基于CAD和CAM的AFM和STM机电装置的故障诊断和设计研

CADCAMAFMSTM31,1,1,2,1(11,300072;21,300072):CADCAM,SPM,SPMCAMSPM,SPM,SPM;,SPM:AFM;STM;SPM;CAD;CAM;;:TP20613:A:1001-3881(2005)7-180-3DefaultDiagnosisandDesignResearchofMechatronicsDevicewithAFMandSTMBasedontheCADandCAMTechnologyZHANGZhen2yu1,LIHong2qi1,LIUMei2hua1,ZHOUHong2xiu2,WANGJing1(11DepartmentofMechanics,TianjinUniversity,Tianjin300072,China;21StateKeyLaboratoryofEngineCombustion,TianjinUniversity,Tianjin300072,China)Abstract:FailurereasonofSPMwaspresentedwithsolidmodelingtechnologyofCADandCAMandsimulatingresearchofworkconditionsofSPM1AnoveleccentrichoistingdevicewasdesignedadaptingtotheSPMthroughtheCAMtechnology,whichincreasedthemeasuringheight1Atthesametime,akindofoverloadprotectionpartswasproposedbytheCAMtechnology1Thefailureproblematmeasuringhighersampleswasresolvedbyaboveinstruments1Keywords:AFM;STM;SPM;CAD;CAM;Faultdiagnosis;Design0(SPM)2050J1A1OKeefe1982,BinnigRohrerSPM-(STM)[1],1986,BinnigQuate,1986[2]SPMAFMSTM,AFMSTM,11987,STMAFM[3],AFMSTMAFMSTM,,STMAFMCSPM-930b,,,,,,,SPM,,,,,2CADCAM,(CAD)(CAM)CADCAM,11,,,,,3CAD3111,,1,,,,,,,,CAD1108120051No173:()419mm,015mm,014mm,4mm,4mm,,23mm,,,,,,,,,015mm,,015mm,,,4CAM,,,,CAM411AFMSTM,,,AFM18120051No17STM,,,,AFMSTM,AFMSTM,88AFMSTM,,,,,,,,AFMSTM,,,AFMSTM,,,,,,,3,AFMSTM,,,412CAMCAM15mm,9915mm,CAM,,10,,9,11,,121212,,,,55mm,13,,,141515413CAM,STMAFM,16,,(166)28120051No17215(MAS)(MAS)22MAS3,,()()(),[7],,,,,,,,,,,,theObjectManagerGroup(OMG)4,,,(JA2VA),1RobertoA1Flores-Mendes1zTowardstheStandardizationofMulti-AgentSystemArchitectures:AnOverview.In2telligentAgent,AssociationforComputerMachiner2y1Issue514,Summer1999:182412,,1Agent1,2001,29(2)13,1Agent1,2000,22(6)14,,11,2001,30(4)15BratmanM1Intentions,PlansandPracticalReasoning.Har2vardUniv1Press,Cambridge,MA,198716,1AgentBDI1,1999,10(12)17,,,11,2001,23(1):85901:2004-03-29(182),,17181918,,,,,,CAM,,,195CADCAMSPM,CAM,CADCAMSPM1BinnigG1,RohrerH11Appl1Phys1Lett1,1981,40:17818112BinnigG1,QuateC1F1,GerberCh11Phys1Rev1Lett1,1986,56:9309331311:2004-03-2966120051No17