I电子能谱分析基础

1-1I........................................................................................3....................................................................................................5........................................................................................7..................................................................................10..............................................................................................12......................................................................................13(ElectronSpectroscopy)1-21-3()XX()XXUppsalaKaiSiegbahnXKaiSiegbahn19811923PierreAugerX()(hν45eV)DavidTurnerEp(Feimi)EfElEp’El=Ep-Ep’XPSAES(XPSUPS)(AES)(ElectronSpectroscopy)1-4X(XPS)(AES)12CNSi1sC~285eVN~400eVSi~1840eVCNSiKLLC~264eVN~380eVSi~1617eV3451~10nm()1nm(1)(adhesion)(migration)(2)(3)(4)(5)()(6)——(7)——1-5(UHV),90%2∼10(0.5∼3nm)(ElectronSpectroscopy)1-610∼100nm100nm(100nm)()(DOS)1-7XX(~1µm)1~48nmIMFP(λ)—(nm)ED—e-1(38%)(nm)AT—(nm)ID—(nm)SD—=3λ95%100∼1000eV2∼3nm10dI=-Iλ-1dx()IIx=−0exp/λ()0000exp/NIdxIxdxIλλ∞==−=⋅∫∫0∼λ⇒65%0∼3λ⇒95%θλsin3⋅=dθ(ElectronSpectroscopy)1-8M.P.SeahW.A.Dench(1979)λ=⋅⋅+⋅⋅−53804123212aEaE.//[nm]λ=⋅⋅+⋅⋅−217007223212aEaE.//[nm]()λρ=+−49011212EE.[nm]1-9EeVρ[kgm-3]aMNA=100013ρ/[nm]S.Tanuma,C.J.PowellD.R.Penn(1994)Bethe2714(TPP-2M)(E=50~2000eV)()22lnpECDEEEEλβγ=−+[Å]28.8pVENMρ=:220.50.10.100.944()0.069pgEEβρ−=−+++γ=0.191ρ−0.5C=1.97−0.91UD=53.4−20.8UU=NVρ⁄M=2829.4pENV:;M:;ρgcm-3;Eg(ElectronSpectroscopy)1-101(UHV)AESXPSX10-710-8torr(~1µm)1t≈10-6⁄p(s)10-6torrp=10-10torrt≈1040.1%(UHV)p=10-8–10-11torr.λ=∼104–107m.t=∼102–105s.2(Vacuum)XHVUHVVHVHVMV10-1410-1110-810-610-21(torr):Pumpp(torr)Rotaryvane/Mechanical1000-10-3SorptionOF1000-10-3Oilvapordiffusion*10-3-10-8Turbomolecular*(OF)10-3-10-10Sputter/IonOF10-4-10-11Sublimation/GetterOF10-8-10-11*requiresbackingpumpOFclean1-113-O∼10-7torr(Viton,Buna)150°C10-13torr3(gauges):Gaugep(torr)CapacitancemanometerA10-5ThermocoupleG~10-10-4PiraniG~102-10-5IonizationG~10-3-10-11MassspectrometerG~10-4-10-14Aabsolute-simple,accurateGgasdependent-complex,lowpressure(ElectronSpectroscopy)1-1212L-S3n=1,2,3,4,K,L,M,Nl=0,1,2,3,,(n-1)s,p,d,fspn,l,j4f7/24f5/24d5/24d3/24p3/24p1/24s1/23d5/23d3/23p3/23p1/23s1/22p3/22p1/22s1/21s1/2KLMNLLMMMMNNNNNN111222333445567XNLjAESXPS101/2K1s1/201/2L12s1/21/2L22p1/2213/2L32p3/201/2M13s1/21/2M23p1/213/2M33p3/23/2M43d3/2325/2M53d5/201/2N14s1/21/2N24p1/213/2N34p3/23/2N44d3/225/2N54d5/25/2N64f5/2437/2N74f7/2501/2O15s1/21-13()()(plasmon)(phonon)(exciton)(Ep500eV)(Ep1keV)XGpGpX-rayγatome-X-rayepatome-ionX-rayionione-atom(ElectronSpectroscopy)1-14XXY[]1.