药厂洁净室设计

123*45ISO6WHOGMP1992/m3/m30.5-5A35001B35005C350000200010D350000020000500EVGMP1997pc/m30.550.5A3500035000B350003500002000C350000200035000020000D3500000200007/m30.55/m3/100350005110000350000200010031000003500000200005001030000010500000600001000158ICU910····111121321431516-171zz231819201212222312/24253CSS4+26271xxxx2822930313233343512363437538394040„„„„„414243444546474849/5051/5215354555657123158259360ŒŒŒŒŒŒŒ461412-16222-26356412653661672686970µµ711722µµ731234745175217627-57712()7837918023181µ23482183·842853···86µ1µµ2873188231289²²²²²²312341²²9029155BOEOTB192FAB93ProcessSectionArea(m2)Cleanliness(Class)Temp.(DB)(Lux)Vibration(m)SoundLevel(NC)RemarkParticle(m)Humi.(RH%)ArrayT/FFilmStockerarea480.6102315001NC650.355ProcessLoad-Unloadarea1248.8102310.355BasicEnvironment(1)639.81002320.355BasicEnvironment(2)2136.610002320.355SUMUP4505.8ETCHStockerarea264.6102315001NC650.355ProcessLoad-Unloadarea1128.6102310.355BasicEnvironment(1)1101.61002320.355BasicEnvironment(2)594.810002320.355SUMUP3089.6TESTStockerarea615.6102315001NC650.355ProcessLoad-Unloadarea40.5102310.355BasicEnvironment(1)991.410023294ProcessSectionArea(m2)Cleanliness(Class)Temp.(DB)(Lux)Vibration(m)SoundLevelRemark0.355BasicEnvironment(2)66.210002320.355SUMUP1713.7PHOTOStockerarea588.61002312501NC650.355ProcessLoad-Unloadarea441.5102310.355BasicEnvironment(1)3684.51002320.355BasicEnvironment(2)12.610002320.355SUMUP4727.2ETCH/TFTStockerarea383.4102315001NC650.355ProcessLoad-Unloadarea652.1102310.355BasicEnvironment(1)908.61002320.355BasicEnvironment(2)311.910002320.355SUMUP2256.0Total16292.3CellPlAss’yRUBBasicEnvironment(1)4735.21002325001NC650.355BasicEnvironment(2)890.710002320.355SUMUP5625.995ProcessSectionArea(m2)Cleanliness(Class)Temp.(DB)(Lux)Vibration(m)SoundLevelRemarkCutBasicEnvironment(2)5789.510002325001NC650.355Total11415.4Module1F7053.2100002325001NC650.3605002NC65(Future)2F/MODULE7789.2100002320.3603F/BACKLIGHT7119.0100002320.360Total21961.4Maint.SmockArrayCell1F14510000233500-NC650.355SmockArrayCell1F31810000233500-NC650.355SmockArrayCell2F22110000233500-NC650.355SmockModuleCell1F45210000233500-NC650.360SmockModuleCell2F12910000233500-NC650.360969798FAB1ArrayCellAreaArrayCell4-84-91000600470040012501250125012501250125012508001250125025002500250015000351500075007500434233004500205012000750025004139403837367500150007500750015000750025001250250025001250250012502500250025002500250025001250250025002500125025002500125025007500250025001800CH300048004700FLSL6300300500020800T/FFILMT/FFILMCleanOut#1#2100A#1CleanOutCleanOutCleanOutBy-pass100ADIWR,65ADIWS100ADIWS20APN220AGN2OA2000x1000MD900x700MD900x70050A50A50A150A65APCWR,100A80APCWS,50AGN2,CDA150AVC,100A65ADIWR,100A100AGN2,50ACDA125A25APN2,40APCWR,125APCWS,100A100AVC,DIWR,65A50A150AIPA,STR,50A50ACDA150APN2,25A75ADIWS100A100AVC,GN2,80ACleanOutPCWS,100ACleanOutPCWR,150AITO,50AOA1100x2700MD900x700OA1100x270099ArrayCellCCCC75,000CMH75,000CMH75,000CMH75,000CMH75,000CMHFFU202×1728(Array)3StockerArea0.45m/s0.3m/sFFUHEPAOAOAD.I.Water75,000CMH-775,000CMH75,000CMH75,000CMH75,000CMHOAC-301-175,000CMHOutdoorAirConditioner(OAC)CirculatingPump3110.3m/sArray,CellAreaAirConditioningSystemBy-passDuctBy-passDuctBasic/EnvironmentProcess/LoadUnloadEquipmentArray,CellFFU201×5767(Array)FFU201×2901(Cell)FCU101×85(Cell)0.3m/sFCU101×196(Array)CMH@17,00022(Back-up)(Back-up)OAOAOAOAOAOAOAOAOAOAC301-8OAC301-9OAC301-10OAC301-11OAC301FDFD-4OAC301-3OAC301-2OAC301-5OAC301-6OAC301PFFMPHHCCCRHHEPA-1OAC301ArrayCell2ModuleAreaModuleAHUAHUHEPABOX4-73SmockAreaSmockHEPABOX1004-10ModuleAreaAirConditioningSystem1FSmockAreaAirConditioningSystemSmockRoomArrayModuleBDPre(Rough)Filter2F3FRFHEPABOXDGDG(Future)SmockRM.SmockRM.LawMaterialStor.etcModuleBDBDAHU401×12VDVDVDVDVDVDVDVDMDBy-passAHU402×8(for2F)AHU403(for2FRework)AHU404AHU406(forSMOCK)OAC401OAC401(Back-up)FDSFDSFDSFDFDFDBDCCHCHCCCCCCCCCCCCCCCSFDSFDSFDFDSFDPFFMPHHCCCRHPFFMPHHCCCRHSymbolSpecificationPFMFPre(Rough)FilterMediumFilterHEPAFilterSymbolSpecificationPre-HeatingCoilHeatingCoilCoolingCoilHEPAPHHCCCSymbolSpecificationRe-HeatingCoilSteamHumidifierGalleryRHSymbolSpecificationHEPABOXBalanceDamperDoorGalleryBDDGLegendModuleSmock101F01EDS*WorkScopeF01RoofF01Lv50F02/03/04FAB&SUBCLEANROOMF05SUPPORTBUILDINGIONOSPHEREF01Lv40F02Lv40F05Lv40CUBCubRoof2EAMAUF01Lv30F02Lv30F05Lv30CubLv206EAF01Lv20F02Lv20F05Lv20CubLv10F01Lv10F02Lv10F05Lv10INTERFACECubLv00F02Lv00F05Lv00100m3/h20kwF01-EDSVisitorCenter4.3mx2.2mx2.5m4mx3mx2m1eaWalfare4mx3mx2.5m1eaSteamSupply500A0.4MPa.150~160SteamSupply600A0.4MPa.150~160CRU2EAReclaimPumpToWWT56m3/hAHULPS200MM150φ/300MM100φToManholeToCub1stFLCRUTankToVisiterCenterToP&PTSTEAMSTATIONMainSteamCondensateDrainPipeCRU2EAToWWTAHUCHS/CHRTHTS/HTRFromP&PTFromVisiterCenterMainSteamCondensateDrainPipeCRU102Lv40Lv20ROOFLv20Lv10103104105VISITORCENTERP&PTF01-EDSWELFAREF02/F03/F04200mm/300mmFab&Sub-CleanroomWAREHOUSE1W07GeneralW05WorkShopGarbageStorageF05-SUPPORTB/DW06WasteHPMStorageWAREHOUSE2CUBELEC-SubstationYardWWT+INCOMINGRawIndustrialWaterTankRawDomesticWaterTankPotableWaterTan