磁控溅射Al膜的AFM性能分析及其制备工艺研究

27820078PHYSICSEXPERIMENTATIONVol.27No.8Aug.,2007:2007203216;:2007205208:(1985-),,,2004.:(1961-),,,,.AlAFM,,,,,,,(,510640):(AFM).:,.:;;;;AFM:O484:A:100524642(2007)08200422051,,,30,.,,.,.,[13].,,[4].,,.,.AFM,.2:,.JPG2500.CSPM4000:AFM.imager.,imager,,.2.1:8.910-3Pa,Ar,3.8Pa,2.010-2L/min,20min.,200W,220W,260W,AlAFM[5]12.,AFM[6]12.:55.(a)P=200W(b)P=220W(c)P=260W1AlAFM(a)P=200W(b)P=220W(c)P=260W2AlAFM1P/W/nm/nm/nm20024.630.617822026.934.220326036.746.22462P/W/nm2001642201762601962.2:4.110-4Pa,Ar,3.8Pa,2.210-2L/min,389.0W.[7],,10min15min,AlAFM34.,AFM34.(a)t=15min(b)t=10min3AlAFM348,:AlAFM(a)t=15min(b)t=10min4AlAFM3t/min/nm/nm/nm1527.739.43011017.823.41794t/min/nm/nm2/nm2/nm2152064.201054.521041.33105101682.921052.711048.8910433.1,,:1)55,,.2)ima2ger:316nm2,10nm,2.11103nm2,2.77nm2.,,.5No./nm/nm/nm13.133.0915.622.942.7514.432.992.8113.442.942.6011.052.962.7411.63),,.4).,,,,,,,.3.21),,,,,[8].2),,,.3)12,,.3.31),,.2).,,,,.3)34,,.44273.442AFM,4(a),.,,5.(a)t=15min(b)t=10min5AlAFM,6.6,2,,.6Alt/min/nm/nm/nm1516.321.21501015.719.7123:,,,,,4.4,..:,,;,,.,,;,.:[1].[J].,2005,33(6):7376.[2].()[J].,2005,(5):15.[3].()[J].,2005,(6):510.[4],.[J].,1999,35(5):14.[5],.(AFM)[J].,2005,33(1):79.[6],,.[J].,2003,25(4):2530.[7],,,.[J].,2005,25(12):1114.[8],,,.[J].,2000,29(6):394397.548,:AlAFMTechnologicalstudyonAlfilmpreparedbymagnetronsputteringusingAFMHEJian2mei,WENLang2ming,ZHANGChen,ZHANGXun,ZHENGXi2xin,ZHUANGWei2pei,ZHANGHong,XUHai2hong(SchoolofPhysics,SouthChinaUniversityofTechnology,Guangzhou510640,China)Abstract:TheroughnessandgranularityofAlfilmpreparedbyDCandRFmagnetronsputteringareanalyzedusingAFM.TheexperimentalresultsindicatethatthesurfaceroughnessofAlfilmpre2paredbyDCsputteringisbiggerthanthoseofAlfilmspreparedbyRFsputtering,andtheaveragegranulediameterincreaseswithlongsputteringtimeandlargesputteringpower.Keywords:Alfilm;surfaceroughness;sputteringpower;sputteringtime;AFM[:](39)ComparingdifferentmethodsofmeasuringthermalconductivityofgoodconductorXIAZhang2gen,ZHULian2gen,QIAOWei2ping,WANGJin2hui(DepartmentofPhysics,ShanghaiJiaoTongUniversity,Shanghai200240,China)Abstract:AccordingtothelawofWiedemann2Franz,theratioofthermalconductivityandelectri2calconductivityofmetalisconstant.Inthispaper,theelectricalconductivityofthematerialismeas2uredatacertaintemperature,thenthethermalconductivityofthematerialiscalculatedbasedontheresistivity,theresultissimilartothatobtainedusingthermal2wavemethod.Keywords:thermalconductivity;electricalconductivity;lawofWiedemann2Franz;goodconduc2tor[:](41)PrincipleanalysisofmeasuringtheYoungmodulusofcylinderWANGKai(SichuanUniversityofArtsandScience,Dazhou635000,China)Abstract:TheexperimentalprincipleofmeasuringYoungmodulusofcylinderisanalyzedandthetheoreticalformulaisobtained.TheshapesofsamplesinexperimentsofmeasuringYoungmodulusofstretchingdeformation,bendingdeformationandshearmodulusoftwistingdeformationaresupposedtobecylinder.Keywords:cylinder;Youngmodulus;shearmodulus[:]6427