高精度激光位移计

19293,(LD)(PSD)PsD,CCD,,LDPSD,,(),,,PSD,,,,:.MD1211,,,,1.1LD,,(P)xBA(AB)PSD(P`)-111____7,7..`1Px,0,A,B,PSD,BoAB`0`A`,P/x`,o,,A`x,BOO`=0,oH=a,f,PP`00/aPHCOS=aaZ+XZ+Zaxeosocoss(1)aX()621,b=af/(af)b=af/(af)Pxxb+b`Zbb`cosaPSDi,i:,x/(3),,(4)3.Vi(112),x(3)xx,e=25a=44mmf=13.2mm,2(3),s2,PSD_Lx`s\\\///:(l),,,(2)PSD,m)22,(1)(ROM),x(4)V,Vx,RoM(2)AD(3),LD,(4)LDPSD,p,x=p:e,10:(1);(2)LD,,`LDLD,`,,,LD,LD,LDLD17PsD3,LDP,1001/2,P:20,i,12,(p:pZ/Plpl/)rrr,(~|PI(a)LD5.5::`)PSD3LDPsD()=()x(LD)LD,1000(=10x100),LD:(a)LD,(b),LD,,1000,,PsD,.12,2`,PSD4,I,``4rI04PSDIPSD:,I;d:i91(I,s)(5)dg:(I,s,,`,r)(6)zPSD,`5(`),,,=93(I,s,z`,r)(7)A`p,PPP:P::5(b),,,,,4,LD,2.(a)(b)5PSD:g`(I,s,xr)(8)x`,x,I():1I,,e:I=AP/2a2,A,u,:(1)s,sr(2)z`0d0,`0d0:e=d++eo(5)(8),r,Is,:,:(1)x(2)s(s,,I)(3)sr,pSDz`,d(=92(I,z`))(=g(I,z`))(5)(s),I(2)(3),,I,:(4),RoM6LLLOOOOOOOOOOOOOOO(4),0.25,0.6,5.,11,,;,,,,:(1);(19)MD1211780nmsmwLD,LDlokHzpsDIv,,AD(4),vLDDA(1)~(3)MD12114,10mMD121240100m,smm,10m,5m1.,LD,10,(2),(3),;(4),;(5)34,;(6),9,,,,,1992,20,2,3844,LD,,5m,LD2.lomms/,,,,3.,,ROM1991,27,s,855~560