国内外精密加工技术最新进展

:,:,,,,,LatestDevelopmentsofPrecisionManufacturingTechnologyatHomeandAbroadYuanZhejunAbstract:Thelatestdevelopmentsinmainareasofprecisionandultra2precisionmanufacturingtechnologyathomeandabroadwereintroduced.Itwasproposedthatwemustpaygreatattentiontotheresearchofprecisionmanufacturingtechnologyandincreaseinvestmentsinthisfieldtomakeourcountrysprecisionmanufacturingtechnologyhaveagreatimprovement.Keywords:precisionandultra2precisionmanufacturingtechnology,ultra2precisioncutting,ultra2precisionmachinetool,precisionmirrorsurfacegrinding,precisionlapping,micro2machinemanufacturing1,,,,,,,,,,,,,,,,,,,,,,,,1,1()2000211972199181903718820032318031804116067100200664100111907214013111020071111916157017166110,,,,,,,1DIXI520084210©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(1),,24000r/min2MIKROM,42000r/min,5m,,3311,,,,,1nm(3),,0150101m,,(AFM),4AFM3(Ikawa)4AFM312,,,5,,,,,,567,,,,67,6©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(110)(a)(110)(b)(100)(c)(111)9313,,,X,,,,10,11()()(SEM)()10114411:,,7080,,,1986LLL211mDTM-31165mLODTM,LODTM6,Cranfield1991OAGM-2500(2500mm2500mm),(),,715m,,Moore2000500FG(12),,,202000r/min,01025m,013m/300mm,720084210©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.=0,;,,,f,,(),,(a)(b)13412,,1998,,,14a800mm,14b,,14cKDPKDP,,,(a)()(b)()(c)KDP()14,8©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(),15aELID(CBN),,,15bELID:,Ra=010201005m,ELID(a)ELID(b)ELID15ELID512,(),,810,12,,10126611,,ELID,ELID(16);ELID,,,,,612(1),17Canon,,,,,16ELID6,814m,18,,,,,920084210©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:17(Canon)18814m(2),,19a,,19b,,,,,(3)Zeeko,20aZeeko,20b,,,(),,(),,,(),,(a)(b)19(a)(b)20Zeeko(4),,,,,,,21a,21b01©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(a)(b)(c)(d)22,(CAD),,,,,,(),,,23,23a,23b,23c(a)(b)(c)23730,(Intel)1971,,19714004,108kHz,2300,10m;1999PentiumIII(III),1GHz,217mm2,2800,0118m20013Pentium4117GHz,0113m,116mm2,42002011,10GHz,3013000,197110m0113011m218312GHz(0124m),0113011m0108m,,,70nm,,,12,,,,,,,,,:101120084210©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:LIGA811SPM(AFM),Si3N4,,AFM,,AFM25,AFM25aHIT,,,,25b,20m,350nm25c,44m4mAFM25AFM()812,,,,1020m,8m,3050m50000100000r/min,2627,,,,,28,,;,,;,,,;,262728()29FanucROBOnanoUi21©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(a)V(b)V(c)30ROBOnanoUi,,,1mm,31a,1116mm1116mm,44,31b236m,16m,448m,,31d,813,:,,LIGA,,,,,,,,,,,,(a)(b)44(c)()(d)3151,.(2).:,20072.,:,20053,,..:,20054.2007.,2007(2):4447:,,,,150001Author:YuanZhejun,Professor,HarbinInstituteofTechnolo2gy,Harbin,150001,China3120084210©1994-2009ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.