布鲁克原子力显微镜

AFMenhancingtraditionalElectronMicroscopyApplicationsDr.JohannesH.KindtModulusWhatisAFM?•Microscopytechniquebasedonlocalmechanicalcontact•Resolution1-5nm•sampletopography•surfacemechanicalproperties•Ambient&fluidconditions•Establishedin:MaterialsScience,Semiconductors,Biological&otherAcademicResearch•[e-mail]/[e-mail],diffractionEl.scattering,sec.electronsMechanical(Lennard-Jones,..)Resolution0.1nm1nm20pm-5nm.~30pminz.Max.Fieldofview10sofummmTyp.30-200umFieldDepthSamp.Th.100nmum..mm3-20um(Tip/Piezo)MaterialcontrastDensityElementYoung’smod.,adhesion,deform..EnvironmentsHighVacuumVacuumAmbient,fluids,reagents,gasesSpeed(hiresscan)1min1min1min(FastScan)Sampleprep100nmthickDry&conductiveforhighresolutionOnahorizontalsurfaceAFM-strengths:Highresolutioninair/gas/fluid.Highresolutiononnonconductiveopaquesamples.Zresolution.Materialmechanicalpropertycontrast[e-mail]“Hard”Material(e.g.Mineral,Metal)“Soft”Material(e.g.Gel,Protein)AFMtipRtipe.g.Rtip=2nmContactAreaLateralResolution:2nmLateralResolution:~2nmLateral:VerticalAFMresolutionislimitedbypositionnoise(withmechanical,electricalandfundamental(thermal)contributions)e.g.DimensionFastScan:0.3Angstrom(30pm)Somefactorsthatcanfurtheraffectachievablelateralresolution:•Moisturelayeronthesurface(inair)•Ionicscreeningcharges(influid)•Tipengagerobustness(AFM’sabilitytopreservethetipduringengage)Vertical:FastScanResolutionexample:HardSurfaceMuscoviteMica(a:atomiclayers,b:lattice)13Seconds20um,20lines/s5.3Seconds2um,48lines/sScanSize.1um100nma1024x1024pixels20nm,6.5Lines/[e-mail]:•DimensionFastScan™•Probe:Broadband–C(special)•Mode:PF-Tappinginfluid•PFT-Frequency:8kHz•PFT-Amplitude:2nm•Linerate:8.8lines/s•Tipvelocity:3.2um/s•Pixelresolution:512x51258SecondsperFrame50nm5.493.17r(nm)S.Hu,(Bruker)incollaborationwithI.Medalsy,D.Mueller(ETHD-BSSE,Basel,Switzerland)The2D-FFTreflectsthehexagonalsymmetryoftheproteincrystal.TheSpectrumshowsgoodsymmetry(lowdistortion).Theinnermaximarepresenttheunitcell,theouteronesthetrimericsub-structure,asexpectedfromtheXRAYcrystallographydata(zoom,PDBmodel)[e-mail]mple:SoftSurface2DcrystalofBacteriorhodopsintrimericcomplexesRecentAFMadvances(andhowtheymaketheAFMinterestingforEMenvironments)•Simplifiedoperation:Self-tuningAFMimaging&feedback(ScanAsyst(*))Operationnowcomparabletostate-of-the-artSEM•AFM-resolutionmechanicalpropertyimaging(PeakForceQNM(*))Material-contrastimagingcomplementarytoElemental-contrastinSEM(e.g.EDX).Especiallyusefulforcontrastingorganicmaterial.•20xincreasedimagingspeed,samequality(FastScan)Imagingtimes(e.g.25sforahighqualityimage)nowsamerangeasSEM•Large-sample&multi-sampleautomation,athighestresolutionSimplifiedSamplepreponmanysubstrates;capacityforindustrialapplications(e.g.waferlevelscreening)[e-mail](*)BasedonBruker’sproprietaryPeakForce™TappingBruker’suniquePeakForce™[e-mail]forstandardmaterialproperties,atnmresolutionAdhesio[e-mail]ctionEquivalentTip-SampleForce•10xfasterthanastandardAFM•Sameimagequality,sameforcecontrolMagnitudePhaseΔfNormalAFMFastScan™(atequaltip-sampleforce)[e-mail]astScan™Probes•ProbeDetailsL(um)W(um)fr(MHz)k(N/m)t(um)TipHeightROCTSBBacksideCoatingStyleA27321.25170.6StyleB30320.4040.3StyleC40400.251.50.32.5umto8um5nm5µmYes1.57MHz1.68MHzFr=1.19M,Q=201,k=156e-260e-26PSDTypicalProbeandLorenzBestFitQkF∝QfrBW∝[e-mail]4/11/2012BrukerNanoConfidential12Celgard™batterySeparatormembrane.Realtimeview,fromDimensionFastScan™AFM.CelgardisatrademarkofCelgardCorp.,andnotassociatedwithBruker8Minutesper16MpixelImage20um,16Mpixel2um7.5umOnescan.Allthedetail.(Phase)(Heightsensor)Sample:[e-mail]troduction•Forspeedleadingtothroughputandproductivity,itmustbecombinedwithdataquality,robustness,self-optimization,andprogrammability.•TheDimensionFastScansystemcombinesthestabilityandmultisampleautomationcapabilitiesoftheDimensionICONplatformwiththeselfoptimizationfordifferentsamplesenabledbyScanAsyst,[e-mail]•Highresolutiononnon-conductivesamples•True3Dmetrology•SurfaceMaterialProperties•Conductivity•Minimalprep•Changesunderenvironmentalinfluence•Influids•[e-mail]…True3DmetrologyExample:[e-mail]2Hoursfortheentiredataset(incl.Navigate,Engage,Capture,Withdraw)•4Runs•8Angles•3Tracks(at20%,50%,80%)96measur