电子背散射衍射技术及其在材料科学中的应用

2005104CHINESEJOURNALOFSTEREOLOGYANDIMAGEANALYSISVo.l10No.4Dec.2005205:2005-11-14:(No.50231030):(1964-),,:;;,E-mai:[e-mail]:1007-1482(2005)04-0205-06##(,100084):本文介绍了电子背散射衍射(EBSD)分析技术的基本原理发展历史EBSD系统的组成实验条件分辨率及EBSD数据处理方法等通过多个典型的实例,系统介绍EBSD技术在材料研究领域中的应用,并就EBSD技术与其他相关分析技术的比较进行了讨论:EBSD;取向;织构:TG115.23;O722+7:AEBSDtechniqueanditsapplicationsinmaterialsscienceLIUQing(MetalsResearchInstitute,DepartmentofMaterialsScienceandEngineering,TsinghuaUniversity,Beijing100084,China)Abstract:Inthispaper,thebasicprincipleofelectronback-scatteringdiffraction(EBSD)techniqueisintroduced.ThemodernEBSDsystem,experimentalconditions,spatialresolution,angularresolutionandpostanalysisofthedataarealsodescribedinthispaper.Finally,theapplicationsoftheEBSDtechniqueinmaterialsciencearediscussedbyusingafewtypicalexamples.Keywords:EBSD;orientation;texture12090,(SEM)(ElectronBack-scatter-ingPatterns,EBSP)[1-3],(ElectronBackscatteredDiffrac-tion,EBSD)(OrientationImagingMicroscopy,OIM)[4]EBSD()EBSD,,/0)))/0EBSD(),EBSD,,(36/),(0.1Lm0.5b),,EBSD)))))),()()206200510422.1(EBSD)SEM,,/0,11EBSD,,,EBSD,2.2EBSDEBSD.EBSDCCD2EBSD2EBSD,,(),EBSD(),CCD,EBSD,EBSDEBSDEDXSEM,,,3EBSDEDXSEM3EBSDEDXSEM2.3EBSDEBSDEBSDEBSDEBSD,,EBSD[5,6]EBSDEBSD,3,4,0.1um,0.03um2005104:2074EBSD:(a),(b),:1);2),,EBSD,,,,,,EBSP,EBSP3(EBSD)[7-10]EBSD,SEMEBSDOIM(5)(6),()(7),:;;;;EBSDEBSD56{111}20820051047ODF(2=const)3.1EBSD,,X-8300eGoss(),Goss4.6%8GossEBSD:EBSD,,,8,(9)3.2EBSD,98,/0,,,EBSD3.3EBSD,,:(CSL)10EBSD()10Ni3.4,EBSD,,[11]EBSD,,,,,EBSDM7C3M3C(M),,2005104:209EBSD,EBSD,,,,113.5,EBSDEBSD:1);2);3)4EBSD:X;,,EBSDSEM[12],EBSDX5EBSDSEM0.5;0.5Lm(SEM)0.1Lm(FEG-SEM),EBSD:(1)EBSDX;(2)EBSD;(3)EBSD(100)X();(4)EBSDTEM,EBSD2102005104:[1]SchmidtNH.Bandpositionsusedforonlinecrystallo-graphicorientationdeterminationfromelectronbacksca-tteringpatterns[J].ScanningMicroscopy,1991,5:637.[2]DingleyDJ,RandleV.Microtexturedeterminationbye-lectronback-scatterdiffraction[J].JMaterSc,i1992,27:4545-4566.[3]WrightSI,AdamsBL.Automaticanalysisofelectronbackscatterdiffractionpatterns.Metall[J].TransA,1992,23A:759-767.[4]AdamsBL,DingleyDJ,KunzeK,eta.lOrientationimagingmicroscopy:newpossibilitiesformicrostructuralinvestigationsusingautomatedBKDanalysis[J].Mate-rialsScienceForum,1994,157-162:31-42.[5]HumphreysFJ,BroughI.Highresolutionelectronbackscatterdiffractionwithafieldemissiongunscanningelectronmicroscope[J].JournalofMicroscopy-Oxford,1999,195:6-9.[6]HumphreysFJ,BatePS,HurleyPJ.Orientationaver-agingofEBSDdata[J].JMatSc,i2001,36:3833-3854.[7]JensenDJ.Applicationsoforientationmappingbyscan-ningandtransmissionelectronmicroscopy[J].Ultram-icroscopy,1997,67(1-4):25-34.[8]HumphreysFJ.Quantitativemetallographybyelectronbackscattereddiffraction[J].JournalofMicroscopy,1999,195:170-185.[9]LiBL,GodfreyA,LiuQ.Subdivisionoforiginalgrainsduringcold-rollingofinterstitia-lfreesteel[J].ScriptaMaterialia,2004,50(6):879-883.[10]CaoWQ,GodfreyA,LiuQ.EBSPinvestigationofm-icrostructureandtextureevolutionduringequalchannelangularpressingofaluminium[J].MaterialsScienceandEngineering,2003,A361(1-2):9-14.[11]NowellMM,WrightSI.Phasedifferentiationviacom-binedEBSDandXEDS[J].JournalofMicroscopy,2004,213:296-305.[12]LIUQ.ASimpleandrapidmethodfordeterminingor-ientationsandmisorientationsfocrystallinespecimnesinTEM[J].Ultramicroscopy,1995,60(1):81-89.##/0126,/013,/05))),(中国科协信息中心供稿)