白斑手指印优化评估项目汇报

白斑....手指印优化评估项目汇报报告人：周程晟日期：2011.05.082011.05.082011.05.082011.05.08HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly2222白斑、手指印产生原因白斑、手指印产生原因白斑、手指印产生原因白斑、手指印产生原因（（（（1111）切片时切片员工直接用带有油的手直接上下料）切片时切片员工直接用带有油的手直接上下料）切片时切片员工直接用带有油的手直接上下料）切片时切片员工直接用带有油的手直接上下料，切片后需要脱胶，脱胶是在，切片后需要脱胶，脱胶是在，切片后需要脱胶，脱胶是在，切片后需要脱胶，脱胶是在60606060度左右水里进行度左右水里进行度左右水里进行度左右水里进行脱胶，这样就使带有油渍的手指印进入硅片表层脱胶，这样就使带有油渍的手指印进入硅片表层脱胶，这样就使带有油渍的手指印进入硅片表层脱胶，这样就使带有油渍的手指印进入硅片表层，再经过清洗，原硅片清洗一般只采用超声波，，再经过清洗，原硅片清洗一般只采用超声波，，再经过清洗，原硅片清洗一般只采用超声波，，再经过清洗，原硅片清洗一般只采用超声波，未能去除干净；未能去除干净；未能去除干净；未能去除干净；（（（（2222）硅片在包装时，有些员工意识淡薄，不经常换）硅片在包装时，有些员工意识淡薄，不经常换）硅片在包装时，有些员工意识淡薄，不经常换）硅片在包装时，有些员工意识淡薄，不经常换手套或直接用手去拿，这样就会造成硅片表面有手套或直接用手去拿，这样就会造成硅片表面有手套或直接用手去拿，这样就会造成硅片表面有手套或直接用手去拿，这样就会造成硅片表面有手指印或白斑。手指印或白斑。手指印或白斑。手指印或白斑。HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly白斑、手指印成分分析白斑、手指印成分分析白斑、手指印成分分析白斑、手指印成分分析�（1）水份�（2）矿物质盐�（3）乳酸�（4）尿素�（5）氨基酸羟基、羧基高沸点硅片表面上的羟基发生键合反应牢固共价键HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly4444处理方法处理方法处理方法处理方法�（1）返工工艺I：过预清洗（双氧水）（300s、55度）制绒时间1300s氢氧化钠125gIPA350ml添加剂30ml（不开循环，不开鼓泡，温度76度）�（2）返工工艺II：过预清洗（双氧水+氢氧化钠）（300s、55度）制绒时间1200s氢氧化钠125gIPA350ml添加剂30ml（不开循环，不开鼓泡，温度76度）�（3）返工工艺III：过预清洗（双氧水+氢氧化钠）（300s、55度）制绒时间1000s氢氧化钠135gIPA400ml添加剂35ml（开循环，开鼓泡，温度76度）实验返工工艺�（1）实验工艺I:过预清洗（双氧水+氢氧化钠）（300s、55度）制绒时间1200s氢氧化钠125gIPA350ml添加剂30ml（不开循环，不开鼓泡，温度80度）�（2）实验工艺II：不过预清洗制绒时间1200s氢氧化钠135gIPA350ml添加剂30ml(开循环，开鼓泡，温度80度）待实验返工工艺�（1）待实验工艺I:过预清洗（HF5%）（300s，25度）制绒时间1200s氢氧化钠125gIPA350ml添加剂30ml（不开循环，不开鼓泡，温度80度）�（2）待实验工艺II：过预清洗（0.1%丙酮+超声波）（300s、常温）制绒时间1200s氢氧化钠125gIPA350ml添加剂30ml（不开循环，不开鼓泡，温度80度）HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly5555各种方法效果各种方法效果各种方法效果各种方法效果普通返工工艺III:实验返工工艺I:HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly各种方法效果各种方法效果各种方法效果各种方法效果实验返工工艺IIHongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly7777白斑、手指印返工评估白斑、手指印返工评估白斑、手指印返工评估白斑、手指印返工评估�按返工片效率给予利用率评估（效率大于17%为可利用）132305.2144340230.188347291824.74885330.00747048617.793943560.791564040.625441745.53049553总数工作电流漏电流均值Rsh均值Rs均值EFF均值FF均值Voc均值Isc2011.04.13-2011.04.30返工片数据分析0.07%0.62%9.18%25.14%28.41%17.16%8.25%5.08%2.54%2.92%0.29%0.20%0.15%百分比98212153326375922701091672336386382620片数18.618.4-18.618.2-18.418.0-18.217.8-18.017.6-17.817.4-17.617.2-17.417-17.215-1713-1510-1310效率分布返工片利用率=效率大于17%数量/返工片总数=96.4%HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly8888白斑、手指印返工评估白斑、手指印返工评估白斑、手指印返工评估白斑、手指印返工评估2011.05.03-05.06返工片单晶数据分析24695.2341881530.315177764200.93013920.00671179417.774105540.796974520.622897685.5434693总数工作电流漏电流均值Rsh均值Rs均值EFF均值FF均值Voc均值Isc0.00%0.04%2.47%13.77%30.78%34.35%13.16%2.88%1.42%1.05%0.08%0.00%0.00%百分比0161340760848325713526200片数18.618.4-18.618.2-18.418.0-18.217.8-18.017.6-17.817.4-17.617.2-17.417-17.215-1713-1510-1310效率分布返工片利用率=效率大于17%数量/返工片总数=98.86%HongchenHongchenHongchenHongchenHongchenHongchenHongchenHongchenConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnlyConfidential:InternalUseOnly9999总结总结总结总结�（1）接下对待做实验进行验证�（2）对返工效果进一步优化�（3）因返工片评估被动型，接下应从多元性给予评估，应从QC外观良率、碎片率、电性能几个方面进行评估（今后要求因白斑、手指印返工片QC要单独检验，并记录其相关数据）�（4）目前白斑手指印要采取实验工艺II比较理想