MEMS-气体传感器简介(英文版)

MEMSGASSENSOR———COMPOSITIONOFGASSENSORCONTENTS•1、IntroductionandApplication•2、Theclassificationandtheprincipleofsensor•3、ProcessingandmanufacturingsensorINTRODUCTIONANDAPPLICATIONGasdetectioninpeople'sproductionlifeapplicationsisveryextensive,especiallyintheaspectsofsafetyinproduction,suchas,mineoperation,gasproductionandtransportation.Gassensorisdirectlyrelatedtopeople'slifeandpropertysafety.INTRODUCTIONANDAPPLICATIONMicroelectromechanicalsystems(MEMS)technologyisthemicrodevicemanufacturingmethodbasedonthedevelopmentofmicroelectronictechnology,firstintheaccelerometer(加速度计),apressurepickup(压力传感器)field.WiththeincreaseoffilmtechnologywithThinfilmtechnology(薄膜技术)development,inrecentyearstheMEMSsensorshavebeenwidelyconcernedinthechemicalgasdetection.INTRODUCTIONANDAPPLICATIONThefollowingaresomeofthegassensor：INTRODUCTIONANDAPPLICATIONMEMSgassensoriscomparedwiththetraditionaldetectionmethod,hastheadvantagesofsmallsize,highsensitivity,fastresponse,easytointegrateandmanyotheradvantages,isoneofthemaindirectionofthefuturedevelopmentofgassensors.THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORAccordingtodifferentdetectiontheorycanbedividedinto:•1、BasedonthegasselfphotoacousticspectroscopyandopticalpropertiesofMEMSgassensor•2、Gassensorssensitivematerialsbasedonadsorptionprinciple•3、Gassensorforinflammableandexplosivegascatalyticcombustion•4、FieldAsymmetricIonMobilitySpectrometrytechnologyofgassensorTHECLASSIFICATIONANDTHEPRINCIPLEOFSENSOR1、BasedonthegasselfphotoacousticspectroscopyandopticalpropertiesofMEMSgassensor：Photoacousticgassensorconsistsofamodulatedlightsource,photoacousticcell,highsensitivemicrophone3mainpartofthesystem.Theprincipleofprocess：THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORphotoacousticcelldirectionofgasflowmodulatedlightsourcemicrophonephotoacousticcelldirectionofgasflowmodulatedlightsourcemicrophone1)lightgasspecificmodulationfrequency,thegasmoleculeinitsexcitedstate;2)bygasmoleculesinducedbyimpactwaytoreleasetheabsorbedenergy;THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORTheprincipleofprocess：photoacousticcelldirectionofgasflowmodulatedlightsourcemicrophonephotoacousticcelldirectionofgasflowmodulatedlightsourcemicrophone3)theheateffectgeneratedgascollisions,gasheatingexpansionheatwave,itsfrequencyandthesamefrequencymodulationlight;4)highsensitivemicrophonesamplingoftheheatwave;2、Gassensorssensitivematerialsbasedonadsorptionprinciple:THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORSurfaceacousticwave(SAW)gassensorisBryantetalin1981forthefirsttimeputforwardtheSAWforgassensitiveresearch,anddesigntheSAWgassensormodelofgassensitivelayeradsorption.WiththedevelopmentofMEMStechnology,theSAWgassensorhasbeenminiaturized,sensitivity,selectivityandotherperformanceparametershavebeenimproved.SAWgeneratorsSAWreceiverGassensitivematerialsTHECLASSIFICATIONANDTHEPRINCIPLEOFSENSORTheprincipleofprocess：SAWgeneratorsSAWreceiverGassensitivematerials1)SAWgeneratorvibration,thereceiverreceivesthevibrationsignal,andthephasesensitivedetectioncircuitdetectionandaccepttheshockwavephasedifference;2)gasmoleculesattachedtothefilmmadeofsensitivematerials,conductingpropertiesofmaterialschange,phasetwowavedifferencechange.ThephasesensitivedetectioncircuitTheprincipleofcatalyticcombustiontypegassensorfromthegassensorformethane,macro,COandotherinflammableandexplosivegasdetection.THECLASSIFICATIONANDTHEPRINCIPLEOFSENSOR3、Gassensorforinflammableandexplosivegascatalyticcombustion:THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORTheprincipleofprocess：Whenthereareflammableandexplosivegasesintheair,gasmoleculesinthecatalyticoxidationreactioncatalystsurface,andemitheat.Thethermistortemperaturechangecanbeconvertedtoelectricalsignals,andthereferencefilmcomparedtogetgasvolumefractionchanges.THECLASSIFICATIONANDTHEPRINCIPLEOFSENSOR4、FieldAsymmetricIonMobilitySpectrometrytechnologyofgassensorFAIMStechnologyisthetechnologyofionmobilityspectrometry(IMS)basedonthedevelopmentof,gassensorFAIMStechnologycanbeusedinmanyfields,suchasatmospherictoxicgasdetectionbasedon,andhasthefeatureofsmallvolumeaccuracy.THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORTheprincipleofprocess：ionizedgasIongateDCACThedetectionelectrodeionizedgasIongateDCACThedetectionelectrodeSelectedgas1)carriergasmixedwiththesampleionizationafteriongatetotheiondriftregion2)athigh(greaterthan11000V/cm)undertheeffectofalternatingelectricfield,themigrationvelocityofdifferentionsfornonlinear(nonlinear)changes,relevant,thischangeandioncharacteristicstherefore,ionhighelectricfieldcandifferentiatebetweenlowfieldmobilitysimilar.AlternatingelectricfieldtoaddaDCbiasvoltage,highelectricfieldtransfereffectsoffsetdetectinggasions.THECLASSIFICATIONANDTHEPRINCIPLEOFSENSORionizedgasIongateDCACThedetectionelectrodeSelectedgasTheprincipleofprocess：3)inthesampletestingprocesstotheDCbiasvoltageisanalyzedinthesamplegascompositionofscanning.PROCESSINGANDMANUFACTURINGSENSORIntheprocessingofSAWgassensorasanexample1)micromachinedtuningforkProcessingmethodofmachiningmicroforkissimilartothewishboneMEMSaccelerationsensor,canadoptlithographicmannerthrou