相位成象声显微镜的研制及应用

,,(,100084):,PCA/DA/D109/s,(PCI)(FPGA);,,250MHz;A,:;;;;:TG115.28;O42:A:100026656(2001)0920375204DEVELOPMENTANDAPPLICATIONOFAPHASESCANNINGACOUSTICMICROSCOPECHENGe2lin,DONGFang2yuan,WANGGuo2gong(Dept.ofElectronicEngineering,TsinghuaUniversity,Beijing100084,China)Abstract:Aphasescanningacousticmicroscopehasbeendeveloped,whichcandetectthephaseinformationofthereflectedwavesandshowthephaseimage.Thehardwareoftheinstrumentconsistsofasuperhigh2speedA/Dconvertingcardandafastpulsegeneratingandsignalreceivingcard.TheA/Dconverter,inwhichPCIbusandFPGAtechnologiesareused,hasasamplingrateofover109samplespersecond.Thefastpulsegeneratingandsignalreceivingcardcanreli2ablyreceiveandamplifythereflectedwavesthatarenotdemodulated.Sotheoriginalreflectedwavescanbeacquiredpre2cisely.Phasedetectingandimagingarerealizedbysoftware.Wecanalsoattainamplitudeimagethroughdigitaldemodu2lation.Theoperatingfrequencycanvaryfrom2MHzto50MHz.Thereal2timeresultofphaseoramplitudeimageisdis2playedonthescreenofPCterminalandtheAmodescancanbeaccomplishedatthesametime.Thesystemhasbeensuc2cessfullyappliedtotestingsomekindsofspecimens,especiallytothemeasurementofthethicknessandshapeofmetalfilmandthequalityinspectionofsealedobjects.Itcanbeusedinmanyareasforitspowerfulfunction,smallvolumeandlowcost.Keywords:Acousticmicroscope;Phase;Imaging;Hardware;Software,A,B,C(),,:2000201218,[1],,,PCA/D57323920019NDTVol.23No.9Sep.2001©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,,,11.1[1],A/D1.1.11.1.2,,1.1.2.1,A/D,1.1.2.2A/DA/D,A/D1020A/DA/DA/D5109/s,8bits,[1]A/D,,(ISA)PCI,FPGA(GAL),A/D,A/D11.1.3;,,;[1]31A/D1.2,,[1],A2,,,[2,3],2,,,,,,,[4],,2673:©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,:(1)A/D,,33(2),,,3,A,B,O(0),AVOD,BVOC,,=arcsinyVPPyVPPAB=arcsinVOCVPP-arcsinVODVPP,A180,33.1,420MHz1m4,5453.265MHz,,7673.3,8,9773:©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.893.4,10103.5,,1111a,11b,,,3.6,(a)(b)11,,12(a)(b)124:(1)A/DPCIFPGA,,,(2),(3),(4),,(5),,,,,:[1],,,.873:©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.21,,20015,:2:100088:010262010116BP:198210080090:010262015746,62015019,,,,,():1100(,);1100();()1900(),1100(,,)918,10,,,,:,:230051,:,,:[phone],:[phone](),,,,2001,:99:200437,:0212655567752311:[J].,2000,22(12):535-538.[2]LiangK,BennettSD,Khuri2YakubBT,etal.PrecisionmeasurementofRayleighwavevelocityperturbation[J].AppliedPhysicsLetters,1982,41(12):1124-1126.[3]MeeksStevenW,PeterD,HorneD.Microscopicimag2ingofresidualstressusingascanningphase2measuringa2cousticmicroscope[J].AppliedPhysicsLetters,1989,55(18):1835-1837.[4]NikoonahadM.Differentialphasecontrastacousticmi2croscopyusingtiltedtransducers[J].ElectronicsLetters,1987,23(10):489-490.97323920019NDTVol.23No.9Sep.2001©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.