平面变压器及平面集成磁技术

859*∗11121.1000842.123000*502070042004-03-2219661973TM462A1001-973120041[1][21~23]Jae.Park2.6mm2.6mm70m[2]Mn-Zn[3][4]863900[5]22.1planartransformerlowprofile[1]AC-DCDC-DCUPSISDN90PCB-860200435S-P-S-PSP[6]12350kHz~2MHz98%~99%20%0.2%[7]456SMD[1]2.2PCB42.2.1PCBPCBprintedcircuitboard20A/mm2PCB0.25~0.30.4MultisourceTechnologyPaytonIndustriesLtdPCB20kW[8]PulseEngineeringInc.()pulsePCB30W7.4mm150~750kHz-400~13002.2.2PeterBarnwellPhilips3F32MHz75W85%[9]2.2.31mm1MHzBSTsuijimotl35m34mm3mm(100m)CoNbZr1.8m210m10mCoZr5V0.3A1MHz77.5%[10]MnZnPVDCVDYamaguchiK2.4mm3.1mm10MHz67%[11]2.2.4(900)NiCuZnAg[5]2.1cm2.1cm1mm(1)8mm8mm1mm641~10MHz[5]18611Fig1OutlineofthePlanarSubmicrotransformer33.11928G.B.Grouse[12]1971J.CeiloH.Hoffman70Slovodan.CukCuk[13]Cuk20901997WeiChen[14]188%[15]22Fig2Structureofintegratedmagneticcomponent2[7]3J.M.Lopera1MHz10W42%6~9W70%[16]4MHz10mm2862200435VLSIBerkely10MHz20W/cm290%[17][18]10mSiO22CoZrReCuTaTaCuCu3mm4mm0.3mm33nH/mm25~40MHz5Hofsajer5kVA25kHzLCL=60FC=500nF43080LCT[7]3.2[19]VPEC[20]MHz123EMI/EMC45AnsysAnsoft/[21~23][24][25]4[1]..[M].2003.[2]JaeY.Park,MarkG.Allen.IntegratedElectroplatedMicromachinedMagneticDevicesUsingLowTemperatureFabricationProcesses.[J].EEETrans.Pack.man,Vol.23,No.1,Jan,2000,P48-55.[3]JaeY.Park,MarkG.Allen.“Packaging-CompatibleMicroinductorsandMicro-transformerswithScreen-ParintedFerriteUsingLowTemperatureProcesses”,[J].IEEETrans.Mag,Vol,34,No.4,July1998,P1366-1368.[4].-.[M].1993.[5]..[D].2003.[6]NingDai,Asoftwareforhigh-densitylow-profiletransformeroptimization,[J].CURRENT,1997,11(1).863[7]..[J].20023.[8]..[J].19997.[9]PeterBarnwell.Planartransformersforhighfrequencypowersuppliesusingthickfilmtechnology.[C].ISHM’92Proceedings,1992.[10]..[J].19984.[11]YamaguchiK,etal.Loadcharacteristicsofaspiralcoiltypethinfilmmicrotransformer,[J].IEEETrans.onMag.,1993,29(6):3207-3209.[12]GrouseGB,“ElectricalFilter”,[P].U.S.Patent1,920,948(August1,1933).[13]Slobodan.Cuk,“DC-to-DCswitchingconverterwithzeroinputandoutputcurrentrippleandintegratedmagneticscircuits”,[P].U.S.Patent4,257,087(March17,1981).[14]WeiChen,GuichaoHua,DanSable,etal.“DesignofHighEfficiency,LowvoltageconverterwithIntegratedMagnetics”,[C].VPEC’1997,pp.14-20.[15]..[J].20021.[16]LoperaJM.etal.Designofintegratedmagneticelementsusingthick-filmtechnology.[J].IEEETransonPowerElectronics,1999,14(3):pp.408-414.[17]SullivanCR,SandersSR.Designofmicro-fabricatedtransformers&inductorsforhighfrequencypowerconverters.[J].IEEETrans.onpowerelectronics,1996,11(2):228-238.[18]..[J].19996.[19]EnricoSanti,SlobodanCuk.Issuesinflatintegratedmagneticsdesign.[C].APEC,1996IEEE,1996.[20]DaiN,LeeFC.High-frequencyeddy-currenteffectsinlow-profiletransformerwindings.[C].APEC,1997.IEEE,1997.[21]HuljakR,ThottuvelilV,MarshAetal.“WhereArePowerSuppliesHeaded”,CIEEE-APEC,2000,pp.10-17.[22]ConorQuinn,KarlRinne,TerenceO’Donnell,etal.“AReviewofPlanarMagneticTechniquesandTechnologies”[C].IEEE-APEC,2001,pp.1175-1183.[23]GeorgeB,“PowerManagement:EnablingTechnologyforNext-GenerationElectronicSystems”,[C].IEEE-APEC,2001,pp.1-6.[24]XingShengZhou,DanChen,CliffordJamerson,“ApplicationofHalf-turnonE-CoreinSwitchingPowerSupplies”,[C].IEEE-APEC,1999,pp.1210-1215.[25]..[D].2001.PlanartransformerandintegratedmagnetismtechnologyYUQing-guang1,BINXiong-hui1,WANGXiao-hui1,YANGYu-gang2(1.TsinghuaUniversity,Beijing100084,China;2.LiaoningTechnicalUniversity,Fuxin123000,China)AbstractTheplanartransformerandintegratedmagnetismtechnologycanreducetheheight,thevolumeandweightofthemagneticdevice,improvethepowerdensityofthemagneticdevicetorealize“small,light,thin”oftheswitchpower.Inthispaper,thestate-of-the-artoftheplanartransformerandthemethodsoftheintegratedmagneticsareillustrated,theconceptofthesubmicrotransformeranditsprearationareputforward,keyproblemsinvolvedindevelopingtheplanarintegratedcomponentsarepresentedanditstrendsarealsocarriedout.Keywordsplanartransformersubmicrotransformerplanarintegratedmagneticcomponent