高压气体终端净化技术在标准气体配制中的应用3

3,,(,34116031):,,:;;;:TQ117:A:100727804(2007)0520036203ApplicationofTerminalPurifingTechnologyForHighPressureGasestoThePreparationofStandardGasesSUNFu2nan,WUJiang2hong,FENGQing2xiang(GuangmingResearch&DesignInstituteofChemicalIndustry,Dalian116031,China)Abstract:ApplicationsofterminalpurifingtechnologyforhighpressuregasestothepreparationofstandardGasesarein2troduced.Withtheincreasingdifficultyinthepreparationofstandardgasesandkeencompetitioninthemarket,thetech2nologywillbeusedwidely,Manyyearsofexperimentsshowthatthetechnologywillhavewidemarkettrend.KeyWords:gaspurification;highpressurepurifier;ultrahigh2puritygases,N2O2Ar9919999%,,,,N2-NO,NO2,,,,,N2H2HeArO2NO,,,,,1,,N2O2,,3502450N2H2,013ppm(V/V):,;,;,5,,2,,,255Vol125,No15200710LowTemperatureandSpecialtyGasesOct1,20073:2007209215H2He,9919999%,,2006,,,,H2,H2H2,H2N2COCH43,,,O2(O2)(C1C4),,,O2,:1,32BD25ppm2CH425ppm2C2H65ppm2C2H22ppm2C2H45ppm2C3H810ppm2C3H610ppm2iC4H1025ppm2nC4H1025ppm2O2,,O2,,,,O2,,,,,,,,,O2,ppm,ppm,,015ppm,550,20,,,4CO,,,CO2O2,CO,CO,COCO2O2,,,,,,15MPa,3,,COO2CO2,CO5NONON2ONO2CO2N2,(NO800ppm),NO2,,NONO2,NONO2:NONO2NONO2,,NO,NONO2,NONO2NO2:(),,NOO2,NO2(NO+O2vNO2),,,NONO,N2,NO,,6GB/T10642,3,Ar,,,735,:,,,,3,,,6N,,N2,O2CO2H2O,,500,,,,,Ar,Ar,711,21,31,,,N2O2013ppm,O2,,41,,,51N22SiH4,,POU,,:,,1986,,,:0411285961032HFC-134a2007HFC-134a,,,,,ODS()ODSHFC-134a,,,,,,,,ODS8325