超精密非球面镜面模具直轴磨削的研究

14420068OpticsandPrecisionEngineeringVol.14No.4Aug.2006:2005211218;:2006206217.:;(No.852719227)10042924X(2006)0420545208(,528000):,,SGTCAM1.0,,100nm,5nm,,:;;;;:TQ171.684:AStudyofultra2precisionverticalgrindingforasphericlensmouldOUYANGMiao2an(FoshanPolytechnicCollege,Foshan528000,China)Abstract:Themechanismofultra2precisionmachining,thealgorithmofprinciple,thestructuresofhardwareandsoftware,therealizationofComputerAidedManufacture(CAM)systemandtheanaly2sisofprocessingwerestudiedandpresentedtodealwithverticalgrindingandSinglePointDiamondTurning(SPDT).TheCAMsystemofsmallsizeultra2precisionasphericlensforverticalgrinding(SGTCAM1.0)wasdeveloped.Theprincipleisprovedtobecorrectandtheresultsareuptothenanomanufacturingprecisionwiththeformerrorunder100nmandthesurfacesmoothnessunder5nm.Theconflictsbetweenhugemarketrequirementsofopticalproductsandthehighpriceofcondi2tionalultra2precisionnumericalmachinetoolswillberesolvedbythelowdevelopingcostsofthesys2tem.Keywords:ultra2precisionmachining;verticalgrinding;SinglePointDiamondTurning(SPDT);as2phericlensmould;ComputerAidedManufacture(CAM)1,2060,,,,IT,,DVD,,,,,,,800,,,,;,,,,,,,,:(1);(2);(3),,,,,(SPDT)(UP2GT),,,,(),,,(10mm),21,1005000(r/min),(),(100000r/min),,YY,(),,XZ,(UPGT2VerticalGrinding),,XZ,,,,(SPDT)1Fig.1Configurationofverticalgrinding2Fig.2Relationofasphericprofileandtoolpathcen2ter(1),(G),,(R)(O),,NCCNC,XZG(XG,ZG)O(XO,ZO)2,,Z,X,,64514Z=x2R1+-(K+1)x2R2+20i=1Ai|x|i,(1),,,,,,10mm,100nm,5nm;3Fig.3Principleofverticalgrinding(a)UPGT(a)UPGTpicture(b)SPDT(b)SPDTpicture4()Fig.4Picturesofrealmachining,0.51m,,(UPGT)(SPDT)3,43(1)G,X(XG[i])Z(ZG[i]),KEISAN():ZG[i]=KEISAN(XG[i]),i=1,2,,n2,(2):XO[i]=XG[i]-TRsin(beta[i])ZO[i]=ZG[i]+TRcos(beta[i]),(2),XG[i]ZG[i],XO[i]ZO[i],TR,beta[i],beta[i]:beta[i]=atanZ[i]X[i];:Z[i]=Z2-Z1X[i]=X2-X1;Z1=KEISAN(X1)Z2=KEISAN(X2);X1=XG[i]-DELXX2=XG[i]+DELX.DELX,,,,dz,,beta[i],:beta[i]=atan(dz),(3):dz=2xR(1+temp1)+x3(1+K)R3(1+temp1)2temp1+i20i=1Ai|x|i-1temp1=1-(1+K)x2R2:7454:(1)XG,ZG,;(2),TR,TS,wrmp,tr2pm,tfeed,zdepth,nx,nz,m_fformm_fform2,m_cutV;(3),m_CORNER;(4),XO,ZO;(5)NC5NC65NCFig.5NCpathdescription6Fig.6Algorithmofverticalgrinding4,,,4.1(1),,1005000r/min(2),,1000100000r/min,,(3),,XZ,Y,X150mm,Y50mm,Z50mm(4),,1nm,(5),(OMM),,845144.27,CAMSGTCAM1.0(1)XG,ZG;7Fig.7Systemsoftwarestructure(2);(3),;(4);(5)NC;(6),4.3NCFANUC,X,Y,Z,1nm,1nm,RS232HSSB,NC5CAM,,,,,50nm,30nm,,8nm;0.1m/200mm,0.1m/300mm,XZ,Y,10nm25mm,10mm,50N/m,,,,,,,()(SGTCAM1.0-SuperGrindingandTurningComputerAidedManufacturingSys2tem):,NC(SGT100),(OMMTaylorHobsonUA3P),,,9454:,,,,,,---,SGTCAM1.0Windows,(SDI),(),,,8Fig.8Asphericparameters9Fig.9Machiningparameters,,,8,,,9,10,11NCRS232NCSGT100,,,12,PV0.3068m,10Fig.10Toolpathdisplay11NCFig.11MachiningNCcode12Fig.12Erroranalysisresults05514,PV0.1m,:(1)NC;(2)();(3);(4);(5),;(6)NC,;(7)(S,F,T);(8),;(9),;(10):,,,,,,,,;(11),6,,,,SGT100(SGTCAMV1.0),,,SGT100SGTCAM,,,:[1].[M].µ„¦£,2002.[2].¾„ÍŒÉ™ÌӚ[M].,›¿ªy¦™¨,2001.[3].[D].(),1997.[4].[J].,2003,11(1):75278.LUOSB.Ultra2precisionmachiningequipmentandtechnologyofasphericoptics[J].OpticsandPrecisionEngi2neering,2003,11(1):75278.(inChinese)[5].[J].,2000,22(2):952100.LISHY.Ultra2precisionmachnietoolsanddevelopmentofthelatesttechnology[J].JournalofNationalUniversi2tyofDefenseTechnology,2000,22(2):952100.(inChinese)[6].21[J].,2003,2:6210.RONGLR.Theultra2precisionmachiningtechniquetowardthe21stcentury[J].Mechatronics,2003,2:6210.(inChinese)[7].[J].,1998,34(1):1322136.WUMG.Strategyofcheapforultra2precisionmanufacturing[J].AviationPrecisionManufacturingTechnology,1998,34(1):1322136.(inChinese)[8].[J].,2003,39(5):329.ZHAOHY.Analysisonthetechnicalparameterinnanometerultra2precisioncutting[J].AviationPrecisionManu2facturingTechnology,2003,39(5):329.(inChinese)[9].[J].,1998(6):13214.YANGFX.Ultra2precisegrindingtechnologyfornon2sphereopticelements[J].MachineryManufacturingEngi2neer,1998,(6):13214.(inChinese)1554:[10]MCKEOWNPA.UltraprecisionhighstiffnessCNCgrindingmachinesforductilemodegrindingofbrittlemateri2als[J].SPIE,1990,1320:3012313.[11].[J].,2001,18(5):19221.LIUJH.Theultra2precisionmachiningtechnologyandit’sdomesticandinternationalprogress[J].Mechanical&ElectricalEngineering,2001,18(5):19221.(inChinese)[12].[J].,2003,9:58261.LUOSB.Researchonultra2precisonmachiningandmeasuringtechnologyforasphericalsurface[J].Manufactur2ingTechnologyandMachineTools,2003,9:58261.(inChinese):(1965-),,,,,,CAD/CAM,2004720058NEDOJapan,2,30E2mail:[e-mail]25514