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!!!!!!!!!!!!#$%&’()*++,-..,-/0..12.32-.+0..12--2-456*7+8++9:.;+6*78+85999=5?1:05)5-...2:4-3’0..@/.:2:[e-mail]$CDEFGHIGJJKLMNFOKDPEQGNDMGLHRGQSNL#$%TKURJEQNLP6)VWXYZ[\YWV]^X\Y_‘\Ya*bcdYae‘dYafb?g[h_‘X’ijklmlnlopqrsotlupjmtvwx+ymzm{j|jm}oukml~+ym'{j+,-..,-+vHN/BbPQLEHQ5)Yhvdl;yY\mXemXlldrehmpdYs\tXhYeXre[Xtw\s;dvdlhpd;XYt‘Xsp\pdrthshlvdt‘dst\bXlXtyprhbldmhflhw;rhph[trda[l\thrs’6*7s/.(hmp\rd;wXt‘ehYvdYtXhY\lmdt‘h;s+Xtkddpst‘db\Y;wX;t‘st\bldthXmprhvdt‘dpdrfhrm\Yedhftr\YsXdYtrdsphYsdard\tly+\Y;XYerd\sdst‘dhpdYlhhpa\XYby:.;\tt‘ds\mdtXmd+w‘Xe‘m\kdst‘d6*7‘\vd‘Xa‘drlXYdrda[l\tXhY\Y;lh\;rda[l\tXhYspdeXfXe\tXhY.)YV(w\sf\brXe\td;w‘Xe‘prhvd;t‘dv\lX;Xty\Y;fd\sXbXlXtyhft‘Xsmdt‘h;.KKCwNLdP5#$%LKURJEQNLP9dCDEFGHFGJJKLHNFOKDPEQGND9PQEbGJGQC9=I%SHEOEHGQNLEEBMM50@,.*-、cfRR、、+(M7f6*78+6*7[-]8+6*7[0]8+8]fR+86*7、、+80@:0..@4R]f])R(H&cR7GR]ff7Fff]Vhl.0@+?h.:)[a.+0..@&]2m\Xl5xZl\X@m\Xl.xX;X\Y.d;[[e-mail]2LDOLDO1,g1、g2、buffer[3]。,LDO(g2),g2。buffer,g1,。,:V0=A1+AFVREF≈1FVREF(1)A=g1g2Ro1Ro,F=RF2RF1+RF2Ro≈Ro2∥RL,Ro1Ro2g1g2,RLLDO。1LDOFig.1BlockdiagramoftraditionalLDOCC。RCg2/CC[4],:H(s)=-A。(1+s/ω1)(1+s/ω2)(2)ω1=1g2R0R01CC,ω2=g2CL:GBW=g1CC(3),ω2》ω1;,,g2Ro,,ω1ω2,。CC,。,,buffer,。[5],LDO:ΔVoΔIo=Ro21+AF(4)ΔVoΔVi=RLRL+Rds·11+AF(5)Rdsg2()。g1,AF,LDO,。32。g1、g2g3,A=g1g2g3Ro1Ro2Ro,Ro≈Ro3∥RL。,30dB,LDO。2LDOFig.2LDOwithdynamicmillercompensationg2、bufferCC,RCbuffer。g2,。,Cp2Ro21/(Cp2Ro2)g2/Cp2。g2,g2/Cp20dB,。bufferCC,,。CCPMOS,68325,bufferRCV1LDO,CCV1。,:H(s)=A(1+s/ωz)(1+ωp1)(1+s/ωp2)(6)ωz=1RCCC,ωp1=1R0CLωp2=1g2Ro2Ro1CC,ωzωp1ωp2。33Fig.3Gain-frequencycharacteroftheopenloop,,ωp1;,ωp2。0dB,。,。4,2.5V,300mA,0.005%/V,0.001%/mA,CMOSLDO,4。g1OTA,VREFVFB,Vo1。,PMOS[4]。OTA:A1=gm5(rds-m2∥rds-m9)=2gm5(λm2+λm9)Ibias=2upCox(W/L)へm5(λm2+λm9)/Iへbias=40dB(7)4LDOFig.4DetailedcircuitoftheLDOwithdynamicmillercompensation7833:LDO:ro1=2(λm2+λm9)Ibias(8)g2,M13,M14,Vo2。:A2=gm13/[(λm13+λm14)Im14]=30dB(9)g3Mp1。,600kΩ,MP14µA。0300mA,27dB14dB。2.5V,VREF1.25V,F=0.5-6dB。,AF78dB,LDO。buffer4。M20～M22,,M22M21W/L,M22M21,VSG-M21≈VSG-M22≈VTH,M20Vout。M20MP1,。,,M24M19,M27;,M24M19,M27MP1,。,g2Vo2,M20M21,M23M25,M25。vbovo2=gM20gM23×gM25gM26≈1,2buffer。rob≈1gM26∝1Iへload,2RC。4,PMOSM12。,PMOS、S,G,[6]。VGS,N,PMOS(5)。tOX,COX。VGS,,,。,COXCdep。,VGSVTH,-,COX。6。5PMOSFig.5PMOSworkinginaccumulatingregion6PMOS-Fig.6Capacitance-voltagecharacterofPMOS4,M25IC2=Iloadk,k,M26,M12VG-M12=VCC-VTH-2Iloadへ/kupCOX(LW)M26(10)g2,M13,:ΔVGS=-k'Iへload(11),k'=2upCOXへk(LW)M26,M1216088325µm×60µm,LDO,VGS0V-0.8V,12pF6.5pF。,42,LDO。50.5µmCMOS,,7。7LDOFig.7LayoutofLDOwithdynamicmillercompensation1mA300mA,0dB70kHz100kHz,60º,8。,2.2µF,1µs、300mA,Vo50mV,。9。6LDO,。、、,8(a);(b)Fig.8(a)Frequencyresponseofthemagnitudeoftheclosedloopgain;(b)Frequencyresponseofthephaseoftheclosedloopgain9Fig.9LoadtransientresponseLDO。9833:LDO、,HYNIX0.005%/V,0.001%/mA,0dB70kHz,50mV,CMOSLDO。[1]SelectingLDOLinearRegulatorsforCellphoneDesigns.ApplicationNote898,MaximIntegratedProducts,Dec26,2001[2]KaChunKwok,PhilipKTMok.Pole-ZeroTrackingFrequencyCompensationforLowDropoutRegulator[A].IEEEInternationalSymposiumonCircuitsandSystems[C].Scottsdale,Arizona,USA,2002;4:735-738[3]WeiChen,Wing-HungKi,PhilipKTMok.Dual-loopFeedbakcforFastLowDropoutRegulators[A].IEEEPowerElecSpecialistConfVancouver[C].Canada,June2001:1265-1269[4]PhillipEAllen,DouglasRHolberg.CMOSAnalogCircuitDesign[M].PHEI,2002:269-439[5]TomKugelstadt.FundamentalTheoryofPMOSLow-dropoutVoltageRegulators,ApplicationReport,TexasInstrumetns[6]BehzadRazavi.DesignofAnalogCMOSIntegratedCircuits[M].McGraw-Hill,2001:9-39(LAIXinquan),1963,。1998。、VLSI、CMOS。30。(XIEJianzhang),1975,,================================================================llll。mnmo(,,210016)2005-03-31mnmompqrstuvwxwyszu{srZHUJianYUYuanweiZHANGYongJIAShixing(|}~ji~gElectro~icDevicesI~stitute,|}~ji~g,210016,CH|)Q180MEMS。SIW()。NRD()。ICPMEMS。CPW。TE101,K。Agilent8510C,:3.5dB,1.7%,Q180,2.5%。4.7mm×4.6mm×0.5mm。MEMS、Q、,,、、。,2002(Q=70),Q。09325