集成电路工艺原理试卷A

relationship,establishedequivalentrelationship14,andsubject:applicationproblem(4)--scoresandpercentageapplicationproblemreviewcontentoverviewanswersscores,andpercentageapplicationproblemofkeyis:accordingtomeaning,(1)determinestandardvolume(units1)(2)findassociatevolumeratecorrespondstorelationship,Thenin-linesolution.CategoryfractionmultiplicationwordproblemscoreDivisionapplicationsengineeringproblemproblemXV,asubject:reviewofthemeasurementoftheamountofcapacity,measurementandunitsofmeasurementofcommonunitsofmeasurementandtheirsignificanceinrate1,currency,length,area,volume,unitsize,volume,weightandrate.(Omitted)2,commonlyusedtimeunitsandtheirrelationships.(Slightly)withameasurementunitsZhijianofofpoly1,andofmethod2,andpolymethod3,andofmethodandpolymethodofrelationshipmeasurementdistanceofmethod1,andtoolmeasurement2,andestimates16,andsubject:geometrypreliminaryknowledge(1)--lineandanglereviewcontentline,andsegment,andRay,andvertical,andparallel,andangleangleofclassification(slightly)17,andsubject:geometrypreliminaryknowledge(2)--planegraphicsreviewcontenttriangle,andedgesshaped,andround,andfanaxisymmetricgraphicsperimeterandareacombinationgraphicsofareasubject:Preliminaryknowledge(3)-reviewofsolidcontentcategory1-dshapesaredividedinto:cylinderandcone2,columnisdividedinto:cuboid,square3,coneconeofthefeaturesofcuboidsandcubesrelationshipbetweencharacteristicsofcircularconeisslightlysolidsurfaceareaandvolume1,size2,table...和和平与发展是当今世界发展的主题，中国作为屹立在世界东方的大国，要担负起重要的责任。从“亚太自由贸易区”到“亚投行”、“一带一路”，再到G20峰会，都体现出中国一个负责任的大国形象。电子科技大学2012-2013学年第二学期期末考试A卷课程名称：集成电路工艺考试形式：闭卷考试日期：2013年05月13日考试时长：120分钟课程成绩构成：平时30%，期中%，实验%，期末70%本试卷试题由4部分构成，共6页。题号一二三四合计得分一、填空题（共12分，共6题，每题2分）1、集成电路是把电阻、电容、二极管、晶体管等多个元器件制作在上，并具有的电路。2、集成电路的发展趋势：芯片性能不断提高；芯片可靠性；芯片成本。3、在硅的热氧化中，三种氧化方式的氧化速率不同，其中干氧氧化速率湿氧氧化速率；水汽氧化速率湿氧氧化速率。4、在半导体硅中，掺入化学元素B杂质形成型半导体，掺入化学元素P形成型半导体。5、LPCVD的意思是，Poly-Si的意思是。6、STI的意思是，FOX的意思是。二、简答题（共56分）1、请描述硅的热氧化；并回答硅热氧化的工艺目的。（8分）得分得分relationship,establishedequivalentrelationship14,andsubject:applicationproblem(4)--scoresandpercentageapplicationproblemreviewcontentoverviewanswersscores,andpercentageapplicationproblemofkeyis:accordingtomeaning,(1)determinestandardvolume(units1)(2)findassociatevolumeratecorrespondstorelationship,Thenin-linesolution.CategoryfractionmultiplicationwordproblemscoreDivisionapplicationsengineeringproblemproblemXV,asubject:reviewofthemeasurementoftheamountofcapacity,measurementandunitsofmeasurementofcommonunitsofmeasurementandtheirsignificanceinrate1,currency,length,area,volume,unitsize,volume,weightandrate.(Omitted)2,commonlyusedtimeunitsandtheirrelationships.(Slightly)withameasurementunitsZhijianofofpoly1,andofmethod2,andpolymethod3,andofmethodandpolymethodofrelationshipmeasurementdistanceofmethod1,andtoolmeasurement2,andestimates16,andsubject:geometrypreliminaryknowledge(1)--lineandanglereviewcontentline,andsegment,andRay,andvertical,andparallel,andangleangleofclassification(slightly)17,andsubject:geometrypreliminaryknowledge(2)--planegraphicsreviewcontenttriangle,andedgesshaped,andround,andfanaxisymmetricgraphicsperimeterandareacombinationgraphicsofareasubject:Preliminaryknowledge(3)-reviewofsolidcontentcategory1-dshapesaredividedinto:cylinderandcone2,columnisdividedinto:cuboid,square3,coneconeofthefeaturesofcuboidsandcubesrelationshipbetweencharacteristicsofcircularconeisslightlysolidsurfaceareaandvolume1,size2,table...和和平与发展是当今世界发展的主题，中国作为屹立在世界东方的大国，要担负起重要的责任。从“亚太自由贸易区”到“亚投行”、“一带一路”，再到G20峰会，都体现出中国一个负责任的大国形象。2、请回答离子注入的概念。（8分）3、请回答光刻的概念及光刻胶的用途。（8分）4、请写出干法刻蚀过程（8个步骤）。（8分）5、请回答PECVD的概念，并写出PECVDSiO2的化学反应式及沉积温度（注：使用硅烷SiH4）。（8分）relationship,establishedequivalentrelationship14,andsubject:applicationproblem(4)--scoresandpercentageapplicationproblemreviewcontentoverviewanswersscores,andpercentageapplicationproblemofkeyis:accordingtomeaning,(1)determinestandardvolume(units1)(2)findassociatevolumeratecorrespondstorelationship,Thenin-linesolution.CategoryfractionmultiplicationwordproblemscoreDivisionapplicationsengineeringproblemproblemXV,asubject:reviewofthemeasurementoftheamountofcapacity,measurementandunitsofmeasurementofcommonunitsofmeasurementandtheirsignificanceinrate1,currency,length,area,volume,unitsize,volume,weightandrate.(Omitted)2,commonlyusedtimeunitsandtheirrelationships.(Slightly)withameasurementunitsZhijianofofpoly1,andofmethod2,andpolymethod3,andofmethodandpolymethodofrelationshipmeasurementdistanceofmethod1,andtoolmeasurement2,andestimates16,andsubject:geometrypreliminaryknowledge(1)--lineandanglereviewcontentline,andsegment,andRay,andvertical,andparallel,andangleangleofclassification(slightly)17,andsubject:geometrypreliminaryknowledge(2)--planegraphicsreviewcontenttriangle,andedgesshaped,andround,andfanaxisymmetricgraphicsperimeterandareacombinationgraphicsofareasubject:Preliminaryknowledge(3)-reviewofsolidcontentcategory1-dshapesaredividedinto:cylinderandcone2,columnisdividedinto:cuboid,square3,coneconeofthefeaturesofcuboidsandcubesrelationshipbetweencharacteristicsofcircularconeisslightlysolidsurfaceareaandvolume