DFG8540 basic training

OverseasTechnicalSupportDept.DFG8540BasictrainingH.Kashiwagi/OTS-AGrinderteam2004/2/20OverseasTechnicalSupportDept.PURPOSEFORTRAINING1)Tounderstandforimportantsafetypoint.2)TounderstandforDFG8540mechanicalandelectricalstructure.3)TogettheknowledgeforDFG8540installationprocedure.4)TogettheknowledgeforDFG8540maintenanceprocedure.Finaltarget:PossibletoperformtheM/CinstallationandconductthetrainingforcustomerOverseasTechnicalSupportDept.DFG8540Installationprocedure(Scheduleinsite)12345WORKCONTENTSM/CInstallationPre-install(Grinder,DTU,vacuumunit,duct)PipingandwiringbetweenGrinderandDTUetcAirsupplytoGrinderBYCUSTOMER★　　　　Removeashippingbrackets　　　　M/ClevelingWaterandpowersupply　BYCUSTOMER★TurnonpowertoM/CSelfgrindC/TbaseassyinclinationcheckSelfgrindwheelinstall(dress,setup)C/TinstallationSelfgrindC/TsurfaceinclinationcheckStandardwheelinstall(dress,setup)WafertransportationcheckRobot,T1andT2armTTVadjustmentTTVadjustmentWaferthicknessadjustmentStaticaccuracycheckbyinstallationchecksheetInhousebuyofftestOverseasTechnicalSupportDept.DFG8540Installationprocedure(Piping)PipingSystemFacilityM/CmainbodyVacuumunitBoosterpumpMainair●●Subair●●Wheelcoolantwaterinlet●●(WhentheboosterpumpisNOTused)●●(Whentheboosterpumpisused)Wheelcoolantwaterdrain●●Spindlecoolantwaterinlet●●Spindlecoolantwaterdrain●●Vacuumunitwaterinlet●●Vacuumunitwaterdrain●●Vacuumunitairexhaust●●Vacuumunitwaterdrainpanwaterdrain●●OverseasTechnicalSupportDept.DFG8540Installationprocedure(Wiring)CableconnectiontoDFG8540duringM/CinstallationVACUUMPUMPUNIT:DESCRIPTIONCONNECTORNo1POWERcableL1:No.15L2:No.19L3:No23atTB12SIGNALcableforDigitalInputJVP1#CO53SIGNALcableforDigitalOutputJVP2#DO6PCRELATIVE:DESCRIPTIONCONNECTORNo1ACINJPCP2COM1JTPPC3USBJFDD4COM2JRSLC5VIDEOJDVPC6SLOT1JETPC7EXTJEXTOverseasTechnicalSupportDept.DFG8540Installationprocedure(Optionalwiring)DTU152:(OPTIONAL)DESCRIPTIONCONNECTORNo1POWERcableFromprimary2SIGNALcableforDigitalInputJCL1#CO53SIGNALcableforDigitalInputJSP1#CO5SPINDLECOOLANTSUPPLYUNIT(OPTIONAL)DESCRIPTIONCONNECTORNo1POWERcableL1:No.18L2:No.22L3:No262SIGNALcableforDigitalInputJCL1#C053SIGNALcableforDigitalOutputNoneBOOSTERPUMPUNIT(OPTIONAL)DESCRIPTIONCONNECTORNo1POWERcableL1:No.16L2:No.20L3:No242SIGNALcableforDigitalInputJPP1#C053SIGNALcableforDigitalOutputJPP2#D06OverseasTechnicalSupportDept.DFG8540Installationprocedure(Optionalwiring)DUCTUNIT(OPTIONAL)DESCRIPTIONCONNECTORNo1POWERcableL1:No.17L2:No.21L3:No252SIGNALcableforDigitalInputNone3SIGNALcableforDigitalOutputNoneUPSRELATIVE(OPTIONAL)DESCRIPTIONCONNECTORNo1POWERcable(SupplypowertoUPS)1:R200-302:T200-30atTB1(ToUPS)2POWERcable(UPSsupplypower)3:R200-30A4:T200-30AatTB1(ToCB2)1SIGNALcable(UPSremote)JUPS(TosafetyPCB)2SIGNALcable(Powerfailuredetection)JUSA(ToCPUPCB)OverseasTechnicalSupportDept.DFG8540Installationprocedure(Removeshippingjig)Youarerequiredtosupplytheairforturntablebymanual,whenT/Tshippingjigwillberemoved.OverseasTechnicalSupportDept.DFG8540Installationprocedure(M/Cleveling)Tolerance:Lessthan0.04mm/1000mmMeasuringPoint:C/TbaseassysurfaceA(Frontandrear.Rightandleft)AdjustmentPoint:4points(A/B/C/D)Remarks:ItisNOTallowedtousethepoint1and2toadjustM/Cleveling.Thosearetightenbyhand.ABDC12OverseasTechnicalSupportDept.DFG8540Installationprocedure1)TurnONM/Cpower.2)Performtoinitializeeachsectionindividually.OverseasTechnicalSupportDept.DFG8540Self-grindprocedure(Step-1)ABCZ1-axisZ2-axisM/CFront1)AdjusttheallC/TbaseassyinclinationbyfineadjustmentatZ2-axis.(A:0B:-13C:-20±5)2)SetC/TonC/Tbaseassy.C/Trunoutislessthan50um.3)Settheself-grindwheelatZ2-axis.4)Performthewheeldress.5)Performtheself-grind.6)ChecktheC/Tinclination(A:0B:-3～0C:-20±10)Remarks:1clickofC/Tfineadjustmentis1um.OverseasTechnicalSupportDept.DFG8540Self-grindprocedure(Step-2)Performtheautoselfgrinding1)Conformtheself-grindrecipe2)GotounitoperationandConnecttheHandypanel3)SelecttheZ2sequence4)SelecttheAutoself5)Warmupstarts6)MeasuretheeachC/TheightbyZ1innerIPG.7)Performthe5mmset-upatmostlowestC/T.8)Selecttheself-grindrecipe9)Warmupstarts10)SelecttheAUTOSELFandpressit.11)M/Cstartstoself-grindthemostlowestC/T.12)Aftertheself-grindisfinished,M/CtrytomeasuretheeachC/Theight.13)AdjusttheIPGreading(Inner:-100umOuter:0um)toloosecontactorscrewatmosthighestC/T.(IPGamplifiersetto50,beforeIPGreadingisadjusted.)14)CheckthespindleinclinationatZ1-axis.15)Exchangetheself-grindwheeltoproductionone.16)Pleaserefertoattachedforfurtherexplanation.---OverseasTechnicalSupportDept.DFG8540WafertransportationadjustmentThefollowingpointarenecessarytocheckwhetherwaferiscenter.1)RobotpickpositionatCassetteA/B(Z/X/θandR-axisdirection)2)RobotpickpositionatPositiontable(Z/X/θandR-axisdirection)3)PositiontabletoC/TbyT1-arm(θ-axisdirectionandcompressedamount)4)C/TtoSpinnertablebyT2-arm(θ-axisdirectionandcompressedamount)5)Robotpickpositionatspinnertable.(Z/X/θandR-axisdirection)OverseasTechnicalSupportDept.DFG8540Wafertransportationadjustment1)①Select8inchrecipe.Robotpickmovestocassetteinside.Theclearancebetweencassettestageandbottomofrobotpickis19.1mm.Y