElectronSpectroscopy)3-12()1(i)W,W(Ir)LaB6–(ii)(FEG)–()W1µmLaB6FEG20nm20~30keV2AES(CMA)(CHA)CMACHA(CHA)()(CylindricalMirrorAnalyzer)(AES)3-133.AES(Pointanalysis)(Linescan)(Mapping)(Profiling)4.XPSXPS0.1~1%5nm.5.AESAES1µmWindowUV6.(Heating)(ESD)(ElectronSpectroscopy)3-141.AESPerkin-ElmereVFeLMMAES:;;;;AESAESXPSXPSAESAESXPSAES(AES)3-15()(1).:(a)(Li,Be,Na,Mg,Al,Si,K,Ca,Sc,Ti,V,Cr,Mn,Fe,Co,Ni,Cu,Zn,Ga,(b)(B,C,N,O,F,P,S,Cl,Br,I,Ne,Ar,Kr,Xe,(c)(d)(2).AES(a)550–(b)Cr(c)AES/(d)(ElectronSpectroscopy)3-16AES3.5%Ni,1.6%Cr,0.4%C,300ppmSb()Sb0.1%TiSbW–825AESP–PPP2nm(e)VGaAsGaM1M45VGaGa(3)(a)dNEdE()Ni(110)(b)AES4.9%50%Ni-50%AlAESAESNi(4)(AES)3-17AES(a)(c)-ICpadstrippingtroubleanalysisAnalysisoforganicfilmstrippingtroubleonAlplate(ElectronSpectroscopy)3-182.AES-(),,,,cos1()iWXYPiiWiWXYiWXYMIISecnQPrTERαλθ=⋅⋅⋅⋅⋅⋅+⋅⋅i:Cnniijj=∑Ii,WXY:Ag(351eVMNN)iAgIiWXYstd,IAgMNNstd,SIIiiWXYstdAgMNNstd=,,SiiSiiCISISISISiiWXYijWXYjjiijjjij==∑∑,(),()30%(AES)3-19(ElectronSpectroscopy)3-20304AES:Fe(703eV)Cr(529eV)Ni(848eV)1010,4701500.200.290.27[]10100.200.7010100.204700.291500.274700.290.2210100.204700.291500.271500.270.0810100.204700.291500.27FeCrNiCCC==++==++==++CCCFeCrNi===070202050093.,.,.AES(AES)3-21(DepthProfile)1.1≤3nm2≤200nmAESAES(Crater)AES(Ar+Ne+)zSjeNMA=⋅⋅1ρ[cm/Sec.]S=(/)j=A/cm2)e=NA=Avogadro'sρ=g/cm3;M=(ElectronSpectroscopy)3-22SiOSiCrNiSputteringtimeCrNiCrSiC(Z)g(Z-Z’)I(Z)I(Z):()()()IZCZgZZdZ=′⋅−′′−∞+∞∫g(Z-Z’)C(Z)XPS/AES3≤20µmDepthprofilingofAngleLap/LineAnalysis(AES)3-23Au/Cr/SiLayer-by-layer,3D-islands,Alloying.2.(SAM)(ScanningAugerMicroprobe)SAM20nmAES+SEM=SAM:0(Pointanalysis)xyE1(Linescan)yEx2(Areamap)Exy(ElectronSpectroscopy)3-24a)SEMb)SAMFeLMMc)SAMOKLLd)SAMCKLL3.SAM(AES)3-25AES()HHeXPSAESAESCMAXPS(XCHA)LEED(RFA)XPSHHeZ1%(SAM)1µm(5nm)XXPS//1.2.AES304FeCrNiLMM10104701500.20.290.27FeCrNi