第9课--压电传感器.电荷放大器

2012.10QkF0rACQUC33()QdF(quartz)m(10-3),u(10-6),n(10-9),p(10-12),f(10-15),a(10-18)+-+++++++++++++------------+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-PolingvoltagePolingaxis6QCRkUi0Ui10R,C(1)(2)(3)11chargeamplifierQCRfU0∞C12-+vs()QCU0-kCfUi13∞2()R+11V+24VDCAmplifierCurrentRegulatingDiodeQuartzICPSensorConstantCurrentSignalConditionerCouplingCapacitorSignalGround141001010.11581.16F=PAForceSensorPressureSensorAccelerometer------+++++------+++++----++--+--++----++++-++++++++++------------F=MAF:17tableXYdor3133dactuator12FinePositioningX-YtableVVR181.2.3.4.H(s)=U0/F(A=∞)Q=kF